弹性反冲探测技术分析薄膜中的氢和氦含量
Elastic Recoil Detection Analysis of Hydrogen and Helium Content in Thin Film
摘 要
给出了用离子束来弹性反冲探测能谱，分析薄膜材料中的轻质元素含量及其深度分布的基本原理和试验方法，并对其发展和应用做了介绍。作为应用举例，用8 MeV的O3+作为入射离子进行弹性反冲金属钛膜中的氢和氦，通过解析能谱获得了氢和氦含量的深度分布曲线。该技术在涉及氢和氦在材料中的行为研究方面将有重要应用。
薄膜
氢含量
氦含量
深度分布
elastic recoil detection analysis
thin film
hydrogen content
helium content
depth profile
Abstract
The essential principle and experimental method of elastic recoil detection (ERD) analysis was presented, that the energy spectrum of recoiled light atoms can be obtained by the incidental ion beam and the concentration and depth profile of light elements can be analyzed. Its development and application was also introduced. For illustration with application of ERD, the probe of 8 MeV O3+ ion was used to recoil the hydrogen and helium atoms in titanium thin film. The contents and depth profiles of hydrogen and helium were achieved. The ERD analysis was proposed to have important applications in the research work relating to the behavior of hydrogen and helium in materials.
中图分类号 O562.5 O571.33
所属栏目 综述
基金项目 中国石油大学（华东）自主创新科研计划资助项目(09CX04067A)
收稿日期 2009/5/31
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备注刘超卓(1979-)，男，讲师，理学博士。
引用该论文: LIU Chao-zhuo. Elastic Recoil Detection Analysis of Hydrogen and Helium Content in Thin Film[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2010, 46(8): 496～499
刘超卓. 弹性反冲探测技术分析薄膜中的氢和氦含量[J]. 理化检验－物理分册, 2010, 46(8): 496～499
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参考文献
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【2】ZIEGLER J F. SRIM-2003[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,2004,219/220:1027-1036.
【3】NURMELA A,RAISANEN J,RAUHALA E. Elastic scattering cross sections for the analysis of helium by H backscattering and hydrogen by 4He ERD[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,1998,136/138:77-80.
【4】WIEIUNSKI M. Simultaneous profiling of hydrogen and deuterium by 2.6 MeV 4He ERDA using a ΔE-E telescope detector[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,1997,122:113-120.
【5】BOHNE W,ROHRICH J,ROSCHERT G. The Berlin time-of-flight ERDA setup[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,1998,136/138:633-637.
【6】ROUX B,CHEVARIER A,CHEVARIER N,et al. High resolution hydrogen profiling in superconducting materials by ion beam analysis (ERD-EXB)[J]. Va-cuum,1995,46(7):629-632.
【7】SCHIETTEKATTE F,CHICOINE M,GUJRATHI S,et al. Allegria:a new interface to the ERD program[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,2004,219/220:125-129.
【8】刘超卓. 含氦钛膜的制备、表征及退火行为研究[D]. 上海：复旦大学，2007：17-19.
【9】YAMAGUCHI S,NAGATA S,TAKAHIRO K,et al. Deuterium transport in metal membranes during deu-terium implantation studied by ERD analysis technique of transmission geometry[J]. Journal of Nuclear Materials,1995,220/222:878-882.
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