热处理对钛掺杂类金刚石薄膜场发射性能的影响
Effect of Heat Treatment on Field Emission Properties of Ti-Doped Diamond-like Carbon Film
摘 要
采用多靶磁控溅射技术制备了钛掺杂类金刚石（Ti-DLC）薄膜，并在不同温度（300，350，400℃）下进行了热处理，研究了热处理温度对薄膜微观结构、成分、能带结构以及场发射性能的影响。结果表明：与热处理前的相比，300℃热处理后Ti-DLC薄膜中sp2-C团簇相对含量增大，光学带隙最小，开启场强最低，为5.43 V·μm-1，场发射性能最好；当热处理温度高于300℃时，薄膜的DLC含量减少，同时生成大量TiO2，光学带隙增加，薄膜开启场强增大，场发射性能变差；薄膜的场发射电流基本不受热处理温度的影响。
类金刚石
热处理
TiO2
光学带隙
场发射性能
Ti-doping
diamond-like carbon
heat treatment
TiO2
optical band gap
field emission property
Abstract
The Ti-doped diamond-like carbon (Ti-DLC) film was prepared by multi-target magnetron sputtering technique, and was heat-treated at different temperatures (300,350,400 ℃). The effects of heat treatment temperature on the microstructure, composition, band structure and field emission properties of the film were studied. The results show that compared with those before heat treatment, the proportion of sp2-C clusters in the Ti-DLC film after heat treatment at 300 ℃ increased; the optical band gap was the smallest, and the turn-on field with value of 5.43 V·μm-1 was the smallest, indicating the film had the best field emission performance. As the temperature was higher than 300 ℃, the content of diamond-like carbon in the films dropped, and a large amount of TiO2 formed; the optical band gap and the turn-on field increased, indicating the field emission performance of the films got worse. The field emission current of the film was not affected by the heat treatment temperature.
中图分类号 TG156.88 TB114.2 DOI 10.11973/jxgccl202101002
所属栏目 试验研究
基金项目 科技部中-白政府间交流项目（CB02-03）；国家自然科学基金资助项目（51811530058）；山西省科技重大专项项目（20181102013）；山西省“1331工程”工程研究中心项目（PT201801）；山西省应用基础研究计划（青年基金）项目（201801D221131）
收稿日期 2020/2/21
修改稿日期 2020/10/22
网络出版日期
作者单位点击查看
备注李栓平(1992—),男,山西忻州人,硕士研究生
引用该论文: LI Shuanping,LIU Zhubo,WANG Yongsheng,YU Shengwang,HE Zhiyong,ZHOU Bing. Effect of Heat Treatment on Field Emission Properties of Ti-Doped Diamond-like Carbon Film[J]. Materials for mechancial engineering, 2021, 45(1): 8～13
李栓平,刘竹波,王永胜,于盛旺,贺志勇,周兵. 热处理对钛掺杂类金刚石薄膜场发射性能的影响[J]. 机械工程材料, 2021, 45(1): 8～13
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参考文献
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【2】GAUTIER L A,LE BORGNE V, EL KHAKANI M A.Field emission properties of graphenated multi-wall carbon nanotubes grown by plasma enhanced chemical vapour deposition[J]. Carbon, 2016, 98:259-266.
【3】ABAN'SHIN N. P, AVETISYAN Y A, AKCHURIN G G, et al. A planar diamond-like carbon nanostructure for a low-voltage field emission cathode with a developed surface[J]. Technical Physics Letters, 2016, 42(5):509-512.
【4】SUGINO T, KIMURA C, KURIYAMA K, et al. Field emission characteristics of phosphorus-doped diamond films[J]. Journal of Vacuum Science & Technology B, 2015, 174(1):145-154.
【5】邢晓曼, 代秋声. 碳纳米管场发射阴极制备技术的最新进展[J]. CT理论与应用研究, 2013(1):183-196. XING X M, DAI Q S. Fabrication methods of large current field emission cathode using carbon nanotubes[J]. Computerized Tomography Theory and Applications, 2013(1):183-196.
【6】张婷, 何娟, 任瑛, 等. 类金刚石薄膜残余应力的研究进展[J]. 材料导报,2016, 30(1):84-87. ZHANG T, HE J, REN Y, et al. Progresses and perspectives of the residual stress of diamond-like carbon thin film[J]. Materials Review, 2016, 30(1):84-87.
【7】LIANG H F, LIANG Z H, LIU C L, et al. Emission properties of Ti-DLC films prepared by unbalanced magnetron sputtering[J]. Applied Surface Science, 2010, 256(6):1951-1954.
【8】NATTHAPHONG K, PHOTONGKAM P, WONGPANYA P. Improvement of thermal stability, adhesion strength and corrosion performance of diamond-like carbon films with titanium doping[J]. Applied Surface Science, 2019, 469:471-486.
【9】徐均琪, 李传志, 严一心, 等. 退火对无氢钛掺杂类金刚石(Ti-DLC)膜结构及性能的影响[J]. 真空, 2009(2):29-32. XU J Q, LI C Z, YAN Y X, et al. Effect of annealing on structure and properties of Ti-doped hydrogen-free DLC films[J]. Vacuum, 2009(2):29-32.
【10】TAZIWA R, MEYER E L, CHINYAMA K G. Raman temperature dependence analysis of carbon-doped titanium dioxide nanoparticles synthesized by ultrasonic spray pyrolysis technique[J]. Journal of Materials Science, 2012, 47(3):1531-1540.
【11】徐存英, 张鹏翔. 纳米颗粒DBS/TiO2的拉曼光谱[J]. 光谱学与光谱分析, 2001, 21(3):336-338. XU C Y, ZHANG P X. Blue shift of Raman peak of DBS/TiO2 nanoparticles[J]. Spectroscopy and Spectral Analysis, 2001, 21(3):336-338.
【12】AHMAD A A. Optical and electrical properties of synthesized reactive rf sputter deposited boron-rich and boron-doped diamond-like carbon thin films[J]. Journal of Materials Science:Materials in Electronics, 2017, 28(2):1695-1705.
【13】WANG Q Z, ZHOU F, ZHOU Z F, et al. Influence of Ti content on the structure and tribological properties of Ti-DLC coatings in water lubrication[J]. Diamond and Related Materials, 2012, 25:163-175.
【14】SPINDT C A, BRODIE I, HUMPHREY L, et al. Physical properties of thin-film field emission cathodes with molybdenum cones[J]. Journal of Applied Physics, 1976, 47(12):5248-5263.
【15】麻根旺, 于盛旺, 黑鸿君. 掺Ag含量对金刚石薄膜场发射性能的影响[J]. 中国表面工程, 2019, 32(2):70-76. MA G W, YU S W, HEI H J. Effects of Ag content on field emission properties of diamond composite films[J]. China Surface Engineering, 2019, 32(2):70-76.
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【19】ZHANG Y, LIU Y, HAN G Q, et al. Improving metal/n-Ge ohmic contact by inserting TiO2 deposited by PEALD[J]. Micro & Nano Letters, 2018, 13(6):801-803.
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