沉积温度及膜厚对离子镀银膜结构及摩擦学性能的影响
Effects of Substrate Temperature and Film Thickness on Structure and Tribological Properties of Ag Films Prepared by Ion Plating
摘 要
采用离子镀在不锈钢和45钢基体表面低温沉积银薄膜.利用X射线衍射仪(XRD)、扫描电镜(SEM)和真空摩擦试验机对低温沉积银膜的晶体结构、表面形貌和摩擦学性能进行了研究.结果表明:银膜的择优取向度随着沉积时间的延长和基体温度的降低具有明显变化;在-147 ℃沉积6 min条件下制备的银膜为表层具有(200)择优取向及底层为(111)择优取向的双层结构;银膜在载荷较高时也有较好的摩擦学性能.
膜厚
基体温度
结构
摩擦磨损
Ag film
film thickness
deposition temperature
structure
friction and wear
Abstract
Ag films with various thicknesses were deposited on 45 steel and stainless steel substrates at low temperatures.The crystal structure,morphology and tribological properties of Ag films deposited at low temperature were analyzed by X-ray diffraction (XRD),scanning electron microscopy (SEM) and ball-on-disk vacuum tribometer,respectively.The preferred orientation degree of Ag films show significant change with prologing deposittion time and decreasing substrate temperature.The upper layer of Ag films deposited at -147 ℃ for 6 minutes shows (200) preferred orientation,while the sub-layer showed (111) preferred orientation.Ag films deposited at low temperature showed better anti-wear ability at higher load.
中图分类号 TG146.3.2 TG174.444
所属栏目
基金项目 国家自然科学基金资助项目(50301015)
收稿日期 2006/9/18
修改稿日期 2006/12/29
网络出版日期
作者单位点击查看
备注高晓明(1978-),男 ,甘肃天水人,博士研究生.
引用该论文: GAO Xiao-ming,SUN Jia-yi,HU Ming,WENG Li-jun,LIU Wei-min. Effects of Substrate Temperature and Film Thickness on Structure and Tribological Properties of Ag Films Prepared by Ion Plating[J]. Materials for mechancial engineering, 2007, 31(7): 11～14
高晓明,孙嘉奕,胡明,翁立军,刘维民. 沉积温度及膜厚对离子镀银膜结构及摩擦学性能的影响[J]. 机械工程材料, 2007, 31(7): 11～14
被引情况:
【1】高晓明,孙嘉奕,胡明,翁立军,伏彦龙,杨军,谭洪根,张良俊, "低温沉积银和银铜薄膜的耐原子氧性能",机械工程材料 37, 55-59(2013)
【2】高晓明,孙嘉奕,胡明,翁立军,伏彦龙,杨军,谭洪根, "沉积温度和氩气压力对钛薄膜物相结构和性能的影响",机械工程材料 37, 44-49(2013)
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