掺铬类石墨碳膜的显微组织与摩擦性能
Microstructure and Friction Properties of Cr-Doped Graphite-Like Carbon Films
摘 要
采用非平衡磁控溅射离子镀技术在不同衬底上制备了不同铬含量的掺铬类石墨非晶碳膜;用X射线光电子能谱仪、扫描电子显微镜、高分辨透射电子显微镜和拉曼光谱仪等分析了碳膜的成分、表面形貌、显微组织和碳键结构;通过销-盘摩擦试验机测试了碳膜在干摩擦及不同润滑条件下的摩擦因数.结果表明:适量掺铬碳膜可保持纯碳膜均一、无结晶的显微组织;掺铬对碳膜中碳元素的价键结构产生了重要影响,随着铬含量的增大,sp2碳原子在碳膜中的含量先增大后减小,使得掺铬碳膜的sp2碳含量比纯碳膜的更高;适量掺铬能有效降低碳膜的摩擦因数,而掺铬碳膜的摩擦因数随着铬含量增大的变化趋势与碳膜的碳键结构变化明显相关.
类石墨非晶碳膜
摩擦性能
unbalanced magnetron sputtering
graphite-like amorphous carbon film
friction property
Abstract
Cr-doped graphite-like amorphous carbon films with various Cr contents were deposited on different substrates by unbalanced magnetron sputter ion plating technique.X-ray photoelectron spectroscopy,scanning electron microscopy,high resolution transmission electron microscopy and Raman spectroscopy were used to characterize the composition,surface morphology,microstructure and carbon bond structure of the films.The friction coefficient of films in dry friction and different lubricated conditions was measured by means of pin-on-disk friction testing.The results show that adding appropriate Cr into the graphite-like carbon films could keep the pure carbon films homogeneous and non-crystalline.Incorporating Cr into the film had significant influence on bond structure of carbon element in the film.With increasing Cr content,the fraction of sp2 carbon atom in the film increased first,and then decreased.Thereby,the carbon films incorporated with Cr could possess more sp2 carbon atoms than the pure carbon film.Appropriate amount of Cr incorporation could effectively reduce the friction coefficient of the graphite-like carbon film.The trend of friction coefficient of Cr-doped graphite-like carbon films obviously depended on the evolvement of bond structure of carbon element in the films with increasing Cr content.
中图分类号 TB43 O484.5
所属栏目 新材料 新工艺
基金项目 国家“863”计划资助项目(2005AA33H010)
收稿日期 2009/3/3
修改稿日期 2010/3/22
网络出版日期
作者单位点击查看
备注张永宏(1967-),男,陕西白水人,副教授,博士研究生.
引用该论文: ZHANG Yong-hong,JIANG Bai-ling,YAN Shao-ping. Microstructure and Friction Properties of Cr-Doped Graphite-Like Carbon Films[J]. Materials for mechancial engineering, 2010, 34(5): 40～45
张永宏,蒋百灵,严少平. 掺铬类石墨碳膜的显微组织与摩擦性能[J]. 机械工程材料, 2010, 34(5): 40～45
被引情况:
【1】张永宏,杨丽雯,王玉梅,房东明, "衬底偏压对掺铬类石墨碳膜组织、性能及碳键结构的影响",机械工程材料 38, 66-71(2014)
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【7】SINGH V,JIANG J C,MELETIS E I.Cr-diamondlike carbon nanocomposite films: synthesis,characterization and properties[J].Thin Solid Films,2005,489:150-158.
【8】HOVSEPIAN P E,LEWIS D B,CONSTABLE C,et al.Combined steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological applications[J].Surface and Coatings Technology,2003,174/175:762-769.
【9】SHEEJA D,TAY B K,SUN C Q,et al.Characterization of Ti-containing amorphous carbon films prepared on titanium substrates[J].Journal of Materials Science,2003,38:421-425.
【10】WANG A Y,LEE K R,AHN J P,et al.Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique[J].Carbon,2006,44:1826-1832.
【11】YANG S,TEER D G.Investigation of sputtered carbon and carbon/chromium multi-layered coatings[J].Surface and Coatings Technology,2000,131:412-416.
【12】YANG S,LI X,RENEVIER N M,et al.Tribological pro-perties and wear mechanism of sputtered C/Cr coating[J].Surface and Coatings Technology,2001,142/144:85-93.
【13】TEER D G.New solid lubricant coatings[J].Wear,2001,251:1068-1074.
【14】PAL S K,JIANG J C,MELETIS E I.Effects of N-doping on the microstructure,mechanical and tribological behavior of Cr-DLC films[J].Surface and Coatings Technology,2007,201:7917-7923.
【15】KOK Y N,HOVSEPIAN P E,HAASCH R,et al.Raman spectroscopy study of C/Cr coatings deposited by the combined steered cathodic ARC/unbalanced magnetron sputtering technique[J].Surface and Coatings Technology,2005,200:1117-1122.
【16】WANG D Y,CHANG Y Y,CHANG C L,et al.Deposition of diamond-like carbon films containing metal elements on bio-medical Ti alloys[J].Surface and Coatings Technology,2005,200:2175-2180.
【17】TAY B K,SHI X,TAN H S,et al.Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc[J].Surface and Coatings Technology,1998,105:155-158.
【18】MYUNG H S,PARK Y S,JUNG M J,et al.Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering[J].Materials Letters,2004,58:1513-1516.
【19】GASSNER G,MAYRHOFER P H,MITTERER C,et al.Structure-property relations in Cr-C/a-C:H deposited by reactive magnetron sputtering[J].Surface and Coatings Technology,2005,200:1147-1150.
【20】张永宏,马婕,蒋百灵.Cr含量对类石墨碳涂层硬度及其价键结构的影响[J].材料热处理学报,2007,28(4):106-110.
【21】LIU Y,ERDEMIR A,MELETIS E I.An investigation of the relationship between graphitization and frictional behavior of DLC coatings[J].Surface and Coatings Technology,1996,86/87:564-568.
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