Lock-in Thermal Wave Imaging for Measurement of Coating Thickness
摘 要
针对锁相热波成像技术在涂层厚度检测上的应用,简介了锁相热波成像技术基本原理,通过理论曲线分析了涂层厚度与相位的关系,结果表明采用锁相热波成像技术可有效测量涂层厚度。介绍了自行设计开发的锁相热波成像涂层检测系统,利用该系统对涂层试件进行了检测试验。结果表明:锁相频率为0.17 Hz时,对于20~150 μm涂层厚度的检测的重复性好,相对标准误差在2.5%以内,对红外热像技术在涂层测量领域的应用具有指导意义。
Abstract
For the applications of Lock-in thermal wave imaging technology, the paper is focused on its theory, simulation and experiment. The relationship between the coating thickness and phase was analyzed through the theoretical curve. It was concluded that coating thickness had a linear proportional relationship with the phase in a certain thickness range, and calculation results show that Lock-in thermal wave imaging can effectively measure the coating thickness. The phase locked thermal imaging detection system was developed for coating thickness measurement, and the system was used for coated specimens. The experimental results show that the PLL frequency is 0.17Hz for the detection of 20-150 μm coating thickness with good repeatability and the relative standard error is less than 2.5%. This paper has guiding significance for the application of infrared thermography in the field of the coating measurement technology.
中图分类号 TG115.28 DOI 10.11973/wsjc201704008
所属栏目 试验研究
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收稿日期 2016/11/2
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备注江海军(1988-),硕士,工程师,主要从事红外无损检测技术研究工作。
引用该论文: JIANG Hai-jun,CHEN Li. Lock-in Thermal Wave Imaging for Measurement of Coating Thickness[J]. Nondestructive Testing, 2017, 39(4): 38~41
江海军,陈力. 锁相热波成像技术对涂层厚度的测量[J]. 无损检测, 2017, 39(4): 38~41
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【2】LI X F, GRIVEL J C, ABRAHAMSEN. AB critical current density measurement of hin films by AC susceptibility based on the penetration parameter h[J]. Physica C-Superconductivity and its Applications, 2012,477: 6-14.
【3】王晓宇.薄膜厚度在线测量系统的研制[D]. 哈尔滨: 哈尔滨工业大学, 2012.
【4】廖平, 马洪秋, 陈峰. X射线测量板材厚度系统研究[J]. 工程设计学报, 2008,15(3): 198-200.
【5】DU Fang-xun, DONG Xin-fa. Development of thickness measuring instrument based on reflecting infrared[J]. Engineering and Technology, 2006, 19(3): 81-83.
【6】何平,曹胜梅,李岐,等.基于红外技术的薄膜厚度在线检测系统的设计[J]. 哈尔滨商业大学学报, 2013, 29(6): 674-677.
【7】胡秀丽,游佰强,于海涛.一种提高薄膜厚度测量灵敏度的方法[J]. 材料开发与应用, 2010, 25(5): 98-101.
【8】刘波,李艳红,张小川,等. 锁相红外热成像技术在无损检测领域的应用[J]. 无损探伤, 2006, 30(3): 12-15.
【9】汪子君, 刘俊岩, 戴景民, 等. 锁相红外检测中相位检测方法[J]. 无损检测, 2008, 30(7): 418-421.
【10】郭兴旺, 刘颖韬, 郭广平,等. 脉冲相位法及其在复合材料无损检测中的应用[J]. 北京航空航天大学学报, 2005, 31(10): 1049-1053.
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