TiAlSiN/TiAlAgN/Ti(Mo)N-MoS2多层涂层的微观结构及摩擦学性能
Microstructure and Tribological Properties of TiAlSiN/TiAlAgN/Ti (Mo) N-MoS2 Multilayer Coatings
摘 要
采用Ti40Al20Si10、Ti48Al50Ag2和Ti-MoS2靶，制备了TiAlSiN /TiAlAgN/Ti（Mo）N-MoS2多层涂层。通过扫描电子显微镜（SEM）、X射线衍射仪（XRD）、显微硬度计、球-盘式摩擦磨损试验机以及表面轮廓仪研究了涂层的表面形貌、微观结构、硬度和摩擦学性能。结果表明：制备的多层涂层中含0.62%（原子分数，下同）Mo，0.77% Ag和30.05% Ti，厚度约为3 μm，硬度为21.09 GPa。涂层在不同温度条件下的磨损机制主要为黏着磨损，室温条件下参与润滑的物质为Si2·H2O水膜、MoS2以及少量的Ag；200 ℃时的为Ag和MoS2；400 ℃时的为MoS2和大量Ag；600 ℃时的为Ag、Al2O3和SiO2。涂层在室温、200 ℃、400 ℃、600 ℃下的磨损率分别为0.051 7×10-3，0.162 8×10-3，0.108 0×10-3，0.130 7×10-3 mm3/（N·m）。TiAlSiN/TiAlAgN/Ti（Mo）N-MoS2多层涂层在400 ℃下具有较好的摩擦学性能。
电弧离子镀
多层涂层
MoS2
固体润滑剂
magnetron sputtering
arc ion plating
multilayer coating
MoS2
solid lubricant
Abstract
Ti40Al20Si10, Ti48Al50Ag2 and Ti-MoS2 targets were used to prepare TiAlSiN/TiAlAgN/Ti(Mo)N-MoS2 multilayer coatings. The surface morphology, microstructure, hardness and tribological properties of the coatings were studied by scanning electron microscope (SEM), X-ray diffractometer (XRD), microhardness tester, ball-disk friction and wear tester and surface profiler. The results show that the prepared multilayer coatings contained 0.62% (atomic fraction, the same below) Mo, 0.77% Ag and 30.05% Ti. The thickness of the coatings was about 3 μm, and the hardness was 21.09 GPa. At room temperature, the main lubricating agents were Si2·H2O water film, MoS2 and a small amount of Ag. At 200 ℃, Ag and MoS2 were the main lubricating agents. At 400 ℃, MoS2 and a large number of Ag were lubricating agents. And at 600 ℃, Ag, Al2O3 and SiO2 were the lubricating agents. Wear rates of the coatings at room temperature, 200 ℃, 400 ℃, and 600 ℃ were 0.0517×10-3, 0.162 8×10-3, 0.108 0×10-3, 0.130 7×10-3 mm3 / (N·m), respectively. TiAlSiN / TiAlAgN / Ti (Mo) N-MoS2 multilayer coatings had good tribological properties at 400 ℃.
中图分类号 TG174 DOI 10.11973/fsyfh-202009013
所属栏目 试验研究
基金项目 国家自然科学基金（51365041）
收稿日期 2018/12/15
修改稿日期
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引用该论文: WANG Zeyong,FENG Changjie,ZHAO Yan. Microstructure and Tribological Properties of TiAlSiN/TiAlAgN/Ti (Mo) N-MoS2 Multilayer Coatings[J]. Corrosion & Protection, 2020, 41(9): 72
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【10】DING X Z,ZENG X T,HE X Y,et al. Tribological properties of Cr- and Ti-doped MoS2 composite coatings under different humidity atmosphere[J]. Surface and Coatings Technology,2010,205(1):224-231.
【11】QIN X P,KE P L,WANG A Y,et al. Microstructure,mechanical and tribological behaviors of MoS2-Ti composite coatings deposited by a hybrid HIPIMS method[J]. Surface and Coatings Technology,2013,228:275-281.
【12】ARSLAN E,TOTIK Y,EFEOGLU I. Comparison of structure and tribological properties of MoS2-Ti films deposited by biased-dc and pulsed-dc[J]. Progress in Organic Coatings,2012,74(4):772-776.
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【14】TAI C N,KOH E S,AKARI K. Macroparticles on TiN films prepared by the arc ion plating process[J]. Surface and Coatings Technology,1990,43/44:324-335.
【15】曾鹏,胡社军,谢光荣,等. 脉冲偏压对真空电弧沉积TiN薄膜组织与性能的影响[J]. 金属热处理学报,2001,22(3):62-66.
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