采用双辉等离子表面冶金技术在金刚石厚膜表面制备钽涂层的性能
Properties of Tantalum Coating Prepared via Double Glow Plasma Surface Metallurgy Technique on Thick Diamond Film Surface
摘 要
采用双辉等离子表面冶金技术在机械抛光后的金刚石厚膜表面制备钽涂层，研究了涂层的表面及截面形貌、微区成分、物相组成及结合性能。结果表明：制备得到的钽涂层连续、均匀，由钽金属层与界面处的化合物层组成，厚度约1.7 μm，组织为柱状晶；金刚石厚膜与钽涂层的界面处存在厚度约为1.1 μm的钽与碳元素呈梯度分布的扩散区，且生成了TaC和Ta2C两种化合物；钽原子填充了金刚石厚膜抛光产生的磨痕，其表面粗糙度由128 nm降低为57 nm；钽涂层的塑性以及与金刚石厚膜的结合性能良好。
钽涂层
双辉等离子表面冶金
结合强度
thick diamond film
tantalum coating
double glow plasma surface metallurgy
bonding strength
Abstract
Tantalum coating was prepared on mechanically polished thick diamond film via double glow plasma surface metallurgy technique. The surface and section morphology, micro-area composition, phase composition and bonding property of the coating were studied. The results show that the tantalum coating was continuous and uniform, consisting of tantalum metallic layer and compound layer at the interface. The coating thickness was about 1.7 μm, and the coating structure was composed of columnar crystal. A 1.1 μm thick diffusion zone with tantalum and carbon distributed in gradient was formed at the interface of the tantalum coating and the thick diamond film, and two compounds of TaC and Ta2C were formed here. The polishing scratches on the thick diamond film were filled up by tantalum atoms, and therefore reduced the surface roughness from 128 nm to 57 nm. The obtained tantalum coating had good plasticity and good bonding performance with the thick diamond film.
中图分类号 TG174.445 DOI 10.11973/jxgccl202003010
所属栏目 材料性能及应用
基金项目 国家自然科学基金资助项目（51601124，5811530058）；山西省科技重大专项项目（20181102013）
收稿日期 2019/1/16
修改稿日期 2020/1/5
网络出版日期
作者单位点击查看
备注鲁明杰(1990-),男,河南南阳人,硕士研究生
引用该论文: LU Mingjie,ZHENG Ke,GAO Jie,HEI Hongjun,WU Yucheng,SHU Xuefeng,TANG Bin,YU Shengwang. Properties of Tantalum Coating Prepared via Double Glow Plasma Surface Metallurgy Technique on Thick Diamond Film Surface[J]. Materials for mechancial engineering, 2020, 44(3): 51～55
鲁明杰,郑可,高洁,黑鸿君,吴玉程,树学峰,唐宾,于盛旺. 采用双辉等离子表面冶金技术在金刚石厚膜表面制备钽涂层的性能[J]. 机械工程材料, 2020, 44(3): 51～55
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【7】NAIDICH Y I, UMANSKII V P, LAVRINENKO I A. Strength of the diamond-metal interface and soldering of diamonds[M]. Cambridge: Cambridge International Science Publishing Ltd., 2007.
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【10】张国青, 黄辉, 徐西鹏. 钎焊金刚石线锯的制备方法及性能[J]. 机械工程材料, 2015, 39(5): 77-80.
【11】沈伟丽. 金刚石颗粒化学镀Ni-P合金及其性能研究[D]. 沈阳: 东北大学, 2011.
【12】ARTINI C, MUOLO M L, PASSERONE A. Diamond-metal interfaces in cutting tools: A review[J]. Journal of Materials Science, 2012, 47(7): 3252-3264.
【13】高雪艳, 钟强, 李晓静,等. 双辉等离子体表面冶金金属化CVD金刚石自支撑膜研究[J]. 人工晶体学报, 2015, 44(9):2385-2389.
【14】ZHANG P, XU Z, ZHANG G, et al. Surface plasma chromized burn-resistant titanium alloy[J]. Surface and Coatings Technology, 2007, 201(9/10/11): 4884-4887.
【15】RONG W L, HEI H J, ZHONG Q, et al. Nanostructured TaxC interlayer synthesized via double glow plasma surface alloying process for diamond deposition on cemented carbide[J]. Applied Surface Science, 2015, 359: 41-47.
【16】王若男, 张平则, 毕强,等. 采用双层辉光等离子表面合金化技术在Q235钢表面制备钽改性层及其耐蚀性[J]. 机械工程材料, 2013, 37(9): 25-28.
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