箔片空气轴承表面钛掺杂DLC膜的制备与表征
Preparation and Characterization of Ti-Doped DLC Film on Foil Air Bearing Surface
摘 要
采用中频非平衡磁控溅射方法在箔片空气轴承的主轴材料40Cr钢、支承元件铍青铜箔片及硅片上制备了钛掺杂的DLC膜, 并对膜的结构、摩擦磨损性能、结合强度以及内应力等进行了表征。结果表明: 所制备的DLC膜含有较多的sp2键, 与基体结合力强, 两种轴承材料上沉积DLC膜之间的摩擦配副的减摩抗磨效果较好, 摩擦因数在0.06~0.08, 磨损率为4.8×10-8 mm3·N-1·m-1, 可用于箔片空气轴承表面的固体润滑。
固体润滑
DLC膜
摩擦磨损
foil air bearing
solid lubrication
DLC film
friction and wear
Abstract
A Ti-doped DLC film was prepared on the foil air bearing (FAB) materials of 40Cr steel, bearing element BeCu foil and silicon chip by the mid-frequency unbalanced magnetron sputtering technique. The structure, friction and wear properties, adhension strength and inner stress of the film were characterized. The results show that the film had more sp2 bonds, and had a good bonding with the substrate. The friction and wear reduction of the friction pairs of the two bearing materials deposited DLC films was good, the friction coefficienct was 0.06-0.08, and the wear rate was 4.8×10-8 mm3·N-1·m-1. The film could be used for the solid lubrication of FAB.
中图分类号 TB302
所属栏目
基金项目 中国工程物理研究院机械制造工艺研究所所长基金资助项目(K587-09-JS)
收稿日期 2009/11/25
修改稿日期 2010/9/15
网络出版日期
作者单位点击查看
备注孟玉堂(1983-), 男, 四川巴中人, 助理工程师, 学士。
引用该论文: MENG Yu-tang,TANG Guang-ping,WEI Qi-long,WANG Li-ping,ZHENG Yue-qing. Preparation and Characterization of Ti-Doped DLC Film on Foil Air Bearing Surface[J]. Materials for mechancial engineering, 2011, 35(1): 69～71
孟玉堂,汤光平,魏齐龙,王立平,郑越青. 箔片空气轴承表面钛掺杂DLC膜的制备与表征[J]. 机械工程材料, 2011, 35(1): 69～71
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参考文献
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【2】邓建, 胡连桃, 黄昌华, 等.箔片空气轴承的新近技术突破与应用进展[J].轴承, 2004(8): 41-44.
【3】杨金焕, 夏葵, 姚艳霞.用于箔片空气轴承的新型高温固体润滑镀层[J].润滑与密封, 2003(5): 34-36.
【4】OUYANG J H, SASAKI S. Friction and wear characteristics of a Ti-containing diamond-like carbon coating with an SRV tester at high contact load and elevated temperature[J].Surface & Coatings Technology, 2005, 195: 234-244.
【5】杜军, 张平, 何家文.磁控溅射含Ti 非晶碳膜的微观结构分析[J].稀有金属材料与工程, 2008(4): 633-636.
【6】PODGORNIK B, JACOBSON S, HOGMARK S. DLC coating of boundary lubricated components-advantages of coating one of the contact surfaces rather than both or none[J].Tribology International, 2003, 36: 843-849.
【7】VANHULSEL A, VELASCO F, JACOBS R. DLC solid lubricant coatings on ball bearings for space applications[J].Tribology International, 2007, 40: 1186-1194.
【8】BEWILOGUA K. Effect of target material on deposition and properties of metal-containing DLC_Me-DLC/coating[J].Surface & Coatings Technology, 2000, 132: 275-283.
【9】BEWILOGUA K, WITTORF R, THOMSEN H, et al. DLC based coatings prepared by reactive d.c. magnetron sputtering[J].Thin Solid Films, 2004, 447/448: 142-147.
【10】VERCAMMEN K. Tribological behavior of DLC films in various lubrication regimes[J].Tribology International, 2004, 37: 983-989.
【11】YU Xiang. Investigation on preparation and properties of thick DLC film in medium-frequency dual-magnetron sputt-ering[J].Vacuum, 2005, 80: 324-331.
【12】ZHANG Sam, FU Yong-qing. Magnetron-sputtered nc-TiC/a-C(Al) tough nanocomposite coatings[J].Thin Solid Films, 2004, 46: 261-266.
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