通过控制氮气流量（20～60 cm³·min^-1），采用反应磁控溅射技术分别在不锈钢和硅片基底上制备CrN_x涂层，研究了氮气流量对涂层物相组成、显微组织、纳米压痕力学性能、摩擦学性能以及在质量分数3.5% NaCl溶液中电化学腐蚀性能的影响。结果表明：不同氮气流量下的CrN_x涂层均表现出柱状晶结构；随着氮气流量的增加，CrN_x涂层的物相经历了Cr→Cr₂N→CrN的变化，纳米压痕硬度和弹性模量均先增后降，平均摩擦因数和磨损率先降后增再降，耐腐蚀性能则先变好后变差；当氮气流量为30 cm³·min^-1时，涂层结构致密，力学性能、耐磨性能和耐腐蚀性能最优。

CrN_x coatings were prepared by reactive magnetron sputtering with controlled nitrogen flow rates (20-60 cm³·min^-1) on stainless steel and silicon chip substrate, respectively. The influence of nitrogen flow rate on the phase composition, microstructure, nanoindentation mechanical properties, tribological properties, and electrochemical corrosion resistance in 3.5wt% NaCl solution of the coatings was investigated. The results show that the CrN_x coatings all had columnar crystal structures at different nitrogen flow rates. With the increase of nitrogen flow rate, the phase composition of the coatings changed in order of Cr, Cr₂N and CrN; the nanoindentation hardness and elastic modulus increased first and then decreased; the average friction coefficient and the wear rate decreased first, then increased and then decreased; the corrosion resistance got better first and then got worse. When the nitrogen flow rate was 30 cm³·min^-1, the coating had a dense structure and the best mechanical properties, wear resistance and corrosion resistance.