20CrNiMo钢表面磁控溅射制备TiN/ZrN多层薄膜的形貌及摩擦学性能
Morphology and Tribological Properties of TiN/ZrN Multilayer Films on 20CrNiMo Steel Surface Prepared by Magnetron Sputtering
摘 要
利用非对称双极脉冲磁控溅射技术在20CrNiMo钢表面制备了TiN/ZrN多层薄膜, 利用扫描电子显微镜和原子力显微镜观察了薄膜的截面和表面形貌, 用划痕仪测试了薄膜与基体的结合力, 通过球-盘摩擦磨损试验机对薄膜的摩擦学性能进行了研究。结果表明: 制备的TiN/ZrN多层薄膜厚度约为2.1 μm, 薄膜均匀且致密, 表面粗糙度为13.63 nm;薄膜与基体结合较牢固, 临界载荷达到51.0 N;薄膜具有优良的减摩性, 摩擦因数为0.16, 较基体20CrNiMo钢的0.33明显减小, 使该钢的耐磨性能得到提高。
TiN/ZrN薄膜
磁控溅射
摩擦学性能
20CrNiMo steel
TiN/ZrN film
magnetron sputtering
tribological property
Abstract
TiN/ZrN multilayer films were deposited on the surface of 20CrNiMo steel by the symmetrical bipolar pulsed reactive magnetron sputtering. The morphology of the films at cross section and the surface morphology were observed by scanning electron microscopy and atomic force microscopy. The adhesion between the films and substrate was measured with the scribe testing. Tribological properties of the films was evaluated on a ball-on-disc friction and wear tester. The results show that the TiN/ZrN multilayer films with 2.1 μm thickness could be obtained, which were uniform and compact. The average surface roughness was about 13.63 nm. The films had a good adhesion of critical load 51.0 N with the substrate. It was found that the films had excellent antifriction. The friction coefficient of the 20CrNiMo steel was about 0.33 under dry sliding, while the TiN/ZrN films had lower friction coefficient of 0.16 under the same testing condition.
中图分类号 TG115.221.5
所属栏目
基金项目 国家自然科学基金资助项目(50874018)
收稿日期 2010/6/20
修改稿日期 2011/3/23
网络出版日期
作者单位点击查看
备注陈飞(1971-), 男, 河北大名人, 副教授, 博士。
引用该论文: CHEN Fei,CHEN Jia-qing,CHEN Liang-xian,LI Cheng-ming. Morphology and Tribological Properties of TiN/ZrN Multilayer Films on 20CrNiMo Steel Surface Prepared by Magnetron Sputtering[J]. Materials for mechancial engineering, 2011, 35(7): 8～10
陈飞,陈家庆,陈良贤,李成明. 20CrNiMo钢表面磁控溅射制备TiN/ZrN多层薄膜的形貌及摩擦学性能[J]. 机械工程材料, 2011, 35(7): 8～10
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参考文献
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【3】BULL S J, JONES A M. Multilayer coatings for improved performance[J].Surface and Coating Technology, 1996, 78: 173-184.
【4】DARK M J, LEYLAND A, MATTEWS A. Corrosion performance of layered coatings produced by physical vapor deposition[J].Surface and Coating Technology, 1990, 34/44: 481-485.
【5】RIE K T, CEBAUER A, WOEHLER J, et al. Synthesis of TiN/TiCN/TiC layer systems on steel and cerment substrates by PACVD[J].Surface and Coating Technology, 1995, 74: 371-375.
【6】PANJAN P, NAVINSEK B, CYEBAR A, et al. Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactived sputtered at low temperature[J].Thin Solid Films, 1996, 281: 298-302.
【7】MINEVICH A A. Wear of cemented carbide cutting inserts with multilayer Ti-based PVD coatings[J].Surface and Coating Technology, 1992, 53: 161-165.
【8】QTANI Y, HOFFMANN S. High temperature oxidation behavior of TiAlN/CrN coatings[J].Thin Solid Films, 1996, 281: 188-192.
【9】KELLY P J. Magnetron sputtering: a review of recent deve-lopments and applications[J].Vacuum, 2000, 56: 159-172.
【10】HALL I W, LUTYREA K L, BRIANT C L, et al. Surface engineering of titanium with glow discharge plasma[J].Met Trans A, 1978, 9: 815-818.
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