采用化学气相沉积（CVD）法制备了硅质量分数为6.5%的硅钢，利用扫描电镜、能谱仪和自主设计研发的三点压弯机研究了反应温度、气氛含氧量和SiCl4含量对硅钢脆性的影响。结果表明:硅钢的晶粒尺寸随反应温度的升高而长大，硅钢的脆性随着晶粒尺寸的增加而增大；气氛含氧量在100 mg·kg-1时所制备的硅钢产生了晶界氧化现象，使硅钢脆性增加；SiCl4含量较大时(体积分数35%)所制备的硅钢产生了Kirkendall空洞，导致其脆性加剧。

6.5wt% Si silicon steel was prepared by chemical vapor deposition (CVD) method and the effects of reaction temperature，oxygen content in atmosphere and SiCl4 content on the brittleness of 6.5wt%Si silicon steel were studied using SEM, EDS and self-developed three-point bending machine. The results show that the grain size of the silicon steel increased with the reaction temperature rising, and the brittleness of the silicon steel increased with the increase of the grain size. Grain boundary oxidation was observed in the silicon steel when oxygen content in atmosphere was 100 mg·kg-1, which increased the brittleness of the silicon steel. Kirkendall voids were found in the silicon steel with a relatively high SiCl4 content of 35vol%, which increased the brittleness of the steel.