金属基复合材料的基体与增强相物理性能差异较大，导致电镜制样比较困难。离子抛光方法是制备金属基复合材料电子背散射衍射试样的有效手段之一，影响离子抛光质量的工艺参数主要包括试样凸出量和抛光时间。通过观察不同凸出量和抛光时间下试样的形貌，结合图像处理软件统计计算了离子抛光成形参数。结果表明：抛光宽度、抛光深度和抛光面积等成形参数随着试样凸出量的增大而减小，随着抛光时间的增加而增大。

The physical properties between matrix and reinforced phase of metal matrix composites are quite different, which leads to difficulties in sample preparation for electron microscopy. Ion polishing method is one of the effective methods to prepare electron back scattered diffraction samples of metal matrix composites. The process parameters affecting the ion polishing quality mainly include the sample protrusion and polishing time. The forming parameters of ion polishing were calculated by observing the morphology of sample with different protrusion and polishing time, combining with image processing software. The results show that the forming parameters such as polishing width, polishing depth and polishing area decrease with the increase of sample protrusion, and increase with the increase of polishing time.