钛合金表面磁控溅射制备羟基磷灰石/氧化钇稳定氧化锆复合涂层
HA/YSZ Composite Coatings on Ti-alloy Substrate Fabricated by Magnetron Sputtering
摘 要
采用磁控溅射法在Ti6Al4V基体上制备了HA/YSZ复合涂层.用X射线衍射仪、扫描电镜、原子力显微镜和划痕法对涂层进行了表征.结果表明:用磁控溅射法可在Ti6Al4V基体上成功制备HA/YSZ复合涂层,涂层主要含有HA、ZrO2和Y2O3物相,此外还有少量的TCP和CaO相;涂层表面呈多孔状,有利于类骨组织的长入,表面显微粗糙度约为140 nm,涂层厚度约为4 μm;划痕法测量涂层与基体的附着力约为80 N.
磁控溅射
微观形貌
附着力
HA/YSZ composite coating
magnetron sputtering
surface morphology
adhesion
Abstract
Hydroxyapatite (HA)/yttria stabilized zirconia (YSZ)/Ti-6Al-4V composite coatings have been fabricated by magnetron sputtering.X-ray diffraction,scanning electron microscopy and scratch testing were used to characterize the properties of the composite coating.The HA/YSZ composite coatings could be successfully deposited on Ti-6Al-4V alloy.The main phases of the composite coatings are HA,ZrO2 and Y2O3.Moreover,there is a small amount of TCP and CaO phases in the composite coatings.The surface morphology of the composite coating is porous,which is helpful for bone-like tissue to grow.The roughness,thickness,and adhesion of the HA/YSZ/ Ti-6Al-4V composite coating are about 140 nm,4 μm,and 80 N respectively.
中图分类号 TQ174
所属栏目
基金项目 江苏省自然科学基金资助项目(BK2003051)
收稿日期 2005/9/12
修改稿日期 2005/11/15
网络出版日期
作者单位点击查看
备注施秋萍(1980-),女,江苏太仓人,硕士研究生.
引用该论文: SHI Qiu-ping,ZHAO Yu-tao,DAI Qi-xun,LIN Dong-yang,LUO Ping-hui. HA/YSZ Composite Coatings on Ti-alloy Substrate Fabricated by Magnetron Sputtering[J]. Materials for mechancial engineering, 2006, 30(10): 52～55
施秋萍,赵玉涛,戴起勋,林东洋,罗平辉. 钛合金表面磁控溅射制备羟基磷灰石/氧化钇稳定氧化锆复合涂层[J]. 机械工程材料, 2006, 30(10): 52～55
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参考文献
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【3】Dijk K van,Schaeken H G,Wolke J C G,et al.Influence of discharge power level on the properties of hydroxyapatite films deposited on Ti6Al4V with RF magnetron sputtering[J].Biomed Mater Res,1995,29:269-276.
【4】Nelea V,Morosanu C,Iliescu M,et al.Microstructure and mechanical properties of hydroxyapatite thin films grown by RF magnetron sputtering[J].Sur & Coa Tel,2003,173:315-322.
【5】Dijk K van,Schaeken H G,Wolke J G C.Influence of annealing temperature on RF magnetron sputtered calcium phosphate coatings[J].Bio,1996,17:405-410.
【6】陈民芳,由臣,王玉红,等.溅射羟基磷灰石薄膜与钛合金基体结合强度的研究[J].热加工技术,2004,(1):36-37.
【7】Ding Shinn-Jyh,Ju Chien-Ping,Lin Jin-Huey.Immersion behavior of RF magnetron-assisted sputtered hydroxyapatite/titanium coatings in simulated body fluid[J].Biomed Mater Res,1999,47:551-563.
【8】马峰,蔡珣.膜基界面结合强度的表征与评价[J].表面技术,2001,30(8):15-19.
【9】Cheang P,Khor K A.Addressing processing problems associated with plasma spraying of hydroxyapatite coatings[J].Biomaterials,1996,17:537-554.
【10】Ogiso M,Tabata T,IchijoT,et al.Bonecalcifi-cation on the hydroxyapatite dental implant and the bone-hydroxyapatite interface[J].Long-term Effects Med Implants,1992,(2):137-148.
【11】Jin QM,Takita H,Kohgo T,et al.Effects of geometry of hydroxyaoatite as a cell substratum in BMP-induced ectopic bone formation[J].Biomed Mater Res,2000,52:491-499.
【12】Kawamura M,Iwata H,Sato K,et al.Chondroosteogenetic response to crude bone matrix proteins bound to hydroxyapatite[J].Clin Orthop,1987,217:281-292.
【13】Siegert M,Plischke M,Siegert M.Instability in surface growth with diffusion[J].Phys Rev Lett,1992,68:2035-2038.
【14】梁芳慧,王克光,周廉.仿生磷灰石涂层与钛基体结合强度的划痕法实验[J].材料科学与工程学报,2004,22(4):38-40.
【15】Dijk K van,Schaeken H G,Wolke J C G,et al.Influence of discharge power on the properties of hydroxyapatite films deposited on Ti6Al4V with RF magnetron sputtering[J].Bio Mater Res,1995,29:269-276.
【16】汪汉宏.离子束表面强化[M].北京:机械工业出版社,1992.
【17】罗广南,李文治,李恒德,等.离子能量对薄膜附着力及界面原子混合的影响[J].薄膜科学与技术,1994,3(1):7-10.
【18】Barnett S A,Shinn M.Plastic and elastic properties of compositionally modulated thin films[J].Annu Rev Mater Sci,1994,24:481-511.
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