TiSiN纳米复合结构涂层的研究进展
Research Progress of TiSiN Nanocomposite Coating
摘 要
简要介绍了TiSiN纳米复合涂层的晶体结构, 主要从涂层的性能、制备方法、硅含量以及其它元素掺杂的影响等方面综述了TiSiN纳米复合涂层的研究进展, 最后对其存在的主要问题和今后的发展方向进行了总结和展望。
纳米复合结构
制备工艺
研究进展
TiSiN film
nanocomposite structure
fabrication technology
research progress
Abstract
The crystal structure of TiSiN nanocomposite coating was briefly introduced. And the research progress of TiSiN nanocomposite coating was summarized mainly from the properties of the coating, preparation method, silicon content and the effect of other doped elements etc. Finally the main problems which exist and the future development direction were summarized and prospected.
中图分类号 TG174.4
所属栏目 综述
基金项目 上海市自然科学基金资助项目(11ZR1424600); 上海市教委重点学科项目(J50503)
收稿日期 2012/5/28
修改稿日期 2013/4/3
网络出版日期
作者单位点击查看
备注赵永生(1986－), 男, 江苏盐城人, 硕士研究生。
引用该论文: ZHAO Yong-sheng,LI Wei,LIU Ping,MA Feng-cang,LIU Xin-kuan,CHEN Xiao-hong,HE Dai-hua. Research Progress of TiSiN Nanocomposite Coating[J]. Materials for mechancial engineering, 2013, 37(6): 6～10
赵永生,李伟,刘平,马凤仓,刘新宽,陈小红,何代华. TiSiN纳米复合结构涂层的研究进展[J]. 机械工程材料, 2013, 37(6): 6～10
被引情况:
【1】严汉兵,许剑光,吴海江,颜建辉,陈晓宇,陈肯, "铝对高温自蔓延合成Ti3SiC2粉体的影响",机械工程材料 39, 46-48(2015)
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参考文献
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【20】徐晔, 蔡珣, 陈秋龙, 等.TiSiN纳米超硬涂层的研究进展[J]. 新技术新工艺, 2006(8): 5-7.
【21】VEPREK S, REIPRICH S. A concept for the design of novel superhard coatings[J].Thin Solid Films, 1995, 268(1/2): 64-71.
【22】KIM K, YOON S. Superhard Ti-Si-N coatings by a hybrid system of arc ion plating and sputtering techniques[J].Surface & Coatings Technology, 2002, 161(2/3): 243-248.
【23】ZHANG C, LIU Z, LI K, et al. Microstructure, surface morphology and mechanical properties of nanocrystal1ine TiN/amorphous Ti3N4 composite films synthesized by ion beam assisted deposition[J].Journal of Applied Physics, 2004, 95(3): 1460-1467.
【24】沈保罗, 王均, 张铁邦, 等.纳米晶TiSiN超硬复合涂层的研究进展[J].粉末冶金, 2006, 23(5): 384-385.
【25】VEPREK S, NESLADEK P, NIEDERHOFER A, et al. Recent progress in the superhard nanocrystalline composites: towards their indust rializat ion and understanding of the origin of the superhardness[J].Surf Coat Tech, 1998, 108/109: 138-147.
【26】胡小萍, 李戈扬, 戴嘉维, 等.Si含量和基片温度对TiSiN纳米复合涂层的影响[J].上海交通大学学报, 2003, 37(2): 253-256.
【27】HOLUBAR P, JILEK M, SIMA M. Nanocomposite nc-TiAlSiN and nc-TiN2BN coatings: their applications on substrates made of cemented carbide and results of cutting tests[J].Surf Coat Tech, 1999, 120/121: 184-188.
【28】MA D, WANG X, MA S, et al. Nanocomposite TiSiN films and effect of Si contents on pulsed DC PCVD coatings quality[J].Acta Metallurgica Sinica, 2003, 39(10): 1047-1050.
【29】CHOI J, CHO K, LEE M, et al. Effects of Si content and free Si on oxidation behavior of TiSiN coating layers[J].Thin Solid Films, 2004, 447: 365-370.
【30】HAFIZ J, WANG X, MUKHERJEE R, et al. Hypersonic plasma particle deposition of SiTiN nanostructured coatings[J].Surface & Coatings Technology, 2004, 188/189: 364-370.
【31】MUNZW D. Titanium aluminum nitride films: a new alternative to TiN coatings[J].J Vac Sci Technol A, 1986, 4(6): 2717-2725.
【32】HARISH C, BARSHILIA, MOUMITA G, et al. Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering[J].Applied Surface Science 2010, 256(21): 6420-6426.
【33】NAKONECHNAA O, CSELLEB T. On the behaviour of indentation fracture in TiAlSiN hard thin films[J].Thin Solid Films, 2004, 447/448(30): 406-412.
【34】SUNG R C. Effects of Si addition on the microstructural evolution and hardness of Ti2Al2Si2N films prepared by the hybrid system of arcion plating and sputtering techniques[J].J Vac Sci Technol A, 2003, 21(4): 895-899.
【35】魏荣华.等离子增强磁控溅射TiSiCN基纳米复合涂层耐冲蚀性能研究[J].中国表面工程, 2009, 22(1): 1-10.
【2】NIEDRHOFER L, NESLADEK A, MINNLING P, et al. Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(TiyAlySix)N superhard nanocomposite coatings reaching the hardness of diamond[J].Surface and Coatings Technology, 1999, 120/121: 173-178.
【3】ZHANG R. F, VEPREK S. Phase stabilities of self-organized nc-TiN/a-Si3N4 nanocomposites and of Ti1-xSixNy solid solutions studied by ab initio calculation and thermodynamic modeling[J].Thin Solid Films, 2008, 516(8): 2264-2275.
【4】VEPREK S, NIEDERHOFER A, MOTO K, et al. Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4 and nc-TiSi2 nanocomposites with HV=80 to=105 GPa[J].Surface and Coatings Technology, 2000, 133/134: 152-159.
【5】PATSCHEIDER J. Nanocomposite hard coatings for wear protection[J].MRS Bulletin, 2003, 28(3): 180-183.
【6】MA S L, LI Y H, XU K W. Investigation on processing of industrial set-up plasma enhanced chemical vapor deposition with pulsed d.c.power[J].Surface and Coatings Technology, 2000, 131(1/3): 131-135.
【7】孔明, 李戈扬.两相纳米复合结构涂层中的模版效应与超硬研究[D].上海: 上海交通大学, 2009: 79-90.
【8】RAABE D. 计算材料学[M].北京: 化学工业出版社, 2002: 138-235.
【9】LI S Z. Plasma chemistry and plasma processing [J].Inorganic Chemistry, 1984, 4(3): 107-161.
【10】VEPREK S, REPRICH S, LI S Z. Superhard nanocrystalline composite materials: the TiN/Si3N4 system[J].Applied Physics Letters, 1995, 66: 2640-2642.
【11】PROCHAZKA J, KARVANKOVA, MARTIZA G J, et al. Conditions required for achieving superhardness=45 GPa in nc-TiN/a-Si3N4 nanocomposites[J].Materials Science and Engineering A, 2004, 384: 102-116.
【12】HIRAI T, HAYASHI S. Thermal conductivity of chemically vapour deposited Si3N4-TiN composites[J].Journal of Materials Science, 1984, 15(2): 162-163.
【13】孙士阳, 刘学杰, 李强.TiSiN表面生长过程的无格点KMC仿真及相应并进行计算研究[D].包头: 内蒙古科技大学, 2009: 5-9.
【14】尹承龙, 冯克承, 杨思泽.真空阴极弧制备纳米复合TiSiN涂层的研究[D].北京: 北京交通大学, 2009: 24-25.
【15】石玉龙, 彭红瑞, 李世直.Si对TiSiN膜组成结构的影响[J].功能材料, 1999, 30(1): 66-67.
【16】WEMER Z, STANISLAWSKI J, PIEKOSZEWSKI J, et al. New types of multi-component hard coatings deposited by ARC PVD on steel pre-treated by pulsed plasma beams[J].Vacuum, 2003, 70(2): 263-267.
【17】宿福利, 高见, 李洪林, 等.TiN/ TiSiN 复合涂层显微结构与力学性能研究[J].工具技术, 2011, 45(2): 39-42.
【18】谢春雨, 何畏, 徐彤.TiN /TiSiN复合涂层的耐磨性能研究[J].石油矿场机械, 2008, 37(2): 8-11.
【19】马大衍, 马胜利, 徐可为.脉冲直流PCVD制备TiSiN薄膜的电化学腐蚀行为[J].稀有金属材料与工程, 2004, 33(7): 740-743.
【20】徐晔, 蔡珣, 陈秋龙, 等.TiSiN纳米超硬涂层的研究进展[J]. 新技术新工艺, 2006(8): 5-7.
【21】VEPREK S, REIPRICH S. A concept for the design of novel superhard coatings[J].Thin Solid Films, 1995, 268(1/2): 64-71.
【22】KIM K, YOON S. Superhard Ti-Si-N coatings by a hybrid system of arc ion plating and sputtering techniques[J].Surface & Coatings Technology, 2002, 161(2/3): 243-248.
【23】ZHANG C, LIU Z, LI K, et al. Microstructure, surface morphology and mechanical properties of nanocrystal1ine TiN/amorphous Ti3N4 composite films synthesized by ion beam assisted deposition[J].Journal of Applied Physics, 2004, 95(3): 1460-1467.
【24】沈保罗, 王均, 张铁邦, 等.纳米晶TiSiN超硬复合涂层的研究进展[J].粉末冶金, 2006, 23(5): 384-385.
【25】VEPREK S, NESLADEK P, NIEDERHOFER A, et al. Recent progress in the superhard nanocrystalline composites: towards their indust rializat ion and understanding of the origin of the superhardness[J].Surf Coat Tech, 1998, 108/109: 138-147.
【26】胡小萍, 李戈扬, 戴嘉维, 等.Si含量和基片温度对TiSiN纳米复合涂层的影响[J].上海交通大学学报, 2003, 37(2): 253-256.
【27】HOLUBAR P, JILEK M, SIMA M. Nanocomposite nc-TiAlSiN and nc-TiN2BN coatings: their applications on substrates made of cemented carbide and results of cutting tests[J].Surf Coat Tech, 1999, 120/121: 184-188.
【28】MA D, WANG X, MA S, et al. Nanocomposite TiSiN films and effect of Si contents on pulsed DC PCVD coatings quality[J].Acta Metallurgica Sinica, 2003, 39(10): 1047-1050.
【29】CHOI J, CHO K, LEE M, et al. Effects of Si content and free Si on oxidation behavior of TiSiN coating layers[J].Thin Solid Films, 2004, 447: 365-370.
【30】HAFIZ J, WANG X, MUKHERJEE R, et al. Hypersonic plasma particle deposition of SiTiN nanostructured coatings[J].Surface & Coatings Technology, 2004, 188/189: 364-370.
【31】MUNZW D. Titanium aluminum nitride films: a new alternative to TiN coatings[J].J Vac Sci Technol A, 1986, 4(6): 2717-2725.
【32】HARISH C, BARSHILIA, MOUMITA G, et al. Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering[J].Applied Surface Science 2010, 256(21): 6420-6426.
【33】NAKONECHNAA O, CSELLEB T. On the behaviour of indentation fracture in TiAlSiN hard thin films[J].Thin Solid Films, 2004, 447/448(30): 406-412.
【34】SUNG R C. Effects of Si addition on the microstructural evolution and hardness of Ti2Al2Si2N films prepared by the hybrid system of arcion plating and sputtering techniques[J].J Vac Sci Technol A, 2003, 21(4): 895-899.
【35】魏荣华.等离子增强磁控溅射TiSiCN基纳米复合涂层耐冲蚀性能研究[J].中国表面工程, 2009, 22(1): 1-10.
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