分析室真空度对原子探针测试数据质量的影响
Effect of Analysis Chamber Pressure on Experimental Data Quality of Atom Probe
摘 要
根据三维原子探针的工作原理,分析了样品分析室内真空度对测试数据质量的影响,并对核反应堆压力壳钢样品进行了试验分析.结果表明:分析室内的真空度与获得试验数据的背底呈明显的线性相关关系,真空度越高,数据的背底越低;当数据背底高时,在成分分析过程中会引入较大的分析误差,且元素的含量越低,其分析误差越大,尤其当元素原子分数低于0.05%时,其分析误差会达100%以上.因此,稳定维持分析室的超高真空,对于获得高质量的试验数据至关重要.
背底
分析室真空度
成分分析
atom probe tomography
background
analysis chamber pressure
composition analysis
Abstract
The effect of analysis chamber pressure on the data quality was analyzed according to the working principle of three dimensional atom probe.A reactor pressure vessel steel sample was analyzed by atom probe tomography.The results show that the background had good linear relationship with the analysis chamber pressure,and the better vacuum,the less background could be obtained.The high background introduced serious analysis errors of elemental content,especially when the content of the element was very low.Therefor,maintaining the steady high vacuum of analysis chamber is very necessary for obtaining high quality experimental data.
中图分类号 TH87 DOI 10.11973/lhjy-wl201508007
所属栏目 试验与研究
基金项目 国家自然科学基金资助项目(51301103)
收稿日期 2014/12/22
修改稿日期
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备注李慧(1984-),男,副研究员,博士.
引用该论文: LI Hui,ZHANG Yue-yue,LIU Wen-qing. Effect of Analysis Chamber Pressure on Experimental Data Quality of Atom Probe[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2015, 51(8): 555～559
李慧,张悦悦,刘文庆. 分析室真空度对原子探针测试数据质量的影响[J]. 理化检验－物理分册, 2015, 51(8): 555～559
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参考文献
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【3】LI Hui,XIA Shuang,ZHOU Bang-xin,et al.C-Cr segregation at grain boundary before the carbide precipitation in alloy 690[J].Materials Characterization,2012,66:68-74.
【4】徐刚,蔡琳玲,冯柳,等.利用APT对RPV模拟钢中界面上原子偏聚特征的研究[J].金属学报,2012,48(7):789-796.
【5】徐刚,蔡琳玲,冯柳,等.利用APT对RPV模拟钢中富Cu原子团簇析出的研究[J].金属学报,2012,48(4):407-413.
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【7】MILLER M K,FORBES R G.Atom probe tomography [J].Materials Characterization,2009,60:461-469.
【8】MILLER M K,CEREZO A,HETHERINGTON M G,et al.Atom probe tomography [M].Oxford:Clarendon Press,1996.
【9】赵帅,刘秋云.一种精确测量ASTM标准圆形拉伸试样锥度的方法[J].理化检验-物理分册,2015,51(1):43-44.
【10】李霞章,DENG Fei,NI Chao-ying,等.原位透射电子显微术研究进展[J].理化检验-物理分册,2015,51(4):225-228.
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