采用正交试验方法, 使用扫描电镜X射线能谱仪对304L不锈钢标样的硅、锰、铬、镍4种元素含量进行了定量测定, 研究了加速电压、活时间、束斑直径以及工作距离4个因素对测定结果影响的显著性, 并通过极差分析和方差分析的方法得出了最佳试验条件。结果表明: 加速电压对测定结果的影响最为显著, 活时间和工作距离两者对测定结果的影响相当, 束斑直径对测定结果的影响不大; 该试验较佳的测试条件为加速电压20 kV, 活时间80 s, 束斑直径5.6 μm, 工作距离9.5 mm; 在该条件下测得的各元素含量均与标准值非常接近。

Orthogonal test was applied to quantitative analysis of Si, Mn, Cr and Ni four elements content of 304L stainless steel standard sample by SEM and energy dispersive spectroscopy(EDS), and the significance of different test factors such as accelerating voltage, live time, spotsize and working distance on the measured results was analyzed, and the best test conditions were obtained by range analysis and variance analysis. The result show that the most significant factor was accelerating voltage, the significance of live time and working distance was quite similar, and the minimal significant factor was spotsize. The optimal test conditions were as following with accelerating voltage being 20 kV, live time being 100 s, spotsize being 5.0 μm, working distance being 10 mm. The measured four elements content under the optimal conditions were all very close to the standard values.