同时制备多个透射电镜截面试样的离子减薄方法
Ion thinning method for simultaneous preparation of multiple TEM cross-section samples
摘 要
试样制备是透射电镜表征的关键,而传统的离子减薄方法效率低下,难以满足大批量的测试需求。以单晶硅基底上沉积的极紫外多层膜为例,介绍了一种同时制备多个透射电镜截面试样的离子减薄方法。结果表明:该方法不仅缩短了离子减薄的时间,还缩短了透射电镜装取试样与抽真空的时间。
薄膜
离子减薄
试样制备
transmission electron microscopy
thin film
ion thinning
sample preparation
Abstract
The preparation of the sample was the key to the characterization of the transmission electron microscope, and the traditional ion thinning method was inefficient and difficult to meet the needs of large-scale testing. Taking the extreme ultraviolet multilayer film deposited on a single crystal silicon substrate as an example, an ion thinning method for preparing multiple transmission electron microscope cross-section samples at the same time was introduced. The results show that this method not only shortened the time of ion thinning, but also shortened the time of transmission electron microscope loading and vacuuming.
中图分类号 TG115.2 TB383 DOI 10.11973/lhjy-wl202310006
所属栏目 试验技术与方法
基金项目 国家自然科学基金中物院联合基金(U1930119);中国科学院青年创新促进会人才项目(2020253);上海市科技计划项目(21DZ1100400)
收稿日期 2022/10/9
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备注张革(1994-),男,硕士,工程师,主要从事TEM测试表征工作,zhangge1@siom.ac.cn
引用该论文: ZHANG Ge,CUI Yun,ZHAO Jiaoling,WANG Tao,ZHAO Yuan. Ion thinning method for simultaneous preparation of multiple TEM cross-section samples[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2023, 59(10): 27～29
张革,崔云,赵娇玲,王涛,赵元安. 同时制备多个透射电镜截面试样的离子减薄方法[J]. 理化检验－物理分册, 2023, 59(10): 27～29
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参考文献
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【3】NEDELCU I,VAN DE KRUIJS R W E,YAKSHIN A E,et al.Thermally enhanced interdiffusion in Mo/Si multilayers[J].Journal of Applied Physics,2008,103(8):083549.
【4】ZHAO J L,YI K,WANG H,et al.Influence of deposition rate on interface width of Mo/Si multilayers[J].Thin Solid Films,2015,592:256-261.
【5】李超逸,陶保全,郭祥帅,等.极紫外多层膜技术的研究进展[J].量子光学学报,2020,26(4):397-408.
【6】HÖCHE T.Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks[J].International Journal of Materials Research,2022,97(7):1046-1050.
【7】戴嘉维,孔明.薄膜截面的TEM样品制备[J].理化检验(物理分册),2006,42(5):239-241.
【8】周伟敏.高性能聚焦离子束技术的应用[J].理化检验(物理分册),2004,40(9):453-456.
【9】付琴琴,单智伟.FIB-SEM双束技术简介及其部分应用介绍[J].电子显微学报,2016,35(1):81-89.
【10】KIM C S,AHN S H,JANG D Y.Review:developments in micro/nanoscale fabrication by focused ion beams[J].Vacuum,2012,86(8):1014-1035.
【11】马秀梅,尤力平.薄膜材料透射电镜截面样品的简单制备方法[J].电子显微学报,2015,34(4):359-362.
【12】王燕飞,黄宛真,郑遗凡,等.脆性材料截面透射电镜样品的制备[J].理化检验(物理分册),2011,47(4):225-228.
【13】杨倩,黄宛真,郑遗凡,等.一种制备透射电镜截面样品的新方法[J].理化检验(物理分册),2012,48(2):91-94,119.
【14】尚海龙,戴嘉维,马冰洋,等.一种高成功率的薄膜截面TEM样品制备方法[J].理化检验(物理分册),2015,51(4):256-258,266.
【15】王小曼,梁正,卢思.精研一体机结合离子减薄仪制备透射电镜截面样品[J].电子显微学报,2021,40(6):753-757.
【16】LUO H,YIN S H,ZHANG G H,et al.Optimized pre-thinning procedures of ion-beam thinning for TEM sample preparation by magnetorheological polishing[J].Ultramicroscopy,2017,181:165-172.
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