H13钢氮化前后表面磁控溅射CrAlN薄膜的摩擦磨损性能
Tribological Behaviors of CrAlN Films Deposited by Magnetron Sputtering on Surface before and after Nitriding of H13 Steel
摘 要
为了提高H13钢的表面耐磨性能,用直流磁控溅射法在氮化与未氮化的H13钢表面沉积CrAlN薄膜,并对处理前后的摩擦磨损性能进行了比较;用扫描电镜观察薄膜形貌,并测其厚度;测量了随炉硅片的薄膜显微硬度；用摩擦磨损试验机测试了在室温和600 ℃条件下薄膜的摩擦磨损性能.结果表明:薄膜平均厚度为4.8 μm,硬度为23.7 GPa;室温条件下材料的表面摩擦因数为0.60～0.65,600 ℃条件下摩擦因数为0.61～0.96；CrAlN/氮化H13钢和CrAlN/H13钢在室温摩擦时的耐磨性分别是H13钢的1.9倍和1.7倍,在600 ℃条件下耐磨性分别是H13钢的1.25倍和7倍.
磁控溅射
CrAlN薄膜
摩擦磨损
H13 steel
magnetron sputtering
CrAlN film
friction and wear
Abstract
In order to improve the wear resistance of H13 steel,magnetron sputtering was applied to the deposition of CrAlN films on surface of H13 steel and nitrided H13 steel,respectively.The micrographs of the films were detected by SEM.Sliding friction and wear investigations were performed for three kinds of specimen surface using ball-on-disc type at room temperature and 600 ℃,respectively.It was shown that the average thickness of the deposited films was 4.8 μm and the microhardness was 23.7 GPa.The friction coefficient was 0.60-0.65 at room temperature and 0.61-0.96 at 600 ℃.The wear resistance of CrAlN/nitrided H13 and CrAlN/H13 was 1.9 and 1.7 times of H13 at room temperature,respectively.And the wear resistance of CrAlN/nitriding H13 and CrAlN/H13 was 1.25 and 7 times of H13 at 600 ℃,respectively.
中图分类号 TG174.44
所属栏目 材料性能及其应用
基金项目 国家自然科学基金国际合作资助项目(50311140138);国家自然科学基金资助项目(20271037)
收稿日期 2007/9/15
修改稿日期 2008/1/12
网络出版日期
作者单位点击查看
备注尹小定(1980-),女,湖南邵阳人, 硕士研究生.
引用该论文: YIN Xiao-ding,WANG She-bin,YU Chun-yan,TIAN Lin-hai,XU Bing-she. Tribological Behaviors of CrAlN Films Deposited by Magnetron Sputtering on Surface before and after Nitriding of H13 Steel[J]. Materials for mechancial engineering, 2008, 32(9): 59～63
尹小定,王社斌,余春燕,田林海,许并社. H13钢氮化前后表面磁控溅射CrAlN薄膜的摩擦磨损性能[J]. 机械工程材料, 2008, 32(9): 59～63
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【6】Sun Chenchen,Lee Shinhchin Lee,Bin Shyue,et al.Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering[J].Appl Surf Scie,2006,252:8295-8300.
【7】Kaciulis S,Mezzi A,Montesperelli G,et al.Multi-technique study of corrosion resistant CrN/Cr/CrN and CrN:C coatings[J].Surf Coat Technol,2006,201:313-319.
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【10】Hu S B,Tu J P,Mei Z,et al.Adhesion strength and high temperature wear behaviour of ion plating TiN composite coating with electric brush plating Ni-W interlayer[J].Surf Coat Technol,2001,141:174-181.
【11】Okumiya M,Griepentrog M.Mechanical properties and tribological behavior of TiN-CrAlN and CrN-CrAlN multilayer coatings[J].Surf Coat Technol,1999,112:123-128.
【12】Lee Ho Y,Han Jeon G,Baeg Seung H,et al.Characterization of WC-CrAlN heterostructures obtained using a cathodic arc ion plating process[J].2003,174/174:303-309.
【13】Bohwan P,Dong H J,Hoon K,et al.Adhesion properties of TiB2 coatings on nitrided AISI H13 steel[J].Surf Coat Technol,2005,200:726-729.
【14】Batista J C,Joseph M C,Godoy A C,et al.Mico-abrasion wear testing of PVD TiN coatings on untreated and plasma nitrided AISI H13 steel[J].Wear,2001,249:971-979.
【15】Takayasu Sato,Kenichi Sugai,Shizuyo Ueda,et al.Development of a hybrid coating process as an advanced surface modification for cutting tools and moulds[J].Surf Coat Technol,2003,45:169-17.
【16】Kimura A,Kawate M,Hasegawa H,et al.Effects of Al content on hardness,lattice parameter and microstructure of Ti1-xAlxN films[J].Surf Coat Technol,2003,367:169-170.
【17】Marui E,Hasegawa N,Endo H,et al.Research on the wear characteristics of hypereutectoid steel[J].Wear,1997,205:186-189.
【18】崔向红,王树奇,姜启川.新型精铸热锻模具钢高温磨损性能同其显微组织的相关性[J].摩擦学学报,2005,25(3):211-215.
【19】Jiang Shenrui,Peng Dongliang.A study of (TiAl)N coatings deposited by DC magnetron sputtering[J].ACTA Metallurgica Sinica,1994,30(5):B233-237.
【20】Jeon G H,Sang S K,Chang W K,et al.Synthesis of resistant compounds by plasma diffusion process[J].Surf Coat Technol,1997,89:185-190.
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