研究了阳极铝箔在快车速腐蚀工艺体系下,采用异形电极变电流和多级腐蚀工艺条件下,隧道孔在各阶段的发孔密度、孔径、孔长的变化规律。结果表明:发孔行为主要集中在短时大电流密度的电化学腐蚀阶段,而电流衰减阶段的孔长生长最快。随腐蚀周期的增加,孔密度、孔长在第一至第二个周期中期迅速增长,在第二个周期中期至第五个周期结束期间变化平缓。快车速腐蚀工艺将发孔与孔长增长行为有效隔离,通过多级腐蚀既提高了腐蚀效率,又增强了比电容的可控性及发孔的均匀性。

The variation trends of the density, the size and the length of the tunnel pits in the anode aluminum foil after each etching stage were studied under the fast corrosion process system condition. The results showed that the generation behavior of pits was mainly occurred during the short stage with high current density, meanwhile the growth of tunnels was the fastest at the stage with decaying density of current.With the increase of the number of etching cycles, the pore density and pore length increased rapidly from the first cycle to the middle of the second cycle, and changed gently from the middle of the second cycle to the fifth cycle. The fast speed etching process could effectively isolate the growth of the hole and the growth of the hole length, which not only improved the etching efficiency, but also enhanced the controllability of specific capacitance and the uniformity of the hole.