从实验室的选址和布局、实验室周边环境等方面对影响电子显微分析仪器稳定运行的环境因素进行了分析, 并提出了相应的解决措施。结果表明: 机械振动、环境磁场和接地电阻是影响电子显微分析仪器分辨率的重要因素; 对于机械振动, 可采取独立防振地基来起到隔振作用, 振幅减小40%以上; 对于磁场干扰, 采取低磁阻屏蔽层来屏蔽外界磁场, 可使实验室磁场强度下降33%以上; 对于接地方案, 选用垂直接地体为主、辅以水平接地体的复合组网方式, 接地电阻达到0.798 Ω; 经过以上方案, 可使实验室的机械振动、环境磁场强度和接地电阻均符合电子显微分析仪器安装要求。

Factors influencing the operation stability of electron microscopic analysis instruments were analyzed from the aspects of site selection, overall arrangement and surroundings of laboratory, and corresponding measures were put forward. The results indicate that mechanical vibration, environmental magnetic field and grounding resistance were crucial factors influencing the resolution of electron microscopic analysis instruments. For mechanical vibration, independent anti-vibration groundwork was adopted for shock insulation and the amplitude reduced by 40% above. For magnetic field interference, low magnetic resistance shielding layer was selected for block magnetic field outside and the magnetic intensity lowered by 33% above. For the grounding method, grounding resistance reached 0.798 Ω after conceiving vertical grounding body as the main networking combined horizontal grounding body as the auxiliary networking. Eventually, mechanical vibration, environmental magnetic intensity and grounding resistance of the laboratory were all qualified for the requirements of equipment installation.