Difficulties and Solutions of Electron Back Scattered Diffraction Testing by Cold Field Emission Gun SEM
摘 要
针对部分冷场扫描电镜进行电子背散射衍射测试时遇到的困难和误区,指出冷场扫描电镜的束流与稳定性能够满足电子背散射衍射测试的表征要求。提出了针对半浸没式物镜的结构,应优先在低倍模式下进行电子背散射衍射测试,高倍模式下测试应使用磁场校正,并指出在低倍放大下应注意低倍位置校正的问题。对于冷场扫描电镜,通过以上方法,大部分电子背散射衍射测试都可以正常进行。
Abstract
In view of some difficulties and misunderstandings of electron back scattered diffraction (EBSD) testing by cold field emission gun SEM (CFEG-SEM), it was pointed out that the current intensity and stability of CFEG-SEM could meet the characterization requirement of EBSD testing. For the problem of snorkel lens, EBSD test should proceed in low magnification mode preferentially, and magnetic field rectification should be done while in high magnification mode. It was also pointed out that position calibration should be paid attention to while in low magnification mode. Through above solutions, most EBSD tests could be carried out properly.
中图分类号 TN16 DOI 10.11973/lhjy-wl201607005
所属栏目 试验技术与方法
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收稿日期 2016/4/25
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备注高 尚(1980-),男,实验师,主要从事电子显微镜与衍射方面的研究
引用该论文: GAO Shang,YANG Hai-feng. Difficulties and Solutions of Electron Back Scattered Diffraction Testing by Cold Field Emission Gun SEM[J]. Physical Testing and Chemical Analysis part A:Physical Testing, 2016, 52(7): 454~456
高 尚,杨海峰. 使用冷场扫描电镜进行电子背散射衍射测试的困难与解决方法[J]. 理化检验-物理分册, 2016, 52(7): 454~456
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参考文献
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