微机电系统用电铸镍铁合金的制备及其电磁性能
Composition and Electromagnetic Property of Elctrofomed Ni-Fe Alloys for MEMS
摘 要
研究了电铸镍铁合金制备过程中工艺条件对电铸层成分的影响,获得含铁质量分数20%电铸层的最佳工艺条件为镀液硫酸亚铁含量6 g/L、pH值2.5、温度55 ℃、电流密度3.5 A/dm2;讨论了镀层形貌及电磁性能的变化关系.结果表明：制备的镀层表面光亮、结构致密,晶面为(111)、(220)、(200).该铸镍铁合金矫顽力最小为2.95×10-2 A/m,表现出较强的顺磁性.剩磁力随着铸层铁含量的增大呈下降趋势,饱和磁化强度为IJ85合金的10%,具有优良的电磁性能.可以用于制造微型磁执行器与传感器元件.
镍铁合金
电磁性能
微机电系统
electroforming
Ni-Fe alloy
electromagnetic property
MEMS
Abstract
The relationship between coating microstructure and electromagnetic properties of electroformed Ni-Fe alloys was studied.And the optimum process parameters to obtain Ni-20%Fe deposition were as follows:FeSO4·7H2O concentration 6 g/L;pH value 2.5;current density 3.5 A/dm2;electrolyte temperature 55 ℃.The Ni-Fe deposit is bright and compact,the crystal-planes of the plating are (111),(220) and (200).Electrodeposited Ni-20%Fe has a strong paramagnetism effect with the smallest remanence of 0.5 emu.The coercivity show a monotonic decrease with increasing Fe content in deposit,and the saturation magnetization is only 10% of that of the IJ85 permalloy,indicating that the electroformed Ni-20%Fe alloy has good electromagnetic property and could be used in MEMS actuator manufacturing.
中图分类号 TG139.8
所属栏目
基金项目 国家自然科学基金资助项目(50375073)
收稿日期 2006/4/3
修改稿日期 2006/6/27
网络出版日期
作者单位点击查看
备注郑晓虎(1972-),男,江苏涟水人,博士研究生.
引用该论文: ZHENG Xiao-hu,ZHU Di,ZHU Zeng-wei. Composition and Electromagnetic Property of Elctrofomed Ni-Fe Alloys for MEMS[J]. Materials for mechancial engineering, 2007, 31(3): 33～36
郑晓虎,朱荻,朱增伟. 微机电系统用电铸镍铁合金的制备及其电磁性能[J]. 机械工程材料, 2007, 31(3): 33～36
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参考文献
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【9】薛玉君,朱 荻.Ni-La2O3纳米复合镀层制备工艺研究[J].机械工程材料,2004,28(8):19-23.
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