基于纳米压痕试验, 利用Oliver和Pharr法求解氮化钛(TiN)镀膜的弹性模量和刚度, 采用DEFORM有限元分析软件, 通过量纲分析及曲线拟合法确定了TiN镀膜的屈服强度; 针对不同膜厚, 取镀膜上7个特征点进行力学性能有限元分析, 通过膜基分离试验进行了验证。结果表明: 压头压入点P0所受应力最大, 其值为4 230 MPa, 膜基结合处Ps点出现应力集中, 所受切应力最大, 其值随膜厚增大(1～2.5 μm)而由3 150 MPa降低至2 260 MPa, 该位置为镀膜最易剥落处; 膜基分离试验证实镀膜分离区就在Ps点附近; 随着镀膜厚度增加, 基底对镀膜的影响程度逐渐减小。

The Oliver method and Pharr method were employed to calculate the elastic modulus and the stiffness of titanium nitride (TiN) films based on nanoindentation experiment. With the help of finite element analysis software DEFORM, the yield strength of the TiN film were determined through dimensional analysis and curve fitting. The mechanical property analysis at seven feature points were carried out for the films with different thicknesses using FEM, and the result was verified by a separation experiment of film and substrate. The results show that the stress at the pressure point P0 exhibited the maximum value of 4 230 MPa. The stress concentration appeared at pressure point Ps, the joint between film and substrate, in which tangential stress reached to the maximum from 3 150 MPa to 2 260 MPa with the increase of film thickness from 1 μm to 2.5 μm. And the place around the point Ps was easiest to peel off, which was proven by the seperation experiment. The influence of substrate on the film declined with the increase of film thickness.