选择不同的衬底对粉末试样进行能谱分析,研究了衬底对粉末试样能谱分析结果的影响。结果表明:当衬底中的元素与试样中的元素存在特征X射线谱峰重叠现象时,面扫描谱图中元素的亮点分布异常,导致无法获得理想的能谱分析结果。列举了几种常用衬底及与其谱峰重叠的元素,有利于快速地选择合适的衬底,以获得理想的能谱分析结果。

Different substrates were selected for energy spectrum analysis of powder samples, the influence of substrates on the energy spectrum analysis results of the powder samples was studied. The results show that when there was a characteristic X-ray spectral peak overlap between the elements in the substrate and the elements in the sample, the distribution of bright spots of the elements in the surface scan spectrum was abnormal, resulting in the inability to obtain ideal energy spectrum analysis results. Several commonly used substrates and elements that overlap their spectral peaks were listed, which was beneficial for quickly selecting suitable substrates to obtain ideal energy spectrum analysis results.