超硬纳米多层膜的材料选择与结构设计
Material Selection and Structure Design for Superhard Nano-multilayer Film
摘 要
综述了近年来超硬纳米多层膜材料选择与结构设计的研究进展,主要介绍了多层膜的选材,从构成多层膜的材料种类、膜与基体的选择、多层膜材料的选择以及从超硬效应理论得到的启示等几个方面总结了多层膜实现超硬特性时要考虑的因素,并指出了目前存在的问题及今后的发展方向.
材料选择
结构设计
superhard nano-multilayer film
material selection
structure design
Abstract
The progress of the research on material selection and structure design for superhard nano-multilayer films is summarized.The material selection for the multilayer films is mainly introduced.The factors in realizing the superhard characteristics of multilayer films needed to be considered are summarized from several aspects including the material types used for multilayer films,the selection of film and substrate,material selection and the inspiration obtained from the superhard effect theory. The current problems and development are pointed out.
中图分类号 O484.2
所属栏目 纳米材料
基金项目 国家自然科学基金资助项目(50801062)
收稿日期 2009/8/17
修改稿日期 2010/5/20
网络出版日期
作者单位点击查看
备注赵彦辉(1973-),男,河北石家庄人,助理研究员,博士.
引用该论文: ZHAO Yan-hui,XIAO Jin-quan,LIN Guo-qiang,LANG Wen-chang,YU Bao-hai. Material Selection and Structure Design for Superhard Nano-multilayer Film[J]. Materials for mechancial engineering, 2010, 34(10): 68～71
赵彦辉,肖金泉,林国强,郎文昌,于宝海. 超硬纳米多层膜的材料选择与结构设计[J]. 机械工程材料, 2010, 34(10): 68～71
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参考文献
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【21】胡晓萍,董云杉,孔明,等.TiN/Si3N4纳米多层膜的生长结构与超硬效应[J].真空科学与技术学报,2005,25(4):263-268.
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【2】HELMERSSON U,TODEROVA S,MARBERT L,et al.Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness[J].Journal of Applied Physics,1987,62(2):481-484.
【3】KOEHLER J S.Attempt to design a strong solid[J].Physical Review B,1977,2:547-551.
【4】CAMMARATA R C,SIERADZKI K.Effects of surface stress on the elastic moduli of thin films and superlattices[J].Physics Review Letter,1989,62:2005-2008.
【5】ANDERSON P M,LI C.Hall-Petch relations for multilayered materials[J].Nanostructured Materials,1995,5(3):349-362.
【6】KATO M,MORI T,SCHWARTZ L H.Hardening by spinodal modulated structure[J].Acta Metallurgica,1980,28(3):285-290.
【7】SUBRAMANIAN C,STRAFFORD K N.Review of multicomponent and multiplayer coatings for tribological applications[J].Wear,1993,165:85-95.
【8】STRAFFORD K N,DATTA P K,GRAY J S.Applications and performance of coatings: some perspectives and prospects[C]//Surface Engineering: Practice: Fundamentals,Pro-cesses and Applications.Chichester: Ellis Horwood,1990:398-341.
【9】FRELLER H,HAESSLER H.Evaluation of existing ion plating processes for the deposition of multicomponent hard coatings[J].Surface and Coatings Technology,1988,36:219-232.
【10】BANTLE R,MATTHEWS A.Investigation into the impact wear behaviour of ceramic coatings[J].Surface and Coatings Technology,1995,74/75:857-868.
【11】VOEVODIN A A,BANTLE R,MATTHEWS A.Dynamic impact wear of TiCxNy and Ti-DLC composite coatings[J].Wear,1995,185:151-157.
【12】MATTEWS A,ESKILDSEN S S.Engineering applications for diamond-like carbon[J].Diamond and Related Materials,1994(3):902-911.
【13】BARNETT S A,SHINN M.Plastic and elastic properties of compositionally modulated thin films[J].Annual Reviews in Materials Science,1994,24:481-511.
【14】VOEVODIN A A,CAPANO M A,LAUBE S J P,et al.Design of a Ti/TiC/DLC functionally gradient coating based on studies of structural transitions in Ti-C thin films[J].Thin Solid Films,1997,298:107-115.
【15】SUNDGREN J E,HENTZELL H T G.A review of present state of art in hard coating grown from the vapor phase[J].Journal of Vacuum Science Technology A,1986,4:2259-2279.
【16】SUBRAMANIAN C,STRAFFORD K N,WILKS T P,et al.On the design of coating systems: metallurgical and other considerations[J].Journal of Materials Processing Technology,1996,56:385-397.
【17】STRAFFORD K N.Tribological properties of coatings-expectations,performance and the design dilemma[J].Surface and Coatings Tech-nology,1996,81:106-117.
【18】任毅,周家斌,付志强,等.纳米多层超硬膜力学性能研究进展[J].金属热处理,2007,32(5):6-9.
【19】李戈扬,虞晓江,吴桢干,等.TaN/NbN纳米多层膜的力学性能与耐磨性[J].真空科学与技术,2002,22(1):1-4.
【20】YAOA S H,SUB Y L,KAOC W H,et al.Tribology and oxidation behaviour of TiN/AlN nano-multilayer films[J].Triobology International,2006,39:332-341.
【21】胡晓萍,董云杉,孔明,等.TiN/Si3N4纳米多层膜的生长结构与超硬效应[J].真空科学与技术学报,2005,25(4):263-268.
【22】LI T S,LI H,PANL F.Microstructure and nanoindentation hardness of Ti/TiN multilayered films[J].Surface and Coatings Technology,2001,137(2/3):225-229.
【23】张绪寿,余来贵.表面工程摩擦学进展[J].摩擦学学报,2000,20(2):156-160.
【24】HOLLECK H,SCHIER V.Multilayer PVD coatings for wear proctection[J].Surface and Coatings Technology,1995,76/77:328-336.
【25】李成明,吕反修,唐伟忠.硬质纳米多层膜与复合膜的研究进展[C]//首届中国热处理活动周论文集.北京:中国热处理学会,2002.
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