搜索热:失效分析 陶瓷
扫一扫 加微信
首页 > 期刊论文 > 论文摘要
不同Si3N4相涂层坩埚中全熔多晶硅锭的制备及表征
          
Preparation and Characterization of Molten Multi-crystalline Silicon Ingot in Crucible Coated with Different Si3N4 Coatings

摘    要
以α-Si3N4和β-Si3N4粉为原料,采用免烧结工艺在坩埚内壁上分别制备了α-Si3N4涂层、β-Si3N4涂层以及二者质量比为1 ∶1的复合涂层,然后在这些涂层坩埚中制备得到了多晶硅铸锭,观察了涂层和硅锭的表面形貌,测试了硅锭的表面粗糙度、晶粒大小以及红区长度。结果表明:α-Si3N4涂层表面粗糙不平、起伏不均匀,对应硅锭的表面粗糙度和晶粒尺寸最大,红区最长;β-Si3N4涂层表面较平整且起伏均匀,对应硅锭的表面粗糙度最小,晶粒尺寸较小,红区最短;复合涂层的表面粗糙度介于上述二者之间,对应硅锭的晶粒尺寸最小,红区长度介于二者之间。
标    签 表面粗糙度   Si3N4涂层   红区长度   晶粒尺寸   surface roughness   Si3N4 coating   length of red zone   grain size  
 
Abstract
With α-Si3N4 and β-Si3N4 powders as raw materials, the α-Si3N4coating, β-Si3N4 coating and composite coating of α-Si3N4 and β-Si3N4, whose mass ratio was 1:1, were prepared on the inner-wall of crucible by the non-sintering process, respectively, and then the multi-crystalline silicon ingots were obtained in the coated crucible. The surface morphology of the coatings and silicon ingots were observed and the surface roughness, grain size and length of red zone for silicon ingot were measured. The results show that the surface of α-Si3N4 coating was rough and undulating unevenly, and the surface roughness and grain size of the corresponding silicon ingot was the largest and the red zone was the longest. The surface of β-Si3N4 coating was relatively smooth and undulating evenly; the surface roughness of the corresponding silicon ingot was the smallest, the grain size was relatively small and the red zone was the shortest. The surface roughness degree of composite coating was between those of the above two coatings; the grain size of the corresponding silicon ingot was the smallest and the length of red zone was between the above two silicon ingots.

中图分类号 TM615   DOI 10.11973/jxgccl201705012

 
  中国光学期刊网论文下载说明


所属栏目 试验研究

基金项目 河南省科技发展计划项目(142102210428)

收稿日期 2016/4/5

修改稿日期 2017/1/18

网络出版日期

作者单位点击查看

备注李永乐(1987-),男,河南三门峡人,硕士研究生.

引用该论文: LI Yongle,HUANG Jinliang,LI Feilong,LI Qian,LI Lihua. Preparation and Characterization of Molten Multi-crystalline Silicon Ingot in Crucible Coated with Different Si3N4 Coatings[J]. Materials for mechancial engineering, 2017, 41(5): 59~62
李永乐,黄金亮,李飞龙,李谦,李丽华. 不同Si3N4相涂层坩埚中全熔多晶硅锭的制备及表征[J]. 机械工程材料, 2017, 41(5): 59~62


论文评价
共有人对该论文发表了看法,其中:
人认为该论文很差
人认为该论文较差
人认为该论文一般
人认为该论文较好
人认为该论文很好
分享论文
分享到新浪微博 分享到腾讯微博 分享到人人网 分享到 Google Reader 分享到百度搜藏分享到Twitter

参考文献
【1】LAN C W, YANG Y M, YU A,et al. Development of high quality multicrystalline silicon for photovoltaic industry[C]//Proceedings of the 27th European Photovoltaic Solar Energy Conference (27th EU PVSEC). Frankfurt, Germany:[s.n.],2012.
 
【2】ZIEGLER G, HEINRICH J, WÖTTING G. Relationships between processing, microstructure and properties of dense and reaction-bonded silicon nitride[J]. Journal of Materials Science, 1987, 22(9):3041-3086.
 
【3】刘美,谭毅,许富民,等. 冶金提纯多晶硅用坩埚内壁氮化硅涂层的制备[J]. 机械工程材料,2011, 35(6):8-12.
 
【4】LI T F, YEH K M, HSU W C,et al. High-quality multi-crystalline silicon (mc-Si) grown by directional solidification using notched crucibles[J]. Journal of Crystal Growth, 2011, 318(1):219-223.
 
【5】申铣宪, 金延珉, 唐珊珊,等. 一种用于铸造高效多晶硅锭的方法:2013100086629[P].2013-04-03.
 
【6】沈维根, 陈先荣, 朱华英,等. 一种太阳能高效多晶硅铸锭用坩埚底部引晶涂层的制备方法[J]. 金属功能材料, 2014, 21(5):27-31.
 
【7】伊长浩, 周海萍, 周绪成,等. 异质形核生长高效多晶硅[C]//第13届中国光伏大会论文集.北京:中国可再生能源学会,2013.
 
【8】周海萍, 伊长浩, 张兆玉,等. 氮化硅涂层改性石英颗粒辅助生长高效多晶硅[J]. 特种铸造及有色金属, 2014, 34(8):800-803.
 
【9】WONG Y T, HSIEH C T, LAN A,et al. The effect of silica nucleation layers on grain control of multi-crystalline silicon in directional solidification[J]. Journal of Crystal Growth, 2014, 404:59-64.
 
【10】BRYNJULFSEN I, ARNBERG L. Nucleation of silicon on Si3N4 coated SiO2[J]. Journal of Crystal Growth, 2011, 331:64-67.
 
【11】NAKAJIMA K, MORISHITA K, MURAI R,et al. Growth of high-quality multicrystalline Si ingots using non-contact crucible method[J]. Journal of Crystal Growth, 2012, 355:38-45.
 
相关信息
   标题 相关频次
 (Ba1-ySry)6-3xSm8+2xTi18O54微波介质陶瓷的结构及性能
 3
 2195铝锂合金的化学铣切工艺优化
 2
 2197铝锂合金的化学铣切工艺
 2
 2197铝锂合金化铣抛光工艺及其影响因素
 2
 2A12铝合金喷射沉积坯的形状控制及显微组织
 2
 304不锈钢晶粒尺寸的超声检测
 2
 410 MPa级钢制无缝压力管高温拉伸测试结果异常原因分析
 2
 42CrMoA钢的单次喷丸和复合喷丸强化
 2
 Al-4B中间合金对AZ31镁合金晶粒尺寸和力学性能的影响
 2
 ER90S-G焊丝接头力学性能出现差异的原因
 2
 F45MnVS非调质钢动态再结晶模型与晶粒尺寸数值模拟
 2
 Fe-Cr-Ni电镀层在工业废水中的腐蚀行为
 2
 Nitronic 50不锈钢低温冲击韧性大幅降低原因分析
 2
 Q345钢热变形奥氏体晶粒尺寸的数值模拟
 2
 Si3N4陶瓷超声振动铣磨加工表面粗糙度的数学模型
 2
 SiCp/Al复合材料超精密车削表面质量的影响因素
 2
 TC18钛合金车削加工的切削力和表面粗糙度
 2
 X射线衍射分析高能喷丸后45钢的表层晶粒尺寸
 2
 表面粗糙度对800H合金在超临界水环境中腐蚀行为的影响
 2
 表面粗糙度对棒材电磁超声检测的影响
 2
 表面粗糙度对传动轴静电粉末喷涂涂层性能的影响
 2
 表面粗糙度对磁粉检测的影响
 2
 表面粗糙度对电磁超声测厚的影响
 2
 表面粗糙度对冷轧钢板磷化质量的影响
 2
 表面粗糙度对裂纹漏磁检测的影响
 2
 表面粗糙度对碳/铜载流摩擦副摩擦磨损性能的影响
 2
 表面粗糙度对压电超声测厚的影响
 2
 表面粗糙度对牙轮钻头内孔表面镀银层质量的影响
 2
 表面粗糙度对氧化物弥散强化钢板高温蠕变性能的影响
 2
 表面粗糙度和基底效应对有机涂层纳米压入测试结果的影响
 2