交/直流源微弧氧化BaTiO3薄膜的微观结构及铁电性能
Microstructure and Ferroelectric Properties of BaTiO3 Films Deposited by AC or DC Microarc Oxidation
摘 要
以Ba(OH)2溶液为电解液, 分别采用交/直流源微弧氧化技术在工业纯钛板表面沉积BaTiO3薄膜, 并对薄膜的物相组成、表面形貌及铁电性能进行了表征。结果表明: 直流源和交流源模式下沉积的BaTiO3薄膜分别主要由四方相和六方相构成; 薄膜表面均匀散布有孔径为几百纳米至几微米的孔洞, 且存在裂纹; 六方相BaTiO3薄膜需经长时间高温退火才可生成具有铁电性能的四方相BaTiO3, 而直流源微弧氧化可直接生成BaTiO3铁电薄膜。
BaTiO3
铁电薄膜
microarc oxidation (MAO)
barium titanate
ferroelectric film
Abstract
Taking Ba(OH)2 solution as eletrolyte, alternative current (AC) and direct current (DC) power microarc oxidation (MAO) technologies were used to deposite BaTiO3 films on industrial pure titanium plate, and the phase composite, surface morphology and ferroelectric properties of the films were characterized. The results show that the films deposited by DC /AC power microarc oxidation were mainly composed of tetragonal and hexagonal BaTiO3 phase, respectively. Holes with diameter of hundreds of nanometer to a few microns and cracks distributed uniformly on the films surface. The BaTiO3 film with hexagonal phase had not ferroelectric properties until it was annealed at high temperature for a long time, and the ferroelectric BaTiO3 film could be prepared directly by DC power microarc oxidation technology.
中图分类号 TM22
所属栏目 材料性能及其应用
基金项目 中央高校基本科研业务费专项资金资助项目(2012ZZ0011)
收稿日期 2012/7/24
修改稿日期 2013/4/2
网络出版日期
作者单位点击查看
备注王敏(1978-), 女, 浙江长兴人, 讲师, 硕士。
引用该论文: WANG Min,GUO Hui-yong,HAN bing,LI Wen-fang. Microstructure and Ferroelectric Properties of BaTiO3 Films Deposited by AC or DC Microarc Oxidation[J]. Materials for mechancial engineering, 2013, 37(7): 64～67
王敏,郭会勇,韩冰,李文芳. 交/直流源微弧氧化BaTiO3薄膜的微观结构及铁电性能[J]. 机械工程材料, 2013, 37(7): 64～67
被引情况:
【1】康永,黄英, "铈掺杂钛酸钡/羰基铁复合粉体吸波材料的性能",机械工程材料 39, 54-57(2015)
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【3】苗鸿雁, 马景云, 谈国强, 等.BST铁电薄膜材料的研究现状及其进展[J].材料导报, 2005, 19(12): 99-101.
【4】WU Tai-bor, WU Chii-ming, CHEN Mei-ling. Dielectric and leakage current characteristics of Ba(Ti1-xZrx)O3 thin films deposited by rf magnetron sputtering[J].Thin Solid Films, 1998, 334(1/2): 77-81.
【5】FASQUELLE D, ROUSSEAU A, GUILLOUX-VIRY M, et al. Dielectric and structural characterization of KNbO3 ferroelectric thin films epitaxially grown by pulsed laser deposition on Nb doped SrTiO3[J].Thin Solid Films, 2010, 518(12): 3432 -3438.
【6】XU Jin-bao, LIU Yun, WITHERS R L. Electric characteristics of BaTiO3/Bi0.5K0.5TiO3 multilayered thin films synthesized via metalloriganic decompositon[J].Solid State Ionics, 2009, 180(17/19): 1118-1120.
【7】FAN Yan-hua, YU Shu-hui, SUN Rong, et al. Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils[J].Applied Surface Science, 2010, 256(22): 6531-6535.
【8】FAN Su-hua, CHEN Wen, ZHANG Feng-qing, et al. Effects of excess bismuth on structure and properties of SrBi4Ti4O15 ceramics[J].Bulletin of the Chinese Ceramic Society, 2006, 25(4): 76-79.
【9】GNEDENKOV S V, GORDIENKO P S, KHRISANFOVA O A, et al. Formation of BaTiO3 coating on titanium by microarc oxidation method[J].Journal of Materials Science, 2002, 37(11): 2263-2265.
【10】姜兆华, 李文旭, 闫久春, 等.微等离子体氧化法制备钛酸钡陶瓷膜[J].材料工程, 2002(2): 34-37.
【11】WU Chu-tsun, LU Fu-hsing. Synthesis of barium titanate films by plasma electrolytic oxidation at room electolyte temperature[J].Surface and Coatings Technology, 2005, 199(2/3): 225-230.
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【13】GUO Hui-yong, HUANG Wen-bo, LI Wen-fang, et al.The synthesis and characterization of SrTiO3 film fabricated by micro-arc oxidation[J].Advanced Materials Research, 2011, 311/313: 1262-1266.
【14】HUANG Wen-bo, LI Wen-fang, HAN Bing. Study on BaTiO3 films prepared by AC power microarc oxidation[J].Science in China Series E-Technological Sciences, 2009, 52(8): 2195-2199.
【15】郭会勇, 李文芳, 黄文波.微弧氧化法生成四方相BaTiO3薄膜工艺研究[J].功能材料, 2011, 42(S3): 507-510.
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【21】王国强, 王安福, 王绍明.Sol-Gel法制备BST铁电薄膜及性能研究[J].武汉理工大学学报, 2007, 29(5): 10-12.
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