钛合金人工心脏瓣膜瓣环表面TiN/Ti多层膜的制备与性能
Fabrication and Properties of TiN/Ti Multilayer Deposited on the Surface of Titanium Alloy Artificial Heart Valve Ring
摘 要
为了提高钛合金人工心脏瓣膜瓣环TiO2表面改性层的性能,利用非平衡磁控溅射技术在人工心脏瓣膜瓣环表面制备了具有不同调制周期(44,70,100 nm)的TiN/Ti多层膜过渡层;采用XRD、SEM、显微硬度计及摩擦磨损试验机研究了薄膜的物相组成、横截面形貌、硬度和耐磨性.结果表明:TiN/Ti多层膜由Ti和TiN相组成,当调制周期为100 nm时,TiN/Ti薄膜呈现明显的多层结构,具有高硬度和良好耐磨性;人工心脏瓣膜瓣环表面各个位置TiN/Ti多层膜的相结构及性能相同,可望应用于人工心脏瓣膜瓣环的TiO2表面改性层的过渡层.
TiN/Ti多层膜
非平衡磁控溅射
力学性能
artificial heart valve
TiN/Ti multilayer
unbalanced magnetron sputtering
mechanical property
Abstract
In order to improve the properties of the TiO2 layer on the titanium alloy artificial heart valve ring,TiN/Ti multilayer transition films with different modulation periods(44,70 and 100 nm)were fabricated on the surface of artificial heart valve ring by unbalanced magnetron sputtering method.The phase composition,cross-sectional morphology,hardness and wear resistance of the films were investigated by means of XRD,SEM,microhardness and friction and wear tester.The results show that the TiN/Ti multilayer was composed of Ti phase and TiN phase.The TiN/Ti multilayer film with high hardness and good wear resistance had obvious multilayer structure when the modulation period was 100 nm.There was no evident difference of the phase structure and properties of the TiN/Ti multilayer on different positions of the artificial heart valve ring.The TiN/Ti multilayer could be used as the transition layer of TiO2 modified surface layer for artificial heart valve ring.
中图分类号 TB383
所属栏目 新材料 新工艺
基金项目 国家高技术研究发展计划资助项目(2006AA02A139#)
收稿日期 2009/6/11
修改稿日期 2009/7/1
网络出版日期
作者单位点击查看
备注何婵(1982-),女,四川广元人,硕士研究生.
引用该论文: HE Chan,LENG Yong-xiang,SUN Hong,HUANG Nan. Fabrication and Properties of TiN/Ti Multilayer Deposited on the Surface of Titanium Alloy Artificial Heart Valve Ring[J]. Materials for mechancial engineering, 2010, 34(7): 38～41
何婵,冷永祥,孙鸿,黄楠. 钛合金人工心脏瓣膜瓣环表面TiN/Ti多层膜的制备与性能[J]. 机械工程材料, 2010, 34(7): 38～41
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参考文献
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