Finite Element Simulation of Bonding Properties for Ti, TiN Films on 316L Stainless Steel Based on Nanoindentation Experiments
摘 要
通过纳米压痕试验测得316L不锈钢基体、纯钛薄膜与TiN薄膜的弹性模量、硬度和压痕过程载荷-位移曲线;采用ANSYS有限元分析软件建立纳米压痕试验的有限元模型, 通过量纲分析方法推导出上述材料在纳米尺度下的双线性应力-应变关系, 并计算得到相应载荷-位移曲线;利用有限元模型分析了两种薄膜/基体间的结合性能。结果表明: 纳米压痕试验和有限元模拟得到的载荷-位移曲线吻合较好, 利用模型定性判断TiN薄膜与基体的结合性能优于纯钛薄膜的, 与划痕试验结果相符, 验证了此方法的可行性。
Abstract
The modulus, hardness and indentation load-displacement curves of 316L stainless steel substrate, Ti film and TiN film were obtained by nanoindentation tests. The bilinear stress and strain relation of above materials was deduced by ANSYS finite element simulation and dimensional analysis, and then the corresponding indentation load-displacement curves obtained by computation and the bonding property of these two films/substrate systerms were analysed by the model. The results show that the identation load-displacement curves from computation were agreement well with that from nanoindentation tests. It was qulitatively indicated that the bonding property between TiN film and substrate was better than that between Ti film and substrate, which fitted the stratch test result well, proving the validity of the proposed method.
中图分类号 TG146.2
所属栏目 物理模拟与数值模拟
基金项目 国家自然科学基金资助项目(11172195)
收稿日期 2012/8/9
修改稿日期 2013/6/15
网络出版日期
作者单位点击查看
备注张星(1986-), 男, 河南禹州人, 硕士研究生。
引用该论文: ZHANG Xing,WANG He-feng,YUAN Guo-zheng,SHU Xue-feng. Finite Element Simulation of Bonding Properties for Ti, TiN Films on 316L Stainless Steel Based on Nanoindentation Experiments[J]. Materials for mechancial engineering, 2013, 37(9): 90~95
张星,王鹤峰,袁国政,树学峰. 基于纳米压痕试验的316L不锈钢表面钛、TiN薄膜结合性能的有限元模拟[J]. 机械工程材料, 2013, 37(9): 90~95
被引情况:
【1】徐晓燕,梁明,王鹏飞,焦高峰,李成山, "测试位置对纳米压痕法测Nb/Cu复合材料线材硬度的影响",机械工程材料 39, 39-42(2015)
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参考文献
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【2】BOUZAKIS K-D, MICHAILIDIS N. An accurate and fast approach for determining materials stress-strain curves by nanoindentation and its FEM-based simulation[J].Materials Characterization, 2006, 56: 147-157.
【3】冀国俊, 使志铭.氧化钛涂膜玻璃的纳米压痕实验及有限元模拟[J].稀有金属材料与工程, 2007, 36(增2): 560-563.
【4】黄跃飞, 张俊杰, 周军晖.单晶铜薄膜纳米压痕过程的分子动力学模拟[J].机械工程材料, 2008, 32(4): 81-83.
【5】李慧君, 许荔, 江晓禹.环氧聚氨酯梯度功能耐磨涂层性能的有限元分析[J].机械工程材料, 2008, 32(7): 79-81.
【6】MA Z S, ZHOU Y C, LONG S G. On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects[J].International Journal of Plasticity, 2012, 34: 1-11.
【7】PELLETIER H. Predictive model to estimate the stress-strain curves of bulk metals using nanoindentation[J].Tribology International, 2006, 39: 593-606.
【8】DAO M, CHOLLACOOP N, VAN VLIET K J. Computational modeling of the forward and reverse problems in instrumented sharp indentation[J].Acta Mater, 2001, 49: 3899-3918.
【9】戎俊梅, 柴国钟, 郝伟娜.基于纳米压痕技术及有限元模拟的薄膜力学性能研究[J].浙江工业大学学报, 2011, 39(6): 674-678.
【10】田正磊, 金杰, 田省委.薄膜/基体结构的纳米压痕实验及其有限元分析[J].工具技术, 2012, 46(2): 16-19.
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