电子散斑干涉无损检测技术的应用现状
The Application Status of Electronic Speckle Pattern Interferometric Nondestructive Testing
摘 要
电子散斑干涉技术是一种测量物体表面微小形变的非接触式测量技术。它是在激光、视频、电子及数字图像处理等基础上发展起来的现代光测技术，具有高精度、全场、实时测量等特点，有着重要的理论研究和实用价值。介绍电子散斑干涉技术的基本原理和特点以及在无损检测领域最新研究进展，并探讨了未来的发展趋势。
激光
电子散斑
Optical testing
Laser
TV-holography
Abstract
Based on modern high technologies such as laser, video, electronics, image processing and holography, ESPI(Electronic Speckle Pattern Interferometry) is a non-contact measuring method, which can measure the small static and dynamitic surface deformations and reveal flaws by looking for flaw-induced deformation anomalies. With the advantages of high precision, high sensitivity, wide frequency bandwidth and full-field real-time testing, it has a promising future in engineering. Its basic theory and recent applications in nondestructive testing are reviewed. Finally, its scope for improvement is discussed.
中图分类号 TG115.28
所属栏目 综 述
基金项目 航天支撑技术基金资助项目
收稿日期 2005/6/2
修改稿日期
网络出版日期
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引用该论文: LIU Long,MENG Guang. The Application Status of Electronic Speckle Pattern Interferometric Nondestructive Testing[J]. Nondestructive Testing, 2006, 28(1): 28～30
刘 龙,孟 光. 电子散斑干涉无损检测技术的应用现状[J]. 无损检测, 2006, 28(1): 28～30
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参考文献
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【2】Chen F, Luoa WD, Daleb M, et al. High-speed ESPI and related techniques: overview and its application in the automotive industry\[J\]. Optics and Lasers in Engineering,2003,40:459-485.
【3】Petra Aswendt, Claus-Dieter Schmidta, Dirk Zielke, et al. ESPI solution for non-contacting MEMS-on-wafer testing\[J\]. Optics and Lasers in Engineering,2003,40:501-515.
【4】Thomas Fricke-Begemann, Gerd Gulker, Klaus D Hinsch, et al. Mural inspection by vibration measurements with TV-holography\[J\]. Optics and Lasers in Engineering,2000,32:537-548.
【5】Gred Gulker, Klaus D Hinsch, Arne Kraft. Deformation monitoring on ancient terracotta warriors by microscopic TV-holography\[J\]. Optics and Lasers in Engineering,2001,(36):501-513.
【6】Optonor VibroMap 1000 TV-holography System Operating Manual\[Z\]. Norway: Optor AS, 2002.
【7】Yang L, Schubach H, Wegneret R, et al. 3D-Microscope-ESPI: Potential for Displacement Analysis on Small Areas［R］. Germany: Ettemeyer Gmbh&co,2000.
【8】朱 晨，张志津，徐 舟.用激光全息技术进行飞机发动机活塞杆疲劳检测\[J\].光电子激光,2002,13(1):62-64.
【9】梁明刚，李荣先，虞 建，等.采用电子散斑干涉法测法对车灯配光镜内部缺陷问题的研究\[J\].力学季刊,2003,24(3):379-384.
【10】阎正航，任兴民，秦卫阳，等.含裂纹平板的电子散斑振动测量与识别［J］.应用力学学报,2001,18(增刊):23.
【11】任雅萍，骆德渊，姜力军，等.实时数字散斑干涉仪及其应用\[J\].半导体光电,1997,18(2):118-121.
【12】张 驰，范 华，任雅萍，等.相移数字散斑干涉术测量振动模态［J］.半导体光电,1998,19(4):260-262.
【13】Rajesh Kumar, Shashi Kumar Singh, Chandra Shakher. Wavelet filtering applied to time-average digital speckle pattern interferometry fringes\[J\]. Optical & Laser Technology,2001,33:567-571.
【14】Yuwen Qin, Jinlong Chen, Haibo Fan. The study and application of a new filtering method on electronic speckle pattern interferometric fringe\[J\]. Optics and Lasers in Engineering, 2003, 39:449-456.
【15】Pedrini G, Schedin S, Tiziani HJ. Pulsed digital holography combined with laser vibrometry for 3D measurements of vibrating objects\[J\]. Optics and Lasers in Engineering,2002, 38:117-129.
【16】孙一翎，李善祥，李景镇.数字散斑相关测量方法的研究与改进\[J\].光子学报,2001,30(1):54-57.
【17】Joenathan C, Franze B, Haible P, et al. Speckle interferometry with temporal phase evaluation for measuring large-object deformation\[J\]. App Opl,1998,37(13):2608-2614.
【18】谢蒙萌，陶宝祺，姜锦虎.基于光栅大错位数字散斑干涉的无损检测技术\[J\].激光技术,2001,25(4):279-282.
【2】Chen F, Luoa WD, Daleb M, et al. High-speed ESPI and related techniques: overview and its application in the automotive industry\[J\]. Optics and Lasers in Engineering,2003,40:459-485.
【3】Petra Aswendt, Claus-Dieter Schmidta, Dirk Zielke, et al. ESPI solution for non-contacting MEMS-on-wafer testing\[J\]. Optics and Lasers in Engineering,2003,40:501-515.
【4】Thomas Fricke-Begemann, Gerd Gulker, Klaus D Hinsch, et al. Mural inspection by vibration measurements with TV-holography\[J\]. Optics and Lasers in Engineering,2000,32:537-548.
【5】Gred Gulker, Klaus D Hinsch, Arne Kraft. Deformation monitoring on ancient terracotta warriors by microscopic TV-holography\[J\]. Optics and Lasers in Engineering,2001,(36):501-513.
【6】Optonor VibroMap 1000 TV-holography System Operating Manual\[Z\]. Norway: Optor AS, 2002.
【7】Yang L, Schubach H, Wegneret R, et al. 3D-Microscope-ESPI: Potential for Displacement Analysis on Small Areas［R］. Germany: Ettemeyer Gmbh&co,2000.
【8】朱 晨，张志津，徐 舟.用激光全息技术进行飞机发动机活塞杆疲劳检测\[J\].光电子激光,2002,13(1):62-64.
【9】梁明刚，李荣先，虞 建，等.采用电子散斑干涉法测法对车灯配光镜内部缺陷问题的研究\[J\].力学季刊,2003,24(3):379-384.
【10】阎正航，任兴民，秦卫阳，等.含裂纹平板的电子散斑振动测量与识别［J］.应用力学学报,2001,18(增刊):23.
【11】任雅萍，骆德渊，姜力军，等.实时数字散斑干涉仪及其应用\[J\].半导体光电,1997,18(2):118-121.
【12】张 驰，范 华，任雅萍，等.相移数字散斑干涉术测量振动模态［J］.半导体光电,1998,19(4):260-262.
【13】Rajesh Kumar, Shashi Kumar Singh, Chandra Shakher. Wavelet filtering applied to time-average digital speckle pattern interferometry fringes\[J\]. Optical & Laser Technology,2001,33:567-571.
【14】Yuwen Qin, Jinlong Chen, Haibo Fan. The study and application of a new filtering method on electronic speckle pattern interferometric fringe\[J\]. Optics and Lasers in Engineering, 2003, 39:449-456.
【15】Pedrini G, Schedin S, Tiziani HJ. Pulsed digital holography combined with laser vibrometry for 3D measurements of vibrating objects\[J\]. Optics and Lasers in Engineering,2002, 38:117-129.
【16】孙一翎，李善祥，李景镇.数字散斑相关测量方法的研究与改进\[J\].光子学报,2001,30(1):54-57.
【17】Joenathan C, Franze B, Haible P, et al. Speckle interferometry with temporal phase evaluation for measuring large-object deformation\[J\]. App Opl,1998,37(13):2608-2614.
【18】谢蒙萌，陶宝祺，姜锦虎.基于光栅大错位数字散斑干涉的无损检测技术\[J\].激光技术,2001,25(4):279-282.
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