含硅类金刚石膜硬度压痕测试的有限元模拟
Finite Element Simulation of Indentation Testing for Hardness of Si-Containing Diamond-Like Carbon Film
摘 要
使用Abaqus有限元软件通过加载荷与加载位移两种方法对含硅类金刚石膜进行了压痕测试模拟, 得到了不同硅含量类金刚石膜的硬度曲线。结果表明: 两种方法的模拟结果较吻合, 其中加载位移的方法较稳定, 速度较快, 含硅类金刚石膜的硬度随着硅含量的增加而减小; 模拟结果得到了相关试验的验证。
硬度
有限元
压痕
Si-containing diamond-like carbon (Si-DLC)film
hardness
finite element
indentation
Abstract
The simulation for indentation testing of Si-containing diamond-like carbon(Si-DLC) film was carried out by infinite element simulation software Abaqus using loading and displacement methods, and the hardness of the diamond-like carbon film with different silicon contents was obtained. The results show that the two methods fit fairly well, the displacement method was fairly stable and its speed also was fairly quick, and the hardness of Si-DLC film decreased with the increase of the silicon content. The finite element simulation was in agreement with correlative experiments.
中图分类号 TH117 TB43
所属栏目 物理模拟与数值模拟
基金项目 国家自然科学基金资助项目(50805007); 教育部留学回国人员科研启动基金资助项目
收稿日期 2011/4/22
修改稿日期 2011/2/1
网络出版日期
作者单位点击查看
备注刘璨(1987-), 女, 河北保定人, 硕士研究生。
引用该论文: LIU Can,LAN Hui-qing. Finite Element Simulation of Indentation Testing for Hardness of Si-Containing Diamond-Like Carbon Film[J]. Materials for mechancial engineering, 2012, 36(4): 84～87
刘璨,兰惠清. 含硅类金刚石膜硬度压痕测试的有限元模拟[J]. 机械工程材料, 2012, 36(4): 84～87
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参考文献
【1】彭鸿雁. 类金刚石膜的制备、性能与应用[M].北京: 科学出版社, 2004.
【2】KWANG-RYEOL L, MYOUNG-GEUN K, SUNG-JIN C, et al. Structural dependence of mechanical properties of Si incorporated diamond like carbon films deposited by RF plasma-assisted chemical vapour deposition[J].Thin Solid Films, 1997, 308: 263-267.
【3】PAPAKONSTANTINOU P, ZHAO J F, LEMOINE P, et al. The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films[J].Diamond and Related Materials, 2002, 11: 1074-1080.
【4】兰惠清, 崔俊豪, 加藤孝久.掺硅类金刚石膜的摩擦性能研究[J].真空科学与技术, 2011, 31(1): 61-66.
【5】WU Xing-yang, MASAHIRO S, TSUGUYORI O, et al. Characteristics and tribological properties in water of Si-DLC coatings[J].Diamond and Related Materials, 2008, 17: 7-12.
【6】李敏, 梁乃刚, 张泰华, 等.纳米压痕过程的三维有限元数值试验研究[J].力学学报, 2003, 35(3): 257-264.
【7】张健.不同加载方式下类金刚石膜的变形行为及数值模拟研究[D].哈尔滨: 哈尔滨工业大学, 2006.
【8】YOUN S W, KANG C G.FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication[J].Materials Science and Engineering A, 2005, 390(1/2): 233-239.
【9】岳珠峰.平头压痕蠕变损伤实验的有限元模拟分析[J].金属学报, 2005, 41(1): 15-18.
【10】刘扬. 基于纳米压痕技术和有限元仿真的材料塑性性能分析[D].武汉: 武汉理工大学, 2003.
【11】任德斌, 陈英, 靳朝辉, 等.金属薄膜力学性能的有限元分析[J].沈阳建筑大学学报: 自然科学版, 2007, 23(1): 29-32.
【12】刘翊. Si-DLC膜微观摩擦性能及弹塑性接触有限元分析[D].镇江: 江苏大学, 2010.
【13】WANG Yang, LAN Hui-qing, LIU Can. Molecular dynamics simulations on sliding friction between amorphous Si-DLC films[C]// The 7th International Forum on Advanced Material Science and Technology. Dalian: The Dalian University of Technology, 2010.
【14】MENEVE J, JACOBS R, EERSELS L, et al. Friction and wear behaviour of amorphous hydrogenated Si1-xCx films[J].Surface and Coatings Technology, 1993, 62: 577-582.
【15】BAYNE M A, KUROKAWA Z, OKORIE NU. et al. Microhardness and other properties of hydrogenated amorphous silicon carbide thin films formed by plasma-enhanced chemical vapor deposition[J].Thin Solid Films, 1983, 107: 201-206.
【2】KWANG-RYEOL L, MYOUNG-GEUN K, SUNG-JIN C, et al. Structural dependence of mechanical properties of Si incorporated diamond like carbon films deposited by RF plasma-assisted chemical vapour deposition[J].Thin Solid Films, 1997, 308: 263-267.
【3】PAPAKONSTANTINOU P, ZHAO J F, LEMOINE P, et al. The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films[J].Diamond and Related Materials, 2002, 11: 1074-1080.
【4】兰惠清, 崔俊豪, 加藤孝久.掺硅类金刚石膜的摩擦性能研究[J].真空科学与技术, 2011, 31(1): 61-66.
【5】WU Xing-yang, MASAHIRO S, TSUGUYORI O, et al. Characteristics and tribological properties in water of Si-DLC coatings[J].Diamond and Related Materials, 2008, 17: 7-12.
【6】李敏, 梁乃刚, 张泰华, 等.纳米压痕过程的三维有限元数值试验研究[J].力学学报, 2003, 35(3): 257-264.
【7】张健.不同加载方式下类金刚石膜的变形行为及数值模拟研究[D].哈尔滨: 哈尔滨工业大学, 2006.
【8】YOUN S W, KANG C G.FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication[J].Materials Science and Engineering A, 2005, 390(1/2): 233-239.
【9】岳珠峰.平头压痕蠕变损伤实验的有限元模拟分析[J].金属学报, 2005, 41(1): 15-18.
【10】刘扬. 基于纳米压痕技术和有限元仿真的材料塑性性能分析[D].武汉: 武汉理工大学, 2003.
【11】任德斌, 陈英, 靳朝辉, 等.金属薄膜力学性能的有限元分析[J].沈阳建筑大学学报: 自然科学版, 2007, 23(1): 29-32.
【12】刘翊. Si-DLC膜微观摩擦性能及弹塑性接触有限元分析[D].镇江: 江苏大学, 2010.
【13】WANG Yang, LAN Hui-qing, LIU Can. Molecular dynamics simulations on sliding friction between amorphous Si-DLC films[C]// The 7th International Forum on Advanced Material Science and Technology. Dalian: The Dalian University of Technology, 2010.
【14】MENEVE J, JACOBS R, EERSELS L, et al. Friction and wear behaviour of amorphous hydrogenated Si1-xCx films[J].Surface and Coatings Technology, 1993, 62: 577-582.
【15】BAYNE M A, KUROKAWA Z, OKORIE NU. et al. Microhardness and other properties of hydrogenated amorphous silicon carbide thin films formed by plasma-enhanced chemical vapor deposition[J].Thin Solid Films, 1983, 107: 201-206.
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