分别采用X射线能量分散谱仪（EDS）和电子能量损失谱仪（EELS）对锆合金中析出的锆氧化物相的氧含量（原子分数）及分布进行了测试，并对测试结果进行了对比。结果表明：EELS测得的锆氧化物中的氧含量为67.1%，与ZrO₂的氧含量接近（66.7%），而EDS测得的锆氧化物中的氧含量仅为30.1%，与ZrO₂的氧含量相差甚远；经过选区电子衍射花样标定，该锆氧化物为ZrO₂相，与EELS分析结果一致，因此利用EELS技术测定氧含量具有更高的精确度和可靠性，EELS可以用于氧化物的直接标定；同时，利用EELS成像可以清晰地显示出氧元素的偏聚状态，而EDS成像未能显示出氧元素的偏聚状态。

X-ray energy dispersive spectrometer (EDS) and electron energy loss spectrometer (EELS) were used to determine the content (atomic fraction) and distribution of oxygen in the zirconium oxide formed in zircaloy respectively, and the measurement results were compared. The results show that the oxygen content of zirconium oxide was determined to be 67.1% by EELS, which was close to the oxygen content of ZrO₂ (66.7%). But the oxygen content in the zirconium oxide was determined to be 30.1% by EDS, which was far below the oxygen content of ZrO₂. The selected area electron diffraction further confirmed that the zirconium oxide was ZrO₂ phase, and this was consistent with the results of EELS analysis. Thus it can be concluded that the oxygen content determined by EELS has higher accuracy than that determined by EDS, and EELS can be used for direct calibration of oxides. Moreover, the aggregation condition of oxygen element can be clearly displayed by EELS imaging, but in EDS imaging, no aggregation condition of oxygen element can be observed.