17-4PH不锈钢表面TiO2膜及其多层膜的结构与性能
Structure and Properties of TiO2 Film on 17-4PH Stainless Steel Surface and Its Multilayer Film
摘 要
利用非平衡磁控溅射技术在17-4PH不锈钢表面分别制备了TiO2膜、TiO2/Ti多层膜及TiO2/Ti/TiN/Ti多层膜,采用XRD、表面轮廓仪、显微硬度仪、摩擦磨损试验机和水蒸气疲劳腐蚀试验设备研究了薄膜的物相、显微硬度、耐磨性和耐疲劳腐蚀性能.结果表明:具有表面薄膜17-4PH不锈钢的硬度、耐磨性和耐腐蚀性能均有较大提高;与TiO2膜和TiO2/Ti/TiN/Ti多层膜相比,TiO2/Ti多层膜耐磨性能最好,较基体的提高了20倍以上,同时其耐疲劳腐蚀性能也最好.
TiO2膜
耐磨性
耐腐蚀性
TiO2/Ti multilayer film
TiO2 film
wear resistance
corrosion resistance
Abstract
The TiO2 single-layer film,TiO2/Ti and TiO2/Ti/TiN/Ti multilayer films were prepared on the 17-4PH stainless steel by unbalance magnetron sputtering.The phase composition,microhardness,wear resistance and antifatigue corrosion resistance of the films were investigated by using X-ray diffraction,profilemeter,vickers microhardness tester,friction and wear tester and steam corrosion fatigne test equipment.The results indicate that the hardness,wear resistance and corrosion fatigue resistance of the 17-4PH stainless steel with surface film were greatly improved.Compared with the TiO2 single-layer film and the TiO2/Ti/TiN/Ti multilayer film,the TiO2/Ti multilayer film had the best wear resistance which was increased by 20 times.The antifatigue corrosion resistance of the multilayer film was the best.
中图分类号 O484
所属栏目 材料性能及其应用
基金项目 教育部新世纪人才计划资助项目(NCET-06-0800);四川省杰出青年学科带头人培养资助计划资助项目(06ZQ026-015)
收稿日期 2009/6/11
修改稿日期 2009/12/30
网络出版日期
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备注吴艳萍(1984-),女,河南郑州人,硕士研究生.
引用该论文: WU Yan-ping,LENG Yong-xiang,SUN Hong,HUANG Nan. Structure and Properties of TiO2 Film on 17-4PH Stainless Steel Surface and Its Multilayer Film[J]. Materials for mechancial engineering, 2010, 34(7): 53～56
吴艳萍,冷永祥,孙鸿,黄楠. 17-4PH不锈钢表面TiO2膜及其多层膜的结构与性能[J]. 机械工程材料, 2010, 34(7): 53～56
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参考文献
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【4】冷永祥,孙鸿,徐禄祥,等.等离子体浸没离子注入和沉积技术制备TiN薄膜研究[J].真空科学与技术,2003,23:295-298.
【5】CHENG Y,ZHENG Y F.Effect of N2/Ar gas flow ratio on the deposition of TiN/Ti coatings on NiTi shape memory alloy by PIIID[J].Materials Letters,2006,60:2243-2247.
【6】TRZASKOMAPAULETTE P P,NAZERI A.Effects of sol-gel coatings on the localized corrosion behavior of 304 stainless steel[J].Journal Electrochem Soc,1997,144(4):1307-1310.
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