Application and Development of Phase Measuring Profilometry
摘 要
自20世纪80年代以来,随着激光技术和CCD图像传感器的不断发展和广泛应用,并结合计算机图像处理技术,相位测量轮廓术(PMP)得到了快速的发展。该技术以非接触、全场测量、高精度、高灵敏度及自动化等优点得到广泛应用。主要阐述了PMP在国内外的应用现状、存在的问题及发展趋势,并简单介绍了PMP的基本原理,对现有的测量方法进行分析和比较。
Abstract
Since 1980s, Phase Measuring Profilometry was developed sharply, with the development and application of laser technology. The method was very popular with many advantages such as non-contact, full-field measurement, high accuracy and sensitivity, automation. The developing trend and application status of Phase Measuring Profilometry in the world were described. The principle of measuring method was introduced, and the existing methods were analyzed and compared.
中图分类号 TG115.28
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收稿日期 2005/6/2
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引用该论文: SUN Yuan,LI Da-xin. Application and Development of Phase Measuring Profilometry[J]. Nondestructive Testing, 2006, 28(3): 130~132
孙 园,李大心. 相位测量轮廓术的应用现状及发展趋势[J]. 无损检测, 2006, 28(3): 130~132
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参考文献
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【2】金国藩,李景镇.激光测量学[M].北京:科学出版社,1998.
【3】DeWitt TK, Lyon DA. Range-finding method using diffraction gratings[J]. Appl Opt,1995,23(5):2510.
【4】Su Xianyu, Su Likun, Li Wangsong, et al. A new 3-D ptofilometry based on modulation measurement[J]. Proc SPIE,1998,35(59):1-7.
【5】竺子民.光电图像处理[M].武汉:华中理工大学出版社,2000.
【6】Egidi N, Maponi P. A comparative study of two fast phase unwrapping algorithms[J]. Applied Mathematics and Computation,2004,148(10):599-629.
【7】Xianyu Su, Wenjing Chen. Reliability-guided phase unwrapping algorithm: a review[J]. Optics and Lasers in Engineering,2004,42(11):245-261.
【8】Huang MJ, Zi-Neng He. Phase unwrapping through region-referenced algorithm and window patching method[J]. Optics Communications,2003,203(3):225-241.
【9】Lehmann M, Jacquot P, Facchini M. Shape measurements on large surfaces by fringe projectvn[J]. Exp Tech,1999,23(20):31-35.
【10】李万松,苏礼坤,苏显渝.位相检测轮廓术在大尺度三维轮廓测量中的应用[J].光学学报,2000,120(6):792-796.
【11】Clark T, Coocn R. Real time 3K metrology for aerospace manufacture[J]. Sens Rev,1999,19(2):113.
【12】任守强,方 强.用于动态测量的双通道光学位相测量轮廓术[J].光学学报,1997,17(4):452-455.
【13】张启灿,苏显渝.动态液面轮廓测量[J].光学学报,2001,121(12):1506-1508.
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