高纯铌样品0.050 0 g中加入适量的水，缓慢加入1 mL氢氟酸和2 mL硝酸，低温加热使其溶解，冷却至室温，用水定容至100 mL。采用电感耦合等离子体质谱法测定所得溶液中20种痕量杂质元素，以内标法定量。结果表明：20种元素的检出限（3s）为0.005~0.20 μg·g^-1，回收率为95.0%~110%。按所提出方法分析铌锭样品，所得结果与辉光放电质谱法所得结果相符。

The high-purity niobium sample (0.050 0 g) was dissolved in the mixture of some water, 1 mL of HF and 2 mL of HNO₃, which were added slowly, by heating at low temperature, and then the solution was cooled to room temperature, and made its volume up to 100 mL. The 20 trace impurity elements in above solution were determined by inductively coupled plasma mass spectrometry (ICP-MS), and internal standard method was used for quantitative analysis. As shown by the results, the detection limits (3s) of 20 elements were found in the range of 0.005-0.20 μg·g^-1. Values of recovery were found in the range of 95.0%-110%. A niobium ingot sample was analyzed by the proposed method, giving results in consistency with the results found by glow discharge mass spectrometry.