薄膜截面的TEM样品制备
CROSS-SECTIONAL TEM SAMPLE PREPARATION OF THIN FILMS
摘 要
针对用于透射电镜观察的截面样品制备较为困难的问题，以不锈钢基底上沉积的VN/SiO2超晶格薄膜为例，介绍了薄膜截面TEM样品的制备方法与过程。
截面TEM样品制备
超晶格
Thin films
Cross-sectional TEM sample preparation
Superlattice
Abstract
Cross-sectional TEM observation can be used as a very useful method in the investigation of microstructure of thin films. However, the sample preparation for cross-sectional TEM observation is generally regarded as a challenging task. In this paper, we discussed the preparation of TEM cross-sectional samples in a step-by-step approach designed to enable a competent experimentalist to reproduce the technique. An example from VN/SiO2 superlattice is discussed correspondingly.
中图分类号 TG115.22+1.2
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收稿日期 2005/12/9
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备注戴嘉维(1958-)，男，工程师。
引用该论文: DAI Jia-wei,KONG Ming. CROSS-SECTIONAL TEM SAMPLE PREPARATION OF THIN FILMS[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2006, 42(5): 239～241
戴嘉维,孔明. 薄膜截面的TEM样品制备[J]. 理化检验－物理分册, 2006, 42(5): 239～241
被引情况:
【1】杨倩,黄宛真,郑遗凡,胡仙超,王燕飞, "一种制备透射电镜截面样品的新方法",理化检验－物理分册 48, 91-94(2012)
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参考文献
【1】Weaver Louise. Cross-section TEM Sample Preparation of Multilayer and Poorly Adhering Films[J]. Microscopy Research and Technique, 1997,36:368.
【2】Zhang H. Transmission Electron Microscopy for the Semi-Conductor Industry[J]. Micron, 2002,33:515.
【3】劳技军,胡晓萍,虞晓江,等.AlN在AlN/(Ti,Al)N纳米多层膜中的相转变及其对薄膜力学性能的影响[J].物理学报, 2003,52(9):2259.
【4】魏 仑,梅芳华,邵 楠,等.TiN/SiO2纳米多层膜的晶体生长与超硬效应[J].物理学报, 2005,54(4):1742.
【5】魏 仑,梅芳华,邵楠,等.TiN/TiB2异结构纳米多层膜的共格生长与力学性能[J].物理学报, 2005,54(10):4846.
【2】Zhang H. Transmission Electron Microscopy for the Semi-Conductor Industry[J]. Micron, 2002,33:515.
【3】劳技军,胡晓萍,虞晓江,等.AlN在AlN/(Ti,Al)N纳米多层膜中的相转变及其对薄膜力学性能的影响[J].物理学报, 2003,52(9):2259.
【4】魏 仑,梅芳华,邵 楠,等.TiN/SiO2纳米多层膜的晶体生长与超硬效应[J].物理学报, 2005,54(4):1742.
【5】魏 仑,梅芳华,邵楠,等.TiN/TiB2异结构纳米多层膜的共格生长与力学性能[J].物理学报, 2005,54(10):4846.
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