37CrMnMo钢表面原子层沉积Al2O3超薄膜的防护性能
Protective Performance of Atomic Layer Deposition Al2O3 Ultra-thin Film on 37CrMnMo Steel Surface
摘 要
利用原子层沉积（ALD）技术在37CrMnMo钢表面沉积Al2O3超薄膜，通过极化曲线、电化学阻抗谱以及形貌表征，分析了薄膜的致密性以及薄膜厚度对基底的防护效果。结果表明：超薄Al2O3膜致密均匀，且薄膜孔隙率随其厚度的增加而降低；与合金钢基材相比，表面沉积150 nm厚Al2O3薄膜的37CrMnMo钢，其腐蚀电流密度降低了三个数量级；在0.1 mol/L NaCl溶液中，Al2O3薄膜对37CrMnMo钢基底腐蚀起到了良好的防护作用。
原子层沉积
Al2O3薄膜
腐蚀
合金钢
37CrMnMo steel
atomic layer deposition
Al2O3 film
corrosion
alloy steel
Abstract
Al2O3 ultra-thin films were deposited on 37CrMnMo steel surface by atomic layer deposition (ALD) technique. The compactness of films and protective effect of film thickness on the substrate were analyzed through polarization curves, electrochemical impedance spectroscopy and morphology characterization. The results show that the ultra-thin Al2O3 films were dense and uniform, and the porosity of films decreased with the increase of thickness. The corrosion current density of 37CrMnMo steel with 150 nm Al2O3 film deposited on the surface was reduced by three orders of magnitude compared with alloy steel base material. The Al2O3 films had a good protective effect on the corrosion of 37CrMnMo steel substrate in 0.1 mol/L NaCl solution.
中图分类号 TG174 DOI 10.11973/fsyfh-202106006
所属栏目 试验研究
基金项目 国家自然基金（51501109）；上海市科委地方院校能力建设项目（17030501400）
收稿日期 2019/4/11
修改稿日期
网络出版日期
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引用该论文: LIU Peng,XU Xincheng,QIN Jiayu,HUANG Dacheng,ZHANG Yalong. Protective Performance of Atomic Layer Deposition Al2O3 Ultra-thin Film on 37CrMnMo Steel Surface[J]. Corrosion & Protection, 2021, 42(6): 33
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