利用短波长特征X射线衍射仪对样品进行应力测试，测试样品表面附近的衍射峰时发现，衍射角明显偏离理论衍射角。通过理论和试验对该衍射峰赝偏移的原因进行了分析，并提出了解决措施。结果表明：由于短波长特征X射线波长短、衍射角小，入射准直器和接收准直器形成的规范体积截面为长菱形，当样品未充满规范体积时，导致衍射峰赝偏移，进而造成衍射角测试存在误差，影响应变计算结果的准确性。可通过减小准直器宽度、采用高角度衍射峰、使用对称法、翻转样品及应用理想参考样品等方法降低衍射峰赝偏移对应变计算结果的影响。

The stress of the sample was measured by short wavelength characteristic X-ray diffractometer. It was found that the diffraction angle obviously deviated from the theoretical diffraction angle during test the diffraction peak near the sample surface. The reason for pseudo migration of diffraction peak was analyzed by theory and experiment, and the solutions were put forward. The results show that due to the wave length of the short wavelength characteristic X-ray was short and the diffraction angle was small, the gauge volume cross section formed by the incident collimator and the receiving collimator was a long diamond. When the sample was not filled with the gauge volume, leading to the pseudo shift of diffraction peak, resulting in the error of the diffraction angle measurement and affecting the accuracy of strain calculated results. The influence of pseudo shift of diffraction peak on strain calculated results could be reduced by reducing the width of collimator, using high angle diffraction peak, using symmetry method, turning sample and using ideal reference sample.