显微硬度法与纳米压入法测量微米级硬质薄膜硬度的比较
COMPARISON OF MICRO-HARDNESS WITH NANO-INDENTATION HARDNESS IN HARDNESS MEASURING FOR MICRON LEVEL HARD COATING
摘 要
测定了离子束辅助沉积TiN,CrN薄膜的纳米压入硬度(Hnano值)、维氏显微硬度(HV值)和努氏显微硬度(HK值)。结果发现,HK值比HV值更接近于Hnano值,相对较为准确。膜的厚度(t)越薄,三种方法测得硬度值差别越大;膜的厚度越厚,差别越小。随着膜的厚度增加,HK值和HV值逐渐接近Hnano值。t≈5.0 μm时,HV≈HK≈Hnano。对于硬膜软基体模型,如果膜厚>5.0 μm,可以采用显微硬度计较为准确地测量薄膜硬度;膜厚<5.0 μm时,应避免使用显微硬度法而采用纳米压入法。
显微硬度
纳米压入
硬质薄膜
Hardness
Micro hardness
Nano-indentation
Hard coating
Abstract
To verify the accuracy and error extent of micro-hardness when measuring the hardness of hard coatings,the hardness of several-micron-thickness TiN and CrN hard coatings by Ion Beam Assistant Deposition was measured by nano-identation,vickers indentation and knoop indentation methods. It is found that,Hnano>HK>HV,HK results are closer to Hnano than HV results under the same load condition. The smaller the thickness,the bigger the discrepancy of Hnano,HV and HK measurement. With the increasing thickness,HK and HV approach Hnano,when thickness reaches 5.0 μm,HV≈HK≈Hnano. The results show that,for hard-coating soft-substrate model,if thickness (t)>5.0 μm,micro-hardness could reflect the coating hardness with some creditability;if t<5.0 μm,nano-identation should be used avoid using micro-hardness.
中图分类号 TG 115.5.1
所属栏目 试验技术与方法
基金项目
收稿日期 2007/3/31
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备注杜 军(1978-),男,博士,讲师。
引用该论文: DU Jun,ZHANG Ping,ZHAO Jun-jun,CAI Zhi-hai,JIA Da-lei. COMPARISON OF MICRO-HARDNESS WITH NANO-INDENTATION HARDNESS IN HARDNESS MEASURING FOR MICRON LEVEL HARD COATING[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2008, 44(4): 189～192
杜 军,张 平,赵军军,蔡志海,贾大雷. 显微硬度法与纳米压入法测量微米级硬质薄膜硬度的比较[J]. 理化检验－物理分册, 2008, 44(4): 189～192
被引情况:
【1】肖娜,杜菲菲, "合理使用划痕法及显微法测定TiN薄膜与基体结合力",理化检验－物理分册 51, 619-622(2015)
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参考文献
【1】高怡斐,陈 武.维氏硬度试验中测量不确定度的评定［J］.理化检验-物理分册,2004,40(8):404-406．
【2】GB/T 4340-1999 金属维氏硬度试验方法［S］．
【3】Oliver W C,Pharr G M. An improved technique for deter mining hardness and elastic modulus using load and displacement sensing indentat ion experiments［J］. J Mater Res,1992,7(6):1564-1583．
【4】Oliver W C,Pharr G M. Measurement of Hardness and Elastic Modulus by Instrumented Indentation: Advances in Understanding and Refinements to Methodology［J］. J Mater Res,2004,19:3-20．
【5】张泰华.影响纳米压入测试结果的因素［J］.实验力学,2004,19(4):437-442．
【6】刘宏玉,吴开明.纳米多层膜的硬度研究进展［J］.纳米科技,2006,5:4-8．
【7】Li T S,Li H,Pan F. Microstructure and nanoindentation hardness of Ti/TiN multilayerd Films［J］. Surf Coat Tech,2001,137:225-229．
【8】Veprek S. The search for novel superhard material［J］. J Vac Sci Technol,1999,A17:2401-2420．
【9】Riedel(Ed.) R. Handbook of Ceramic Hard Materials［M］. Weinheim: Wiley-VCH,2000．
【10】Lichinchi M,Lenardi C,Haupt J,et al. Simulation on Berkovich nanoindentation experiments on thin films using finite element method［J］. Thin Solid Films,1998,312:240-248．
【11】He J L,Veprek S. Finite element modeling of indentation into super hard coatings［J］. Surf Coat Tech,2003,163-164:374-379．
【12】Veprek S,Mukherjee S,Karvankova P,et al. Limits to the strength of super-and ultrahard nanocomposite coatings［J］. J Vac Sci Technol,2003,A21:532-544．
【13】Veprek S,Mukherjee S,Karvankova P,et al. Possible artefacts in measurement of hardness and elastic modulus on superhard coatings and the verification of the correctness of the data［J］. Mater Res Soc Symp Proc,2003,750:9．
【14】Veprek S,Mukherjee S,Karvankova P,et al. Hertzian analysis of the self-consistency and reliability of the indentation hardness measurements on superhard nanocomposite coatings［J］. Thin Solid Films,2003,436(2):220-231．
【15】Veprek S,Maritza G J Veprek,Pavla Karvankova,et al. Different approaches to superhard coatings and nanocomposites［J］. Thin Solid Films,2005,476:1-29．
【2】GB/T 4340-1999 金属维氏硬度试验方法［S］．
【3】Oliver W C,Pharr G M. An improved technique for deter mining hardness and elastic modulus using load and displacement sensing indentat ion experiments［J］. J Mater Res,1992,7(6):1564-1583．
【4】Oliver W C,Pharr G M. Measurement of Hardness and Elastic Modulus by Instrumented Indentation: Advances in Understanding and Refinements to Methodology［J］. J Mater Res,2004,19:3-20．
【5】张泰华.影响纳米压入测试结果的因素［J］.实验力学,2004,19(4):437-442．
【6】刘宏玉,吴开明.纳米多层膜的硬度研究进展［J］.纳米科技,2006,5:4-8．
【7】Li T S,Li H,Pan F. Microstructure and nanoindentation hardness of Ti/TiN multilayerd Films［J］. Surf Coat Tech,2001,137:225-229．
【8】Veprek S. The search for novel superhard material［J］. J Vac Sci Technol,1999,A17:2401-2420．
【9】Riedel(Ed.) R. Handbook of Ceramic Hard Materials［M］. Weinheim: Wiley-VCH,2000．
【10】Lichinchi M,Lenardi C,Haupt J,et al. Simulation on Berkovich nanoindentation experiments on thin films using finite element method［J］. Thin Solid Films,1998,312:240-248．
【11】He J L,Veprek S. Finite element modeling of indentation into super hard coatings［J］. Surf Coat Tech,2003,163-164:374-379．
【12】Veprek S,Mukherjee S,Karvankova P,et al. Limits to the strength of super-and ultrahard nanocomposite coatings［J］. J Vac Sci Technol,2003,A21:532-544．
【13】Veprek S,Mukherjee S,Karvankova P,et al. Possible artefacts in measurement of hardness and elastic modulus on superhard coatings and the verification of the correctness of the data［J］. Mater Res Soc Symp Proc,2003,750:9．
【14】Veprek S,Mukherjee S,Karvankova P,et al. Hertzian analysis of the self-consistency and reliability of the indentation hardness measurements on superhard nanocomposite coatings［J］. Thin Solid Films,2003,436(2):220-231．
【15】Veprek S,Maritza G J Veprek,Pavla Karvankova,et al. Different approaches to superhard coatings and nanocomposites［J］. Thin Solid Films,2005,476:1-29．
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