类金刚石薄膜摩擦学性能影响因素及改善措施的研究进展
Research Progress on Affecting Factors of Diamond-Like Carbon FilmTribological Properties and Improvements
摘 要
类金刚石（diamond-like carbon，DLC）是一类含有金刚石结构（sp3杂化键）和石墨结构（sp2杂化键）的亚稳态非晶物质，具有高硬度、耐腐蚀、低摩擦因数、耐磨损等优良特性，但也存在着由于制备工艺、沉积参数等不同导致的内应力大、热稳定性差、摩擦学行为敏感等问题，大大限制了其产业化应用。从固有因素和外界因素2个方面综述了影响DLC薄膜摩擦学性能的因素，从异质元素掺杂、表面织构化等方面论述了改善DLC薄膜摩擦学性能的措施，展望了DLC薄膜摩擦学性能研究趋势。
摩擦学性能
影响因素
表面织构
元素掺杂
DLC film
tribological property
influencing factor
surface texture
element doping
Abstract
Diamond-like carbon (DLC) is a kind of metastable amorphous material containing diamond structure (sp3 hybrid bond) and graphite structure (sp2 hybrid bond), and has excellent characteristics such as high hardness, corrosion resistance, low friction coefficient, wear resistance. However, DLC also has problems such as large internal stress, poor thermal stability and sensitive tribological behavior caused by different preparation process and deposition parameters, which greatly limits its industrial application. The affecting factors of DLC film tribology properties are summarized from two aspects of the intrinsic factors and external factors. The improvements of DLC film tribology properties are discussed from heterogeneous elements doping and surface texture. The research trend of tribological properties of DLC film is prospected.
中图分类号 TH117 DOI 10.11973/jxgccl202210001
所属栏目 综述
基金项目 国家自然科学基金资助项目（51971148）；上海市自然科学基金资助项目（20ZR1455700）；上海应用技术大学中青年人才发展基金资助项目（ZQ2021-25）
收稿日期 2021/8/19
修改稿日期 2022/9/9
网络出版日期
作者单位点击查看
备注周琼(1984-),女,江西修水人,讲师,博士通信作者:温亚东
引用该论文: ZHOU Qiong,WEN Yadong,ZHANG Ergeng,HUANG Biao,LI Yaodong,LIANG Dandan,CHEN Qiang. Research Progress on Affecting Factors of Diamond-Like Carbon FilmTribological Properties and Improvements[J]. Materials for mechancial engineering, 2022, 46(10): 1～7
周琼,温亚东,张而耕,黄彪,李耀东,梁丹丹,陈强. 类金刚石薄膜摩擦学性能影响因素及改善措施的研究进展[J]. 机械工程材料, 2022, 46(10): 1～7
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参考文献
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【10】孙建芳, 唐邕涛, 苏峰华, 等.钛合金表面DLC薄膜的制备及其与不同材料配副的摩擦学性能研究[J].摩擦学学报, 2021, 41(6):953-963. SUN J F, TANG Y T, SU F H, et al.Synthesis of DLC film on titanium alloy and its tribological property sliding against different mating materials[J].Tribology, 2021, 41(6):953-963.
【11】周佳, 孙丽丽, 郭鹏, 等.铝合金表面沉积类金刚石薄膜的研究进展[J].表面技术, 2020, 49(1):113-121. ZHOU J, SUN L L, GUO P, et al.Research progress in diamond-like carbon films deposited on aluminum alloy[J].Surface Technology, 2020, 49(1):113-121.
【12】李安, 陈庆春, 王云锋, 等.不锈钢、铝、铜合金表面超厚类金刚石薄膜的制备及其摩擦学性能研究[J].材料保护, 2020, 53(5):63-67. LI A, CHEN Q C, WANG Y F, et al.Preparation and tribological properties of super-thick diamond-like carbon films on stainless steel, aluminum and copper alloys[J].Materials Protection, 2020, 53(5):63-67.
【13】HOLMBERG K, RONKAINEN H, LAUKKANEN A, et al.Friction and wear of coated surfaces:Scales, modelling and simulation of tribomechanisms[J].Surface and Coatings Technology, 2007, 202(4):1034-1049.
【14】VLADIMIROV A B, TRAKHTENBERG I S, RUBSHTEIN A P, et al.The effect of substrate and DLC morphology on the tribological properties coating[J].Diamond and Related Materials, 2000, 9(3/4/5/6):838-842.
【15】景鹏飞, 俞树荣, 张克菲, 等.载荷及位移幅值对DLC薄膜微动磨损行为[J].摩擦学学报, 2021, 41(2):213-222. JING P F, YU S R, ZHANG K F, et al.Effects of load and displacement amplitude on fretting wear behavior of DLC film[J].Tribology, 2021, 41(2):213-222.
【16】FIELD S K, JARRATT M, TEER D G. Tribological properties of graphite-like and diamond-like carbon originated from a unique fullerene-like nanostructure[J]. Nanotechnology, 2004, 37:949-956.
【17】李红轩.等离子体增强化学气相沉积类金刚石碳薄膜及其摩擦学性能研究[D].北京:中国科学院, 2005. LI H X. Plasma enhanced chemical vapor deposition of diamond-like carbon films and their tribological properties[D]. Beijing:Chinese Academy of Sciences, 2005.
【18】CHU P K, LI L H.Characterization of amorphous and nanocrystalline carbon films[J].Materials Chemistry and Physics, 2006, 96(2/3):253-277.
【19】ENKE K, DIMIGEN H, HVBSCH H.Frictional properties of diamondlike carbon layers[J].Applied Physics Letters, 1980, 36(4):291-292.
【20】郑韶先, 李强, 霍磊.CO2环境下DLC与不同对偶的摩擦学机理分析[J].兰州理工大学学报, 2019, 45(5):6-11. ZHENG S X, LI Q, HUO L.Tribological mechanism analysis of DLC film and its different matings in CO2 environment[J].Journal of Lanzhou University of Technology, 2019, 45(5):6-11.
【21】DONNET C, BELIN M, AUGÉ J C, et al.Tribochemistry of diamond-like carbon coatings in various environments[J].Surface and Coatings Technology, 1994, 68/69:626-631.
【22】WU D H, REN S M, PU J B, et al.A comparative study of tribological characteristics of hydrogenated DLC film sliding against ceramic mating materials for helium applications[J].Applied Surface Science, 2018, 441:884-894.
【23】宁可心, 王鹏, 江海霞, 等.含氢无定型碳摩擦转移膜结构演化规律研究[J].摩擦学学报, 2021, 41(4):484-492. NING K X, WANG P, JIANG H X, et al.Structural evolution of the transfer film of a-C:H[J].Tribology, 2021, 41(4):484-492.
【24】HAMILTON D B, WALOWIT J A, ALLEN C M.A theory of lubrication by microirregularities[J].Journal of Basic Engineering, 1966, 88(1):177-185.
【25】WANG Q W, YANG Y, YAO P, et al.Friction and cutting characteristics of micro-textured diamond tools fabricated with femtosecond laser[J].Tribology International, 2021, 154:106720.
【26】李振东, 詹华, 柯庆航, 等.激光织构和碳基薄膜复合处理提高钛合金摩擦学性能研究[J].润滑与密封, 2020, 45(12):135-140. LI Z D, ZHAN H, KE Q H, et al.Research on laser texture and carbon-based film composite treatment to improve the tribological properties of titanium alloy[J].Lubrication Engineering, 2020, 45(12):135-140.
【27】祁鹏浩, 仝哲, 刘奇, 等.表面织构化DLC涂层在脂润滑下的摩擦学性能研究[J].表面技术, 2021, 50(1):296-304. QI P H, TONG Z, LIU Q, et al.Tribological properties of DLC coated textured surfaces under grease lubrication[J].Surface Technology, 2021, 50(1):296-304.
【28】彭雅利, 郭朝乾, 林松盛, 等.综述金属掺杂对类金刚石薄膜结构和性能的影响[J].电镀与涂饰, 2019, 38(15):826-832. PENG Y L, GUO C Q, LIN S S, et al.Effect of metal doping on structure and properties of diamond-like carbon films:A review[J].Electroplating & Finishing, 2019, 38(15):826-832.
【29】DAI W, WU G S, WANG A Y.Preparation, characterization and properties of Cr-incorporated DLC films on magnesium alloy[J].Diamond and Related Materials, 2010, 19(10):1307-1315.
【30】GASSNER G, PATSCHEIDER J, MAYRHOFER P H, et al.Tribological properties of nanocomposite CrCx/a-C:H thin films[J].Tribology Letters, 2007, 27(1):97-104.
【31】GASSNER G, PATSCHEIDER J, MAYRHOFER P H, et al.Structure of sputtered nanocomposite CrCx/a-C:H thin films[J].Journal of Vacuum Science & Technology B:Microelectronics and Nanometer Structures, 2006, 24(4):1837.
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