TiAlN基薄膜的研究进展
Research Progress of TiAlN-Based Thin Films
摘 要
综述了TiAlN薄膜、TiAlN纳米多层膜、TiAlN纳米复合薄膜的研究进展, 主要介绍了3种薄膜的硬度、摩擦磨损等性能, 并对影响其性能的因素进行了分析, 提出了薄膜制备所存在的问题, 最后对其今后的发展做了展望。
薄膜
纳米多层膜
纳米复合膜
TiAlN
film
nano multilayer film
nano composite film
Abstract
The research progress of TiAlN films, TiAlN nano multilayer films and TiAlN nano composite films were reviewed, and the properties of three sorts of films such as hardness, friction and wear, and so on, were also introduced. Influence factors to above properties of TiALN-based thin films were analyzed as well. Problems existing in the coating preparation were presented, and then the future developments of three kinds of TiAlN-based films were previewed.
中图分类号 TG178
所属栏目 综述
基金项目 山东省科技发展计划项目(2011GGX10321); 济南市科技发展计划项目(200906003)
收稿日期 2012/4/11
修改稿日期 2013/1/20
网络出版日期
作者单位点击查看
备注张海平(1987-), 男, 山东淄博人, 硕士研究生。
引用该论文: ZHANG Hai-ping,WANG Shou-ren,GUO Pei-quan. Research Progress of TiAlN-Based Thin Films[J]. Materials for mechancial engineering, 2013, 37(4): 1～5
张海平,王守仁,郭培全. TiAlN基薄膜的研究进展[J]. 机械工程材料, 2013, 37(4): 1～5
被引情况:
【1】严汉兵,许剑光,吴海江,颜建辉,陈晓宇,陈肯, "铝对高温自蔓延合成Ti3SiC2粉体的影响",机械工程材料 39, 46-48(2015)
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参考文献
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【27】LUO Q, ZHOU Z, RAINFORTH W M, et al. TEM-EELS study of low-friction superlattice TiAlN/VN coating: the wear mechanisms[J].Tribology Letters, 2006, 24(2): 171-178.
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【30】HARISH C, BARSHILIA, DEEPTHI B, et al. Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering[J].Vacuum, 2006, 81(4/6): 479-488.
【31】LI C H, DU Y, WANG A J, et al. Effect of Al content on microstructure and mechanical properties of Ti-Al-Si-N nanocomposite coatings[J].International Journal of Refractory Metals and Hard Materials, 2009, 27(4): 718-721.
【32】荆阳, 庞思勤, 张学恒, 等.TiAlN-MoS2/TiAlN硬质润滑膜研究[J].北京理工大学学报, 2002, 22(4): 457-459.
【2】ZHOU Z, RAINFORTH W M, LEWIS D B, et al. Oxidation behaviour of nanoscale TiAlN/VN multilayer coating[J].Surface and Coatings Technology, 2004, 177/178: 198-203.
【3】陈佳荣, 朱丽慧, 倪旺阳, 等.Al含量对涂层的组织和抗氧化性能的影响[J].上海金属, 2010, 32(3): 11-14.
【4】ESCUDEIRO S A, KARIMI A, DERFLINGER V H, et al. The role of hcp-AlN on hardness behavior of Ti1-xAlxN nanocomposite during annealing[J].Thin Solid Films, 2004, 469/470: 339-344.
【5】GWANG S K, LEE S Y, HAHN J H. Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering[J].Surface and Coatings Technology, 2005, 193(1/3): 213-218.
【6】WANG S Q, CHEN K H, CHEN L, et al. Effect of Al and Si additions on microstructure and mechanical properties of TiN coatings[J].Journal of Central South University of Technology: English Edition, 2011, 18: 310-313.
【7】祝新发, 张晶晶, 周颐辛, 等. 离子镀TiAlN工具涂层的微结构与切削性能[J].工具技术, 2010, 48(12): 31-34.
【8】YOON S Y, KIMB J K, KWANG H K. A comparative study on tribological behavior of TiN and TiAlN coatings prepared by arc ion plating technique[J].Surface and Coatings Technology, 2002, 161(2/3): 237-242.
【9】ZHU Y C, FUJITA K, IWAMOTO N, et al. Influence of boron ion implantation on the wear resistance of TiAlN coating[J].Surface and Coatings Technology, 2002, 158/159: 664-668.
【10】李学超, 李长生, 晋跃, 等.磁控溅射TiAlN和WTiN薄膜的制备与摩擦性能研究[J].真空, 2011, 48(1): 47-49.
【11】ICHIMURA H, KAWANA A. High-temperature oxidation of ion-plated TiN and TiAlN films[J].Journal of Material Research, 1995, 8(5): 1093-1098.
【12】ZHOU M, MAKINO Y, NOSE M, et al. Phase transition and properties of TiAlN thin films prepared by RF-plasma assisted magnetron sputtering[J].Thin Solid Films, 1999, 339(1/2): 203-208.
【13】林小东, 宋绪丁, 傅高升. 复合工艺制备TiAlN薄膜及其高温抗氧化性能研究[J].表面技术, 2010, 39(6): 22-25.
【14】毛延发, 兰新哲, 周廉, 等. V元素对TiAlN涂层高温氧化行为的影响[J].稀有金属快报, 2008, 27(5): 27-32.
【15】PEILER M, KUTSCHEJ K, PENOY M, et al. The influence of bias voltage on structure, and mechanical/tribological properties of arc evaporated Ti-Al-V-N coatings[J].Surface and Coatings Technology, 2007, 202: 1050-1054.
【16】YUE J L, LI G Y. Microstructure and mechanical properties of TiAlN/Si3N4 nano-multilayers synthesized by reactive magnetron sputtering[J].Journal of Alloys and Compounds, 2009, 481(1/2): 710-713.
【17】PARK J K, BAIK Y J. Thermal stability of nano-layered structure and hardness of TiAlN/Si3N4 nanoscale multilayered coating [J]. Materials Letters, 2009, 63(20): 1674-1676.
【18】董松涛, 喻利花, 薛安俊, 等.TiAlN/CrAlN 纳米结构多层膜的结构与性能[J].材料热处理学报, 2010, 31(8): 121-126.
【19】PAN J M, TURM S, PAN J P, et al. The influence of rotation during sputtering on the stoichiometry of TiAlN/CrNx multilayer coating[J].Surface and Coatings Technology, 2008, 203(5/7): 554 - 557.
【20】HUANG S H, HSIEH T E, CHEN J W. BGA cutter improvement utilizing nano-TiAlN coating layers synthesized by cathodic arc ion plating process[J].Surface and Coatings Technology, 2009, 204(6/7): 988-991.
【21】BRAIC V, ZOITA C N, BALACEANU M, et al. TiAlN/TiAlZrN multilayered hard coatings for enhanced performance of HSS drilling tools[J]. Surface and Coatings Technology, 2009, 204(12/13): 1925-1928.
【22】XU J H, YU L H, DONG S R, et al. Structure transition of BN layers and its influences on the mechanical properties of AlN /BN nanomultilayers[J].Thin Solid Films, 2008, 516(23): 8640-8645.
【23】PARK J K, BAIK Y J. Increase of hardness and thermal stability of TiAlN coating by nanoscale multilayered structurization with a BN phase[J].Thin Solid Films, 2008, 516(11): 3661-3664.
【24】CHANG C L, JAO J Y, HO W Y, et al. Influence of bi-layer period thickness on the residual stress, mechanical and tribological properties of nanolayered TiAlN/CrN multilayer coatings[J].Vacuum, 2007, 81(5): 604-609.
【25】曹猛, 李强, 杨莹, 等.离子束流和基底温度对 ZrN/TiAlN 纳米多层膜性能的影响[J].真空科学与技术学报, 2008, 28(增): 29-32.
【26】MAYRHOFER P H, HOVSEPIAN P E, MITTERER C, et al. Calorimetric evidence for frictional self-adaptation of TiAlN/VN superlattice coatings[J].Surface and Coatings Technology, 2004, 177/178: 341-347.
【27】LUO Q, ZHOU Z, RAINFORTH W M, et al. TEM-EELS study of low-friction superlattice TiAlN/VN coating: the wear mechanisms[J].Tribology Letters, 2006, 24(2): 171-178.
【28】ZHANG R F, VEPREK S. Phase stabilities of self-organizednc-TiN/a-Si3N4 nanocomposites and of Ti1-xSixNy solid solutions studied by ab initio calculation and thermodynamic modeling[J].Thin Solid Films, 2008, 516: 2264 -2275.
【29】陆昆.Ti-Al-N、Ti-Al-V-N复合膜及 Ti-Al-N/VN多层膜的制备、微结构与性能研究[D].镇江: 江苏科技大学, 2011.
【30】HARISH C, BARSHILIA, DEEPTHI B, et al. Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering[J].Vacuum, 2006, 81(4/6): 479-488.
【31】LI C H, DU Y, WANG A J, et al. Effect of Al content on microstructure and mechanical properties of Ti-Al-Si-N nanocomposite coatings[J].International Journal of Refractory Metals and Hard Materials, 2009, 27(4): 718-721.
【32】荆阳, 庞思勤, 张学恒, 等.TiAlN-MoS2/TiAlN硬质润滑膜研究[J].北京理工大学学报, 2002, 22(4): 457-459.
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