具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正
Thickness Measurement of Thin Film on Polycrystalline Preferred Orientation Material by X-Ray Diffraction
摘 要
根据薄膜对X射线的吸收效应, 利用X射线衍射方法可测量出多晶基材表面的薄膜厚度。但试验结果显示, 基材的择优取向效应对薄膜厚度的测量影响显著。根据理论分析, 提出了择优取向修正方法。在对X射线衍射数据进行择优取向修正后, 利用最小二乘法对修正后的数据进行拟合。拟合结果显示, 该方法可以有效地对基材的择优取向效应进行修正, 从而获得较为准确的薄膜厚度值。
择优取向
厚度测量
基材
薄膜
X-ray diffraction
Preferred orientation
Thickness measurement
Based material
Film
Abstract
Thickness measurement based on the absorption of X-rays in film had been tested on polycrystalline substrate using X-ray diffraction. The diffraction angle (2θ) had fixed and incidence angles had changed continuously during collection data. The intensity of substrate reflection was measured to count the thickness of film. The result indicated the preferred orientation of substrate was effective on the account observably. A technique was found to correct the effect of preferred orientation.
中图分类号 TG115.28
所属栏目 试验研究
基金项目 国防基础科研课题资助项目(A1520070073)
收稿日期 2008/10/14
修改稿日期
网络出版日期
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备注张延志(1977-), 男, 硕士, 从事X射线衍射分析与研究。
引用该论文: ZHANG Yan-Zhi,LAI Xin-Chun,GUAN Wei-Jun,WANG Qin-Guo. Thickness Measurement of Thin Film on Polycrystalline Preferred Orientation Material by X-Ray Diffraction[J]. Nondestructive Testing, 2009, 31(8): 628～630
张延志,赖新春,管卫军,王勤国. 具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正[J]. 无损检测, 2009, 31(8): 628～630
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参考文献
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【2】Yang Xiaodong, Zhang Jingwen, Bi Zhen, et al. Glancing-incidence X-ray analysis of ZnO thin films and ZnO-ZnMgO heterostructures grown by laser-MBE[J]. J Crystal Growht,2005,284(1/2): 123-128.
【3】Malinovschi V, Ducu C, Aldea N, et al. Study of carbon steel corrosion layer by X-ray diffraction and absorption methods[J]. J Nucl Mater,2006,352(1/3): 107-115.
【4】Lenormand P, Lecomte A, Babonneau D, et al. X-ray reflectivity, diffraction and grazing incidence small angle X-ray scattering as complementary methods in the microstructural study of sol-gel zirconia thin films[J]. Thin Solid Films,2006,495(1/2): 224-231.
【5】Paolo Colombi, Paolo Zanala, Elza Bontempi, et al. Modeling of glancing incidence X-ray for depth profiling of thin layers[J]. Spectrochimica Acta Part B,2007,62(6/7): 554-557.
【6】Lhotka J, Kuzel R, Cappuccio G, et al. Thickness determination of thin polycrystalline film by grazing incidence X-ray diffraction[J]. Surface and Coatings Technology,2001,148(1): 96-101.
【7】姜传海,程凡雄,吴建生.测定薄膜厚度的基片X射线衍射法[J].上海交通大学学报,2004,38(7): 1045.
【8】李志海,周上祺,任勤镀,等.层厚度的X射线衍射法测量[J].核动力工程,2006,27(3): 43-46.
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