磁控溅射不同元素掺杂WS2薄膜的组织和纳米压痕力学性能
Microstructure and Nanoindentation Mechanical Properties of WS2 Film withDifferent Doping Elements by Magnetron Sputtering
摘 要
采用磁控溅射法在不同沉积压力（0.8，1.2 Pa）下分别制备WS2薄膜、Ti/WS2复合薄膜和La-Ti/WS2复合薄膜，研究了薄膜的组织结构和纳米压痕力学性能。结果表明：WS2薄膜呈疏松多孔结构，晶粒粗大，孔洞较多，组织致密性差；与WS2薄膜相比，Ti/WS2复合薄膜的晶粒尺寸减小，组织变得致密，掺杂镧后薄膜的晶粒尺寸进一步减小，组织更致密；镧的掺杂还降低了薄膜中硫与钨的原子比，增加了硬质钨相的相对含量，提高了薄膜的硬度和变形抗力。
WS2薄膜
镧掺杂
晶粒尺寸
纳米压痕力学性能
magnetron sputtering
WS2 film
lanthanum doping
grain size
nanoindentation mechanical property
Abstract
The WS2 film, Ti/WS2 composite film and La-Ti/WS2 composite film were prepared by magnetron sputtering under different deposition pressures (0.8, 1.2 Pa). The microstructure and nanoindentation mechanical properties of the films were studied. The results show that the WS2 film had a loose and porous structure with coarse grains and many pores; the density of microstructure was poor. Compared with those of the WS2 film, the grain size of the Ti/WS2 composite film was reduced and the structure was densified. The doping of lanthanum further reduced the grain size of the film, and the microstructure was more compact. The doping of lanthanum also reduced the atomic ratio of sulfur to tungsten in the film, increased the relative content of the hard tungsten phase, and finally increased the hardness and deformation resistance of the film.
中图分类号 TG174.444 DOI 10.11973/jxgccl202012004
所属栏目 试验研究
基金项目 国防基础科研计划项目（JCKY2018419C101）；河南省科技攻关项目（182102210299）
收稿日期 2019/12/10
修改稿日期 2020/11/2
网络出版日期
作者单位点击查看
备注贺江涛(1993—),男,河南周口人,硕士研究生
引用该论文: HE Jiangtao,CAI Haichao,XUE Yujun,YANG Fang,MA Xiqiang. Microstructure and Nanoindentation Mechanical Properties of WS2 Film withDifferent Doping Elements by Magnetron Sputtering[J]. Materials for mechancial engineering, 2020, 44(12): 24～28
贺江涛,蔡海潮,薛玉君,杨芳,马喜强. 磁控溅射不同元素掺杂WS2薄膜的组织和纳米压痕力学性能[J]. 机械工程材料, 2020, 44(12): 24～28
共有人对该论文发表了看法，其中：
人认为该论文很差
人认为该论文较差
人认为该论文一般
人认为该论文较好
人认为该论文很好
参考文献
【1】ERDEMIR A.Review of engineered tribological interfaces for improved boundary lubrication[J].Tribology International,2005,38(3):249-256.
【2】HILTON M R,FLEISCHAUER P D.Applications of solid lubricant films in spacecraft[J].Surface and Coatings Technology,1992,54/55:435-441.
【3】CURRY J F,WILSON M A,LUFTMAN H S,et al.Impact of microstructure on MoS2 oxidation and friction[J].ACS Applied Materials & Interfaces,2017,9(33):28019-28026.
【4】POLCAR T,CAVALEIRO A.Self-adaptive low friction coatings based on transition metal dichalcogenides[J].Thin Solid Films,2011,519(12):4037-4044.
【5】权鑫,孙嘉奕,翁立军.WS2薄膜/空间液体润滑剂复合润滑体系的摩擦学性能研究[J].摩擦学学报,2014,34(6):665-672.
【6】WONG K C,LU X,COTTER J,et al.Surface and friction characterization of MoS2 and WS2 third body thin films under simulated wheel/rail rolling-sliding contact[J].Wear,2008,264(7/8):526-534.
【7】DEEPTHI B,BARSHILIA H C,RAJAM K S,et al.Structure,morphology and chemical composition of sputter deposited nanostructured Cr-WS2 solid lubricant coatings[J].Surface and Coatings Technology,2010,205(2):565-574.
【8】XU S S,GAO X M,HU M,et al.Microstructure evolution and enhanced tribological properties of Cu-doped WS2 films[J].Tribology Letters,2014,55(1):1-13.
【9】ZHENG X H,TU J P,LAI D M,et al.Microstructure and tribological behavior of WS2-Ag composite films deposited by RF magnetron sputtering[J].Thin Solid Films,2008,516(16):5404-5408.
【10】刘京京,李伟,孟佳,等.CrAlN/WS2纳米多层膜的微观结构和力学性能研究[J].功能材料,2016,47(12):12118-12123.
【11】尹桂林,黄平华,余震,等.MoS2/WS2共溅射复合薄膜的微结构及其摩擦磨损性能研究[J].摩擦学学报,2007,27(1):41-44.
【12】杨芳儿,鲁叶,李昂,等.调制比对WS<i>x/a-C多层膜微观组织及摩擦学性能的影响[J].摩擦学学报,2017,37(3):387-394.
【13】杨锋,王快社,刘仁智,等.掺杂镧对TZM合金组织与性能的影响[J].机械工程材料,2012,36(3):43-45.
【14】SHARMA S P,DWIVEDI D K,JAIN P K.Effect of La2O3 addition on the microstructure,hardness and abrasive wear behavior of flame sprayed Ni based coatings[J].Wear,2009,267(5/6/7/8):853-859.
【15】RENEVIER N,FOX V,TEER D,et al.Coating characteristics and tribological properties of sputter-deposited MoS2/metal composite coatings deposited by closed field unbalanced magnetron sputter ion plating[J].Surface and Coatings Technology,2000,127(1):24-37.
【16】金辉,李新梅.微量锆、镧对Al-Zn-Mg-Cu合金组织和性能的影响[J].机械工程材料,2017,41(2):102-105.
【17】SONG X,WANG L,ZHAO Z,et al.Effects of La on isothermal oxidation behavior of a Ni-Cr-W-Mo heat-resistant alloy at 1173 K[J].Chinese Journal of Materials Research,2009,23(3):275-282.
【18】鞠鹏飞,王海新,蒲吉斌,等.空间部件表面Ti/MoS2润滑涂层性能研究[J].真空科学与技术学报,2018,38(10):83-87.
【19】QUAZI M M,FAZAL M A,HASEEB A S M A,et al.Effect of rare earth elements and their oxides on tribo-mechanical performance of laser claddings:A review[J].Journal of Rare Earths,2016,34(6):549-564.
【20】庞秋,胡志力,张荣,等.稀土改性Cr涂层对开孔Ni-Cr-Fe泡沫合金组织结构及抗高温氧化性能的影响[J].稀有金属材料与工程,2016,45(7):1826-1831.
【21】李红霞,宋克兴,张彦敏,等.稀土元素La对Zn-Cu-Ti-Mg合金组织和性能的影响[J].金属热处理,2018,43(10):25-30.
【22】张晓玲,胡奈赛.提高溅射沉积MoS2膜耐磨性的途径及分析[J].材料工程,1999,27(10):44-47.
【23】PANDE C S,COOPER K P.Nanomechanics of Hall-Petch relationship in nanocrystalline materials[J].Progress in Materials Science,2009,54(6):689-706.
【24】JI Y,REN H,LIU X,et al.Effect of rare earth on super-cooled austenite transformation of 20MnCrNi2Mo wear-resistant cast steel and its mechanism[J].Rare Metal Materials & Engineering,2017,46(4):997-1002.
【25】徐衡.稀土元素镧对汽车轮毂用A356铝合金显微组织与力学性能的影响[J].机械工程材料,2017,41(11):68-72.
【26】MUSIL J,JIROUT M.Toughness of hard nanostructured ceramic thin films[J].Surface and Coatings Technology,2007,201(9):5148-5152.
【27】LEYLAND A,MATTHEWS A.On the significance of the H/E ratio in wear control:A nanocomposite coating approach to optimised tribological behaviour[J].Wear,2000,246(1/2):1-11.
【2】HILTON M R,FLEISCHAUER P D.Applications of solid lubricant films in spacecraft[J].Surface and Coatings Technology,1992,54/55:435-441.
【3】CURRY J F,WILSON M A,LUFTMAN H S,et al.Impact of microstructure on MoS2 oxidation and friction[J].ACS Applied Materials & Interfaces,2017,9(33):28019-28026.
【4】POLCAR T,CAVALEIRO A.Self-adaptive low friction coatings based on transition metal dichalcogenides[J].Thin Solid Films,2011,519(12):4037-4044.
【5】权鑫,孙嘉奕,翁立军.WS2薄膜/空间液体润滑剂复合润滑体系的摩擦学性能研究[J].摩擦学学报,2014,34(6):665-672.
【6】WONG K C,LU X,COTTER J,et al.Surface and friction characterization of MoS2 and WS2 third body thin films under simulated wheel/rail rolling-sliding contact[J].Wear,2008,264(7/8):526-534.
【7】DEEPTHI B,BARSHILIA H C,RAJAM K S,et al.Structure,morphology and chemical composition of sputter deposited nanostructured Cr-WS2 solid lubricant coatings[J].Surface and Coatings Technology,2010,205(2):565-574.
【8】XU S S,GAO X M,HU M,et al.Microstructure evolution and enhanced tribological properties of Cu-doped WS2 films[J].Tribology Letters,2014,55(1):1-13.
【9】ZHENG X H,TU J P,LAI D M,et al.Microstructure and tribological behavior of WS2-Ag composite films deposited by RF magnetron sputtering[J].Thin Solid Films,2008,516(16):5404-5408.
【10】刘京京,李伟,孟佳,等.CrAlN/WS2纳米多层膜的微观结构和力学性能研究[J].功能材料,2016,47(12):12118-12123.
【11】尹桂林,黄平华,余震,等.MoS2/WS2共溅射复合薄膜的微结构及其摩擦磨损性能研究[J].摩擦学学报,2007,27(1):41-44.
【12】杨芳儿,鲁叶,李昂,等.调制比对WS<i>x/a-C多层膜微观组织及摩擦学性能的影响[J].摩擦学学报,2017,37(3):387-394.
【13】杨锋,王快社,刘仁智,等.掺杂镧对TZM合金组织与性能的影响[J].机械工程材料,2012,36(3):43-45.
【14】SHARMA S P,DWIVEDI D K,JAIN P K.Effect of La2O3 addition on the microstructure,hardness and abrasive wear behavior of flame sprayed Ni based coatings[J].Wear,2009,267(5/6/7/8):853-859.
【15】RENEVIER N,FOX V,TEER D,et al.Coating characteristics and tribological properties of sputter-deposited MoS2/metal composite coatings deposited by closed field unbalanced magnetron sputter ion plating[J].Surface and Coatings Technology,2000,127(1):24-37.
【16】金辉,李新梅.微量锆、镧对Al-Zn-Mg-Cu合金组织和性能的影响[J].机械工程材料,2017,41(2):102-105.
【17】SONG X,WANG L,ZHAO Z,et al.Effects of La on isothermal oxidation behavior of a Ni-Cr-W-Mo heat-resistant alloy at 1173 K[J].Chinese Journal of Materials Research,2009,23(3):275-282.
【18】鞠鹏飞,王海新,蒲吉斌,等.空间部件表面Ti/MoS2润滑涂层性能研究[J].真空科学与技术学报,2018,38(10):83-87.
【19】QUAZI M M,FAZAL M A,HASEEB A S M A,et al.Effect of rare earth elements and their oxides on tribo-mechanical performance of laser claddings:A review[J].Journal of Rare Earths,2016,34(6):549-564.
【20】庞秋,胡志力,张荣,等.稀土改性Cr涂层对开孔Ni-Cr-Fe泡沫合金组织结构及抗高温氧化性能的影响[J].稀有金属材料与工程,2016,45(7):1826-1831.
【21】李红霞,宋克兴,张彦敏,等.稀土元素La对Zn-Cu-Ti-Mg合金组织和性能的影响[J].金属热处理,2018,43(10):25-30.
【22】张晓玲,胡奈赛.提高溅射沉积MoS2膜耐磨性的途径及分析[J].材料工程,1999,27(10):44-47.
【23】PANDE C S,COOPER K P.Nanomechanics of Hall-Petch relationship in nanocrystalline materials[J].Progress in Materials Science,2009,54(6):689-706.
【24】JI Y,REN H,LIU X,et al.Effect of rare earth on super-cooled austenite transformation of 20MnCrNi2Mo wear-resistant cast steel and its mechanism[J].Rare Metal Materials & Engineering,2017,46(4):997-1002.
【25】徐衡.稀土元素镧对汽车轮毂用A356铝合金显微组织与力学性能的影响[J].机械工程材料,2017,41(11):68-72.
【26】MUSIL J,JIROUT M.Toughness of hard nanostructured ceramic thin films[J].Surface and Coatings Technology,2007,201(9):5148-5152.
【27】LEYLAND A,MATTHEWS A.On the significance of the H/E ratio in wear control:A nanocomposite coating approach to optimised tribological behaviour[J].Wear,2000,246(1/2):1-11.
相关信息
