复杂结构碳化硅陶瓷制备工艺的研究进展
Research Progress on Preparation Technology of Silicon CarbideCeramics with Complex Structure
摘 要
碳化硅陶瓷具有高强度、高热导率、良好化学稳定性等特点，广泛应用于航空航天、石油化工、集成电路等领域，但碳化硅陶瓷的硬度高、脆性大，在加工过程中易产生缺陷，从而制约了复杂结构碳化硅陶瓷的应用。介绍了复杂结构碳化硅陶瓷的制备工艺，并分析了目前常用的冷等静压成型结合无压烧结制备技术、凝胶注模成型结合反应烧结制备技术、注浆成型结合反应烧结制备技术、3D打印成型结合反应烧结制备技术等制备工艺的优缺点，以期为复杂结构碳化硅陶瓷的制备提供一定的理论参考。
复杂结构
制备工艺
反应烧结
silicon carbide
complex structure
preparation technology
reactive sintering
Abstract
Silicon carbide ceramic has high strength and thermal conductivity, and good chemical stability, and is widely used in aerospace, petrochemical, integrated circuits and other fields; however, defects are easy to form in the silicon carbide ceramic during processing because of its high hardness and brittleness, which restricts the application of silicon carbide ceramic with complex structures. The preparation processes of silicon carbide ceramic with complex structures are described, and the advantages and disadvantages of the commonly used preparation technologies, such as cold isostatic pressing combined with pressure-free sintering, gel injection molding combined with reactive sintering, slip casting combined with reactive sintering, 3D printing combined with reactive sintering, are analyzed in order to provide a certain theoretical reference for the preparation of silicon carbide ceramic with complex structures.
中图分类号 TQ174.75 DOI 10.11973/jxgccl202107001
所属栏目 综述
基金项目 国家科技重大专项项目（2013ZX02104）
收稿日期 2021/3/8
修改稿日期 2021/5/31
网络出版日期
作者单位点击查看
备注王晓波(1987-),男,河北邢台人,工程师,硕士
引用该论文: WANG Xiaobo,HE Zhiyong,WANG Feng,ZHANG Qifu. Research Progress on Preparation Technology of Silicon CarbideCeramics with Complex Structure[J]. Materials for mechancial engineering, 2021, 45(7): 1～6
王晓波,贺智勇,王峰,张启富. 复杂结构碳化硅陶瓷制备工艺的研究进展[J]. 机械工程材料, 2021, 45(7): 1～6
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参考文献
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【41】HAZAN Y D, PENNER D. SiC and SiOC ceramic articles produced by stereolithography of acrylate modified polycarbosilane systems[J]. Journal of the European Ceramic Society, 2017, 37(16):5205-5212.
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【43】DECKERS J, VLEUGELS J, KRUTH J P. Additive manufacturing of ceramics:A review[J].Journal of Ceramic Science and Technology, 2014, 5(4):245-260.
【44】陆峰,鲁中良,李涤尘,等.RMI-PIP法快速制作高致密度碳化硅复杂结构零件[J].硅酸盐学报,2013,41(9):1180-1184. LU F, LU Z L, LI D C, et al. Rapid manufacture of high relative-density and complex structure components of silicon carbide by RMI-PIP process[J].Journal of the Chinese Ceramic Society, 2013,41(9):1180-1184.
【2】SANTOS A C, RIBEIRO S. Liquid phase sintering and characterization of SiC ceramics[J]. Ceramics International, 2018, 44(10):11048-11059.
【3】KIM Y H, KIM Y W. Direct bonding of silicon carbide ceramics sintered with yttria[J].Journal of the European Ceramic Society, 2019, 39(15):4487-4494.
【4】赵文兴,张舸,赵汝成,等.轻型碳化硅质反射镜坯体的制造工艺[J].光学精密工程,2011,19(11):2609-2617. ZHAO W X,ZHANG G,ZHAO R C,et al.Fabrication of silicon carbide lightweight mirror blank[J].Optics and Precision Engineering, 2011, 19(11):2609-2617.
【5】刘海林,霍艳丽,胡传奇,等.光刻机用精密碳化硅陶瓷部件制备技术[J].现代技术陶瓷,2016,37(3):168-178. LIU H L,HUO Y L,HU C Q,et al. Preparation of high precision SiC components for lithography equipment[J]. Advanced Ceramics,2016, 37(3):168-178.
【6】WU H B, YAN Y J, LIU G L, et al. Effects of grain grading on microstructures and mechanical behaviors of pressureless solid-state-sintered SiC[J].International Journal of Applied Ceramic Technology, 2015, 12(5):976-984.
【7】LIU M, YANG Y, WEI Y Q, et al. Preparation of dense and high-purity SiC ceramics by pressureless solidstate-sintering[J]. Ceramics International,2019, 45(16):19771-19776.
【8】ZHANG Y, TANG X X, UCHIDA N, et al. Binder surface segregation during spray drying of ceramic slurry[J].Journal of Materials Reserch, 1998, 13(7):1881-1887.
【9】TANAKA S,PIN C C,UEMATSU K.Effect of organic binder segregation on sintered strength of dry-pressed alumina[J].Journal of the American Ceramic Society,2006,89(6):1903-1907.
【10】姚远,郭朋.成型工艺对ITO素胚及靶材的影响[J].河南化工,2021,38(1):25-27. YAO Y, GUO P. Effects of forming process on ITO green body and target[J]. Henan Chemical Industry, 2021, 38(1):25-27.
【11】杜苗凤,张培志,郭方全,等.粉料和冷等静压对凝胶注模成型Al2O3陶瓷致密化的影响[J].机械工程材料,2020,44(10):28-32. DU M F, ZHANG P Z, GUO F Q, et al. Effect of powder and cold isostatic pressingon densification of Al2O3 ceramics molded by gelcasting[J]. Materals for Mechanical Engineering, 2020, 44(10):28-32.
【12】LEE S C, KIM K T. A densification model for powder materials under cold isostatic pressing-Effect of adhesion and friction of rubber molds[J]. Materials Science and Engineering:A, 2008, 498(1/2):359-368.
【13】ZHANG J X,JIANG D L,LIN Q L,et al.Properties of silicon carbide ceramics from gelcasting and pressureless sintering[J].Materials and Design,2015,65:12-16.
【14】OMATETE O O,JANNEY M A,STREHLOW R A.Gelcasting-A new ceramic forming process[J].American Ceramic Society Bulletin,1991,70(10):1641-1649.
【15】CHEN Y F, WANG H, TANG J, et al. Fabrication of lightweight SiC space mirror[J]. Key Engineering Materials, 2007, 336/337/338:1151-1154.
【16】张舸,赵汝成,赵文兴.空间用反应烧结碳化硅反射镜坯体制备技术研究[J].空间科学学报,2011,31(3):401-405. ZHANG G,ZHAO R C,ZHAO W X. Study on fabrication technology of reaction bonded silicon carbide mirror blank forspace[J]. Chinese Journal of Space Science, 2011, 31(3):401-405.
【17】谢志鹏.结构陶瓷[M].北京:清华大学出版社,2011. XIE Z P. Structural ceramics[M]. Beijing:Tsinghua University Press, 2011.
【18】吕振林,熊流锋,黄清伟,等.工艺参数对反应烧结碳化硅导电性的影响[J].西安交通大学学报,1998,32(12):70-72. LV Z L,XIONG L F,HUANG Q W,et al.Effect of sintering parameters on the conductivity of reaction-formed silicon carbide[J]. Journal of Xi'an Jiaotong University, 1998, 32(12):70-72.
【19】ARANI H F, ISAFI S, TABRIZIAN P, et al. A novel gel-cast SiC with potential application in turbine hot section:Investigation of the rheological behavior and mechanical properties[J]. Ceramics International, 2019, 45(13):15996-16001.
【20】KHEYRINIAA L, BAHARVANDIA H R, EHSANIA N, et al. Fabrication of SiC bodies by optimized gel-casting method[J]. International Journal of Refractory Metals & Hard Materials, 2019, 81:225-232.
【21】赵汝成,包建勋.大口径碳化硅反射镜轻量化结构与镜坯成型[J].光学与光电技术,2014,12(6):65-69. ZHAO R C, BAO J X. Lightweight structure and mirro blank formation of the SiC ceramic mirro with large caliber[J]. Optics & Optoelectronic Technology, 2014,12(6):65-69.
【22】BENDA D, SNUPAREK J, CERMAK V. Oxygen inhibition and influence of pH on the inverse emulsion polymerization of acrylic monomers[J]. Journal of the European Ceramic Society, 2001, 37(6):1247-1253.
【23】杨金龙,戴春雷,马天,等.高可靠性陶瓷部件胶态注射成型关键技术及装备[J].中国有色金属学报,2004,14(增刊1):243-249. YANG J L, DAI C L, MA T, et al. Key technique and equipment on colloidal injectionmoulding of high reliability ceramic[J].The Chinese Journal of Nonferrous Metals, 2004, 14(S1):243-249.
【24】翟彦霞,李兆敏,孙海滨,等.反应烧结工艺对碳化硅陶瓷微结构及性能的影响[J].硅酸盐通报,2017,36(2):753-758. ZHAI Y X, LI Z M, SUN H B, et al. Effect of reaction sintering process on microstructure and properties of SiC ceramics[J]. Bulletin of the Chinese Ceramic Society, 2017, 36(2):753-758.
【25】XU X,OLIVEIRA M I L L,FERREIRA J M F.Slip casting of reaction sialon bodies in organic media[J].Journal of Materials Science Letters,2001,20(22):2043-2044.
【26】MARCHIA J, SILVAB G, CHAVES C, et al. Influence of additive system (Al2O3-RE2O3, RE=Y, La, Nd, Dy, Yb) on micro-structure and mechanical properties of silicon nitride-based ceramics[J].Materials Research,2009,12(2):145-150.
【27】LI Y,LIN J,GAO J Q,et al.Fabrication of reaction-bonded SiC ceramics by slip casting of SiC/C suspension[J].Materials Science and Engineering:A,2008,483/484:676-678.
【28】FERREIRA J M F, DIZ H M M. Influence of pH on the pressure slip casting of silicon carbide bodies[J]. Journal of the European Ceramic Society, 1997, 17(2/3):259-266.
【29】LARSSON M, HILL A, DUFFY J. Suspension stability:Why particle size, zeta potential and rheology are important[J].Annual Transactions of the Nordic Rheology Society, 2012, 20:209-214.
【30】GNYLA J, GUBERNAT A, ZYCH L, et al. Influence of TMAH and NaOH on the stability of SiC aqueous suspensions[J]. Ceramics International, 2020, 46(8):11208-11217.
【31】GUBERNAT A, ZYCH L, WIERZBA W. SiC products formed by slip casting method[J]. International Journal of Applied Ceramic Technology, 2015, 12(5):957-966.
【32】赵霞,唐竹兴.碳化硅陶瓷材料成型工艺的研究进展[J].现代技术陶瓷,2010,31(4):15-17. ZHAO X, TANG Z X. Evelopment of the forming process of SiC materials[J]. Advanced Ceramics,2010,31(4):15-17.
【33】梁栋,何汝杰,方岱宁.陶瓷材料与结构增材制造技术研究现状[J].现代技术陶瓷,2017,38(4):231-247. LIANG D, HE R J, FANG D N. Development of additive manufacturing of ceramics[J].Advanced Ceramics,2017, 38(4):231-247.
【34】MARCUS H L, BEAMAN J J, BARLOW J W, et al. Solid freeform fabrication powder processing[J]. American Ceramic Society Bulletin, 1990, 69(6):1030-1031.
【35】SACHS E, CIMA M, CORNIE J. Three-dimensional printing:Rapid tooling and prototypes directly from a CAD model[J]. CIRP Annals, 1990, 39(1):201-204.
【36】连芩,武向权,田小永,等.陶瓷增材制造[J].现代技术陶瓷,2017,38(4):267-277. LIAN Q, WU X Q, TIAN X Y, et al. Additive manufacturing of ceramics[J].Advanced Ceramics,2017, 38(4):267-277.
【37】CHEN Z W, LI Z Y, LI J J, et al.3D printing of ceramics:A review[J].Journal of the European Ceramic Society, 2019, 39(4):661-687.
【38】伍海东,刘伟,伍尚华,等.陶瓷增材制造技术研究进展[J].陶瓷学报,2017,38(4):451-459. WU H D, LIU W, WU S H, et al. Research progress of additive manufacturing technology for ceramic materials[J].Journal of Ceramics, 2017, 38(4):451-459.
【39】FLEISHER A, ZOLOTARYOV D, KOVALEVSKYA, et al. Reaction bonding of silicon carbides by binder jet 3D-printing, phenolic resin binder impregnation and capillary liquid silicon infiltration[J]. Ceramics International, 2019, 45(14):18023-18029.
【40】ZHANG H, YANG Y, LIU B, et al. The preparation of SiC-based ceramics by one novel strategy combined 3D printing technology and liquid silicon infiltration process[J]. Ceramics International, 2019,45(8):10800-10804.
【41】HAZAN Y D, PENNER D. SiC and SiOC ceramic articles produced by stereolithography of acrylate modified polycarbosilane systems[J]. Journal of the European Ceramic Society, 2017, 37(16):5205-5212.
【42】DING G J, HE R J, ZHANG K Q, et al. Stereolithography 3D printing of SiC ceramic with potential for lightweight optical mirror[J].Ceramics International, 2020, 46(11):18785-18790.
【43】DECKERS J, VLEUGELS J, KRUTH J P. Additive manufacturing of ceramics:A review[J].Journal of Ceramic Science and Technology, 2014, 5(4):245-260.
【44】陆峰,鲁中良,李涤尘,等.RMI-PIP法快速制作高致密度碳化硅复杂结构零件[J].硅酸盐学报,2013,41(9):1180-1184. LU F, LU Z L, LI D C, et al. Rapid manufacture of high relative-density and complex structure components of silicon carbide by RMI-PIP process[J].Journal of the Chinese Ceramic Society, 2013,41(9):1180-1184.
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