常见气体用金属氧化物气敏材料的研究进展
Research Progress on Metal Oxide Gas Sensing Materials for Common Gases
摘 要
综述了近年来用于检测CO2、CH4、CO、NOx和H2等常见气体的金属氧化物气敏材料的最新研究进展.针对气体检测的不同需求,介绍了现阶段主要使用的金属氧化物气敏材料的结构和成分,重点阐述了目前能达到的最佳检测效果,简要分析了部分金属氧化物的制备工艺,并展望其未来发展方向.
常见气体
气敏性能
metal oxide
common gas
gas sensing property
Abstract
The latest research progress on metal oxide gas sensing materials for detecting CO2,CH4,NOx,CO and H2,respectively is summarized.Some metal oxide gas sensing materials used mainly at the present stage with different structures and chemical composition are introduced according to various needs upon gas detection.Here,the best achieved detection results are focused on,the preparation technologies of partial metal oxides are analyzed briefly,and the future research trends are pointed out.
中图分类号 TP212.2
所属栏目 综述
基金项目 国家自然科学基金资助项目(51102165);国家重大基础研究计划(973)项目(2011CB922200)
收稿日期 2013/12/9
修改稿日期 2014/7/23
网络出版日期
作者单位点击查看
备注由雪玲(1988-),女,山东烟台人,硕士研究生.
引用该论文: YOU Xue-ling. Research Progress on Metal Oxide Gas Sensing Materials for Common Gases[J]. Materials for mechancial engineering, 2015, 39(3): 7～11
由雪玲. 常见气体用金属氧化物气敏材料的研究进展[J]. 机械工程材料, 2015, 39(3): 7～11
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【2】GUBPTA B L.GB-2004N industrial sensor technologies and markets[R].Nowalk,US:Business Communication Company,2004.
【3】CHEN C,NEWCOMB R W,WANG Y D.A trace methane gas sensor using mid-infrared quantum cascaded laser at 7.5 μm[J].Applied Physics:B,2013,113(4):491-501.
【4】SEIYAMA T,KATO A,FUJIISHI K,et al.A new detector for gaseous components using semiconductive thin films[J].Analytical Chemistry,1962,34:1502-1503.
【5】李平,余萍,肖定全.气敏传感器的近期进展[J].功能材料,1999,30(2):127-132.
【6】SEIYAMA T,KATO A,FUJIISHI K,et al.A new detector for gaseous components using semiconductive thin films[J].Analytical Chemistry,1962,34:1502-1503.
【7】YUASA M,KIDA T,SHIMANOE K.Preparation of a stable sol suspension of Pd-loaded SnO2 nanocrystals by a photochemical deposition method for highly sensitive semiconductor gas sensors[J].Applied Materials Interfaces,2012,4:4231-4236.
【8】WANG Z J,LI Z Y,JIANG T,et al.Ultrasensitive hydrogen sensor based on Pd-loaded SnO2 electrospun nanofibers at room temperature[J].Applied Materials Interfaces,2013,5:2013-2021.
【9】BUSO D,POST M,CANTALINI C,et al.Gold nanoparticle-doped TiO2 semiconductor thin films:gas sensing properties[J].Advanced Functional Materials,2008,18:3843-3849.
【10】赵义芬,赵鹤云,吴兴惠.金属氧化物半导体气敏材料的研究进展[J].传感器世界,2009(1):6-11.
【11】刘海峰,彭同江,孙红娟,等.气敏材料敏感机理研究进展[J].中国粉体技术,2007(4):42-45.
【12】BARSAN N,WEIMAR U.Conduction model of metal oxide gas sensors[J].Journal of Electroceramics,2001,7:143-167.
【13】DARIENZO M,CRISTOFORI D,SCOTTI R,et al.New insights into the SnO2 sensing mechanism based on the properties of shape controlled tin oxide nanoparticles[J].Chemistry of Materials,2013,25:3675-3686.
【14】BAI S L,SHI B J,MA L J,et al.Synthesis of LaFeO3 catalytic materials and their sensing properties[J].Science in China Series:B,2009,52(12):2106-2113.
【15】REBHOLZ J,BONANATI P,JAESCHKE C,et al.Conduction mechanism in undoped and antimony doped SnO2 based FSP gas sensors[J].Sensors and Actuators:B,2013,188:631-636.
【16】ZENG W,LIU T M.Hydrogen sensing characteristics and mechanism of nanosize TiO2 dope with metallic ions[J].Physica B:Condensed Matter,2010,405(2):564-568.
【17】XU J Q,HAN J J,ZHANG Y,et al.Studies on alcohol sensing mechanism of ZnO based gas sensors[J].Sensors and Actuators:B,2008,132:334-339.
【18】KIM J,YONG K.Mechanism study of ZnO nanorod-bundle sensors for H2S gas sensing[J].The Journal of Physical Chemistry:C,2011,115:7218-7224.
【19】BAI S L,SHI B J,MA L J,et al.Synthesis of LaFeO3 catalytic materials and their sensing properties[J].Science in China Series:B,2009,52(12):2106-2113.
【20】KOROTCENKOV G,HAN S D,CHO B K,et al.Grain size effects in sensor response of nanostructured SnO2- and In2O3-based conductometric thin film gas sensor[J].Critical Reviews in Solid State and Materials Sciences,2009,34(1/2):1-17.
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【22】MA J M,ZHANG J,WANG S R,et al.Superior gas-sensing and lithium-storage performance SnO2 nanocrystals synthesized by hydrothermal method[J].Cryst Eng Comm,2011,13:6077-6081.
【23】位莉,苏慧兰,张荻.纳米结构金属氧化物气敏材料的研究进展[J].机械工程材料,2013,37(1):5-9.
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【25】ANDREA H,JU M.A novel thick film conductive type CO2 sensor[J].Sensors and Actuators:B,1996,34(2):388-395.
【26】HERRAN J,FERNANDEZ-GONZALEZ O,CASTRO-HURTADA I,et al.Photoactivated solid-state gas sensor for carbon dioxide detection at room temperature[J].Sensors and Actuators:B,2010,149(2):368-372.
【27】HARIDAS D,CHOWDHURI A,SREENIVAS K,et al.Enhanced response characteristics of SnO2 thin film loaded with nanoscale catalytic clusters for Methane gas[J].Materials Research Society Symposium Proceedings,2013,1303:169-176.
【28】CHOUDHARY M,MISHRA V N,DWIVEDI R.Pd-doped tin-oxide-based thick-film sensor array for detection of H2,CH4,and CO[J].Journal of Electronic Materials,2013,42(9):2793-2802.
【29】ZHANG S L,LIM J O,HUH J S,et al.Selective growth of ZnO nanorods and its gas sensor application[J].IEEE Sensors Journal,2012,12(11):3143-3148.
【30】PATI S,MAITY A,BANERJI P,et al.Qualitative and quantitative differentiation of gases using ZnO thin film gas sensors and pattern recognition analysis[J].Analyst,2014,139:1796-1800.
【31】ZHANG Y,XU J,XIANG Q,et al.Brush-like hierarchical ZnO nanostructures:synthesis,photoluminescence and gas sensor properties[J].The Journal of Physical Chemistry:C,2009,113:3430-3435.
【32】HIEU N V,KHOANG N D,TRUNG D D,et al.Comparative study on CO2 and CO sensing performance of LaOCl-coated ZnO nanowires[J].Journal of Hazardous Materials,2013,244:209-216.
【33】LI Y J,LI K M,WANG C Y,et al.Low-temperature electrodeposited Co-doped ZnO nanorods with enhanced ethanol and CO sensing properties[J].Sensors and Actuators:B,2012,161:734-739.
【34】ZHUKOVA A A,SHATOKHIN A N,PUTILIN F N,et al.Effect of surface modification with palladium on the CO sensing properties of antimony-doped SnO2 whiskers[J].Inorganic Materials,2013,49(10):1005-1010.
【35】SINGH A K,PATIL S B,NAKATE U T,et al.Effect of Pd and Au sensitization of bath deposited flowerlike TiO2 thin films on CO sensing and photocatalytic properties[J].Journal of Chemistry,2013,2013:370578-370585.
【36】HEIDARI E K,MARZBANRAD E,ZAMANI C,et al.Nanocasting synthesis of ultrafine WO3 nanoparticles for gas sensing applications[J].Nanoscale Research Letter,2010,5:370-373.
【37】ZHANG C,DEBLIQUY M,BOUDIBA A,et al.Sensing properties of atmospheric plasma-sprayed WO3 coating for sub-ppm NO2 detection[J].Sensors and Actuators:B,2010,144(1):280-288.
【38】SHI L,NAIK A,GOODALL J,et al.Highly sensitive ZnO nanorod- and nanoprism-based NO2 gas sensors:size and shape control using a continuous hydrothermal pilot plant[J].Langmuir,2013,29(33):10603-10609.
【39】CHEN M,WANG Z,HAN D,et al.Porous ZnO polygonal nanoflakes:synthesis,use in high-sensitivity NO2 gas sensor,and proposed mechanism of gas sensing[J].The Journal of Physical Chemistry:C,2011,115(26):12763-12773.
【40】VIJAYALAKSHMI K,RAVIDHAS C,PILLAY V,et al.Influence of deposition parameters and heat treatment on the NO2 sensing properties of nanostructured indium tin oxide thin film[J].Thin Solid Films,2011,519:3378-3382.
【41】KWAK Y,WANG J,MEANG S,et al.Hydrogen sensing properties of dielectrophoretically assembled SnO2 nanoparticles on CMOS-compatible micro-hotplates[J].Nanotechnology,2011,22:445501-445505.
【42】HUANG H,LEE Y C,TAN O K,et al.High sensitivity SnO2 single-nanorod sensors for the detection of H2 gas at low temperature[J].Nanotechnology,2009,20(11):115501-115503.
【43】LUPAN O, URSAKI V V,CHAI G,Selective hydrogen gas nanosensor using individual ZnO nanowire with fast response at room temperature[J].Sensors and Actuators:B,2010,144(1):56-66.
【44】HASSAN J J,MAHDI M A,CHIN C W,et al.Room temperature hydrogen gas sensor based on ZnO nanorod arrays grown on a SiO2/Si substrate via a microwave-assisted chemical solution method[J].Journal of Alloys and Compounds,2013,546:107-111.
【45】WANG Z J,LI Z Y,SUN J H,et al.Improved hydrogen monitoring properties based on p-NiO/n-SnO2 heterojunction composite nanofibers[J].Journal of Physical Chemistry:C,2010,114(13):6100-6105.
【46】CHANG C M,HON M H,LEU I C.Outstanding H2 sensing performance of Pd nanoparticle-decorated ZnO nanorod arrays and the temperature-dependent sensing mechanisms[J].Applied Materials Interfaces,2013,5:135-143.
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