溅射参数对(Zr,Ti)N复合镀层耐蚀性的影响
Ettect of Sputtering Parameters on Corrosion Resistance of (Zr,Ti)N Composite Film
摘 要
用真空磁控溅射技术,在Q235钢的基底上沉积(Zr,Ti)N复合镀层,改变溅射工艺参数(温度、Ar/ N2流量比、基体偏压)制成8个镀层耐蚀性对比试样,用PS-268A型电化学测试仪,在3.5%的NaCl电解质溶液中腐蚀30~60 min,用极化曲线和Tafel直线外推法,确定各试样的耐蚀性的差异.结果表明,溅射工艺参数对镀层的耐蚀性影响较大.从耐蚀性方面考虑,推荐工艺参数为:溅射温度350 ℃,Ar/ N2流量比60 /30(SCCM),基体偏压120 V.
(Zr,Ti)N复合镀层
工艺参数
耐蚀性
vacuum magnetron sputtering
(Zr,Ti)N composite film
process parameters
corrosion resistance
Abstract
(Zr,Ti)N composite film was prepared on Q235 steel by vacuum sputtering technology.Changing sputtering conditions such as temperature,flow ratio of N2 to Ar and matrix bias voltage,eight kinds of (Zr,Ti)N film samples were obtained.The difference of corrosion resistance of the samples was analyzed by polarization curves and Tafel linear extrapolation method after immersion in 3.5% NaCl solution for 30~60 min.The results indicated that the corrosion behavior of the film was influenced by sputtering conditions.The optimal process parameters were sputtering temperature 350 ℃,ratio of Ar to N2 60 /30(SCCM) and matrix bias voltage 120 V.
中图分类号 TG174.44
所属栏目 应用技术
基金项目
收稿日期 2007/11/6
修改稿日期 2007/11/27
网络出版日期
作者单位点击查看
引用该论文: ZHANG Wei-qiang,HU Song-qing,LI Fei,DU Shan-bo. Ettect of Sputtering Parameters on Corrosion Resistance of (Zr,Ti)N Composite Film[J]. Corrosion & Protection, 2008, 29(8): 464～466
共有人对该论文发表了看法，其中：
人认为该论文很差
人认为该论文较差
人认为该论文一般
人认为该论文较好
人认为该论文很好
参考文献
【1】黄佳木,徐成俊,王亚平.室温磁控溅射制备(Ti,Zr)N薄膜及其性能研究[J].材料科学与工程学报,2005,23(5):516-518.
【2】L A Donohue,J Cawley,J S Brooks.Deposition and characterization of arc-bond sputter TixZryN coatings from pure metallic and segmented targets[J].Surface and Coatings Technology,1995,72 :128-138.
【2】L A Donohue,J Cawley,J S Brooks.Deposition and characterization of arc-bond sputter TixZryN coatings from pure metallic and segmented targets[J].Surface and Coatings Technology,1995,72 :128-138.
相关信息
