微米尺度压痕测试设备的研发及其可靠性
Development and Reliability of Micro-Scale Indentation Testing Equipment
摘 要
基于Oliver-Pharr方法和断裂韧度测试方法成功研制了一台微米尺度压痕测试设备,使用有限元方法对其机械可靠性进行验证,并利用该设备测试了高纯铝和氧化锆陶瓷的力学性能参数,验证设备的测试性能。结果表明:所研制的微米尺度压痕测试设备结构稳定,设计合理,闭环控制稳定性好,噪声水平较低,满足测试要求。采用该设备在不同压入载荷下测得高纯铝及氧化锆陶瓷的硬度、弹性模量以及断裂韧度与使用标准压痕设备测试得到的结果一致,相对误差小于7%,证明了该设备测试结果的准确性。
有限元方法
Oliver-Pharr方法
力学性能参数
indentation testing equipment
finite element method
Oliver-Pharr method
mechanical property parameter
Abstract
Based on the Oliver-Pharr method and the fracture toughness test method, a micro-scale indentation testing equipment was successfully developed. Its mechanical reliability was verified by the finite element method, and the mechanical property parameters of the high-purity aluminum and zirconia ceramics were tested by the equipment to verify the test performance of the equipment. The results show that the developed micro-scale indentation testing equipment had stable structure, reasonable design, good closed-loop control stability and low noise level, and met the test requirements. The hardness, elastic modulus and fracture toughness of high-purity aluminum and zirconia ceramics measured by this equipment under different indentation loads were consistent with the results obtained by standard indentation equipment, and the relative error was smaller than 7%, which proved the accuracy of the test results of the equipment.
中图分类号 TH122 DOI 10.11973/jxgccl202202014
所属栏目 材料检测与仪器设备
基金项目 国家自然科学基金面上资助项目(11872054); 湖南省自然科学基金杰出青年基金资助项目(2020JJ2026); 湖南省教育厅重点项目(19A122)
收稿日期 2021/1/5
修改稿日期 2021/12/23
网络出版日期
作者单位点击查看
备注伍杰(1982-),男,湖南澧县人,副教授,博士
引用该论文: WU Jie,SUN Kun,MA Zengsheng. Development and Reliability of Micro-Scale Indentation Testing Equipment[J]. Materials for mechancial engineering, 2022, 46(2): 88～94
伍杰,孙坤,马增胜. 微米尺度压痕测试设备的研发及其可靠性[J]. 机械工程材料, 2022, 46(2): 88～94
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参考文献
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【4】BAE W C,TEMPLE M M,AMIEL D,et al.Indentation testing of human cartilage:Sensitivity to articular surface degeneration[J].Arthritis & Rheumatism,2003,48(12):3382-3394.
【5】WADULLAH H M,AJEEL S, ABBASS M,et al.Corrosion of platinum nanocoatings thin films deposited by sputtering deposition method for medical applications[J].International Journal of Engineering & Technology,2018,7(4.37):63-66.
【6】JIN T,NIU X Y,XIAO G S,et al.Effects of experimental variables on PMMA nano-indentation measurements[J].Polymer Testing,2015,41:1-6.
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【8】刘晓坤,蔡力勋,陈辉.获取材料应力应变关系的锥形压入新方法[J].中国测试,2016,42(4):5-8.LIU X K,CAI L X,CHEN H.A new conical indentation method for obtaining stress-strain relation of materials[J].China Measurement & Test,2016,42(4):5-8.
【9】刘东旭,张泰华,郇勇.宏观深度测量压入仪器的研制[J].力学学报,2007,39(3):350-355.LIU D X,ZHANG T H,HUAN Y.Development of macro-depth-sensing-indentation instrumentation[J].Chinese Journal of Theoretical and Applied Mechanics,2007,39(3):350-355.
【10】马德军,陈伟.基于单一Vickers压头的材料弹塑性参数仪器化压入测试方法:103411833A[P].2013-11-27.MA D J,CHEN W.Instrumentation indentation test method for elastic-plastic parameters of material based on single Vickers pressure head:103411833A[P].2013-11-27.
【11】蒋庄德,王海容,赵则祥,等.微机械力学性能测试仪:2412212Y[P].2000-12-27.JIANG Z D,ZHAO W H. Micro-mechanical mechanics performance tester:2412212Y[P].2000-12-27.
【12】OLIVER W C,PHARR G M.An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments[J].Journal of Materials Research,1992,7(6):1564-1583.
【13】SNEDDON I N.The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile[J].International Journal of Engineering Science,1965,3(1):47-57.
【14】ZHANG Y,GUO S,GAO W,et al.Mechanical behavior and simulation analysis of micro/nano indentation of single crystal silicon carbide[J].Yadian Yu Shengguang/Piezoelectrics and Acoustooptics,2018,40(5):742-745.
【15】LAWN B R,FULLER E R.Equilibrium penny-like cracks in indentation fracture[J].Journal of Materials Science,1975,10(12):2016-2024.
【16】宋仲康,马德军,陈伟,等.基于仪器化压入技术的结构陶瓷材料断裂韧性测试[J].装甲兵工程学院学报,2012,26(2):85-88.SONG Z K,MA D J,CHEN W,et al.Test of fracture toughness of structural ceramics based on instrumental indentation technology[J].Journal of Academy of Armored Force Engineering,2012,26(2):85-88.
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