一种基于聚焦离子束的石英玻璃平面透射 电镜试样制备方法
A method for quartz glass planar transmission electron microscope sample preparation based on focus ion beam
摘 要
使用聚焦离子束制备含有贯通纳米孔的石英玻璃平面TEM试样时,会出现试样硬度高、导电性差、试样片厚度过大等问题。改变试样U型切割时的倾转角,可在低加工束流下将试样薄片快速截断、分离并转移,避免加工时试样发生漂移损坏,或因长时间加工而出现反沉积现象,制备出的贯通纳米孔石英玻璃平面TEM试样衬度均匀、损伤少。该方法为深入研究激光刻蚀对石英玻璃结构的影响奠定了基础,同时也为使用聚焦离子束制备相近材料的平面TEM试样提供了技术参考。
聚焦离子束
平面TEM试样
U型切割
倾转角
quartz glass
focused ion beam
planar TEM sample
U-cut
tilt angle
Abstract
When using focused ion beam to prepare quartz glass planar TEM samples with through nano pores, problems such as high hardness, poor conductivity and excessive thickness of sample pieces would occur. By changing the tilt angle during U-cut separation of the sample, the sample sheet could be quickly cut off, separated and transferred under the low processing beam current, avoiding the drift damage to the sample during processing, or the reverse deposition phenomenon due to long processing. The prepared through nano porous quartz glass planar TEM sample had uniform contrast and less damage. The method laid a foundation for further studying the influence of laser etching on the structure of quartz glass, and also provided a technical reference for preparing planar TEM samples of similar materials using focused ion beam.
中图分类号 TB32 DOI 10.11973/lhjy-wl202301008
所属栏目 试验技术与方法
基金项目
收稿日期 2022/3/24
修改稿日期
网络出版日期
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备注李怡雪(1991-),女,博士,副研究员,主要从事FIB加工技术的研究工作,liyixue@nwpu.edu.cn
引用该论文: LI Yixue,DING Ying,ZHANG Guodong,GAO Qianwen,SHI Xuefang,LIU Feng. A method for quartz glass planar transmission electron microscope sample preparation based on focus ion beam[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2023, 59(1): 27～30
李怡雪,丁莹,张国栋,高倩雯,史学芳,刘峰. 一种基于聚焦离子束的石英玻璃平面透射 电镜试样制备方法[J]. 理化检验－物理分册, 2023, 59(1): 27～30
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参考文献
【1】宋冬生,王雷. 石英玻璃紫外波段折射率测量[J]. 应用光学,2011,32(6):706-708.
【2】郭晓光,翟昌恒,张亮,等. 光学石英玻璃纳米级加工性能[J]. 光学精密工程,2014,22(11):2959-2966.
【3】LIAO Y,NI J,QIAO L,et al. High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation[J]. Optica,2015,2(4):329-334.
【4】MARTIN G,BHUYAN M,TROLES J,et al. Near infrared spectro-interferometer using femtosecond laser written GLS embedded waveguides and nano-scatterers[J].Optics Express,2017,25(7):8386-8397.
【5】丁涛,刘占芳,宋恺. 三维光子晶体的制备[J]. 化学进展,2008,20(9):1283.
【6】ZHANG G,CHENG G,BHUYAN M K,et al. Ultrashort Bessel beam photoinscription of Bragg grating waveguides and their application as temperature sensors[J]. Photonics Research,2019,7(7):806-814.
【7】ZHAGN G,CHENG G,BHUYAN M,et al. Efficient point-by-point Bragg gratings fabricated in embedded laser-written silica waveguides using ultrafast Bessel beams[J].Optics Letters,2018,43(9):2161-2164.
【8】宋明丽,王小平,王丽军,等. 光子晶体制备及其应用研究进展[J]. 材料导报,2016,30(7):22-27.
【9】庞继伟,王超,蔡玉奎.玻璃材料激光加工技术的研究进展[J].激光技术,2021,45(4):417-428.
【10】GUISHUAN Y,TAO C,HONG C. Crack-free silica glass surface micro-grooves etched by 248 nm excimer lasers[J]. Chinese Journal of Lasers,2017,44(9):0902004.
【11】李荣柱,姚素娟.JEM-2100型透射电子显微镜的维护与故障清除[J].理化检验(物理分册),2012,48(7):454-456.
【12】杨倩,黄宛真,郑遗凡,等. 一种制备透射电镜截面样品的新方法[J]. 理化检验(物理分册),2012,48(2):91-94.
【13】王磊,曲迪,姬静远,等. 基于FIB-SEM制备尖晶石微米颗粒的球差校正透射电镜样品[J]. 电子显微学报,2021,40(1):50-54.
【14】付琴琴,单智伟. FIB-SEM双束技术简介及其部分应用介绍[J]. 电子显微学报,2016,35(1):81-89.
【15】范春燕,于会生,段淑卿. 聚焦离子束制备透射电镜样品效率提升方法[J]. 中国集成电路,2017,26(4):51-55.
【16】RAJPUT N S,SLOYAN K,ANJUM D H,et al. A user-friendly FIB lift-out technique to prepare plan-view TEM sample of thin layered materials[J].Ultramicroscopy,2022:113496.
【2】郭晓光,翟昌恒,张亮,等. 光学石英玻璃纳米级加工性能[J]. 光学精密工程,2014,22(11):2959-2966.
【3】LIAO Y,NI J,QIAO L,et al. High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation[J]. Optica,2015,2(4):329-334.
【4】MARTIN G,BHUYAN M,TROLES J,et al. Near infrared spectro-interferometer using femtosecond laser written GLS embedded waveguides and nano-scatterers[J].Optics Express,2017,25(7):8386-8397.
【5】丁涛,刘占芳,宋恺. 三维光子晶体的制备[J]. 化学进展,2008,20(9):1283.
【6】ZHANG G,CHENG G,BHUYAN M K,et al. Ultrashort Bessel beam photoinscription of Bragg grating waveguides and their application as temperature sensors[J]. Photonics Research,2019,7(7):806-814.
【7】ZHAGN G,CHENG G,BHUYAN M,et al. Efficient point-by-point Bragg gratings fabricated in embedded laser-written silica waveguides using ultrafast Bessel beams[J].Optics Letters,2018,43(9):2161-2164.
【8】宋明丽,王小平,王丽军,等. 光子晶体制备及其应用研究进展[J]. 材料导报,2016,30(7):22-27.
【9】庞继伟,王超,蔡玉奎.玻璃材料激光加工技术的研究进展[J].激光技术,2021,45(4):417-428.
【10】GUISHUAN Y,TAO C,HONG C. Crack-free silica glass surface micro-grooves etched by 248 nm excimer lasers[J]. Chinese Journal of Lasers,2017,44(9):0902004.
【11】李荣柱,姚素娟.JEM-2100型透射电子显微镜的维护与故障清除[J].理化检验(物理分册),2012,48(7):454-456.
【12】杨倩,黄宛真,郑遗凡,等. 一种制备透射电镜截面样品的新方法[J]. 理化检验(物理分册),2012,48(2):91-94.
【13】王磊,曲迪,姬静远,等. 基于FIB-SEM制备尖晶石微米颗粒的球差校正透射电镜样品[J]. 电子显微学报,2021,40(1):50-54.
【14】付琴琴,单智伟. FIB-SEM双束技术简介及其部分应用介绍[J]. 电子显微学报,2016,35(1):81-89.
【15】范春燕,于会生,段淑卿. 聚焦离子束制备透射电镜样品效率提升方法[J]. 中国集成电路,2017,26(4):51-55.
【16】RAJPUT N S,SLOYAN K,ANJUM D H,et al. A user-friendly FIB lift-out technique to prepare plan-view TEM sample of thin layered materials[J].Ultramicroscopy,2022:113496.
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