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磁控溅射制备Al-Cu合金薄膜的纳米压痕力学性能与强化机制
          
Nanoindentation Mechanical Properties and Strengthening Mechanism of Magnetron Sputtered Al-Cu Alloy Films

摘    要
采用磁控溅射方法在不锈钢表面制备了铜原子分数在0~11.8%的Al-Cu合金薄膜,研究了铜含量对薄膜微观结构、纳米压痕力学性能和强化机制的影响。结果表明:纯铝薄膜呈现面心立方结构,铜原子分数在2.2%~6.5%时Al-Cu合金薄膜均形成过饱和固溶体相,当铜原子分数超过6.5%后,薄膜中生成了AlCu化合物。随铜含量的增加,薄膜的晶粒尺寸减小,硬度和弹性模量增加,当铜原子分数增至11.8%时,晶粒尺寸为34.7 nm,硬度和弹性模量分别比纯铝薄膜提高了212.5%,2.2%;当铜原子分数在0~6.5%时薄膜的强化主要来自于细晶强化和固溶强化,当铜原子分数超过6.5%后,薄膜的强化是细晶强化、固溶强化和第二相强化共同作用的结果。
标    签 Al-Cu合金薄膜   纳米压痕力学性能   微观结构   强化机制   磁控溅射   Al-Cu alloy film   nanoindentation mechanical property   microstructure   strengthening mechanism   magnetron sputtering  
 
Abstract
Al-Cu alloy films with copper atomic fractions of 0-11.8% were prepared on stainless steel by magnetron sputtering method. The effects of copper content on the microstructure, nanoindentation mechanical properties and strengthening mechanism of the films were investigated. The results show that the pure aluminum film had a face-centered cubic structure. When the copper atomic fraction was between 2.2% and 6.5%, supersaturated solid solution phases were formed in Al-Cu alloy films. When the copper atomic fraction exceeded 6.5%, AlCu compounds were formed in films. With the increase of copper content, the grain size of the film decreased, and the hardness and elastic modulus increased. When the copper atomic fraction increased to 11.8%, the grain size was 34.7 nm, and the hardness and elastic modulus increased by 212.5% and 2.2% those of the pure aluminum film, respectively. When the copper atomic fraction was between 0 and 6.5%, the strengthening of films mainly depended on grain refinement strengthening and solid solution strengthening. When the copper atomic fraction exceeded 6.5%, the strengthening of films was determined by the combination of grain refinement strengthening, solid solution strengthening and second phase strengthening.

中图分类号 TG146.21   DOI 10.11973/jxgccl202207001

 
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所属栏目 试验研究

基金项目 国家自然科学基金资助项目(52002240);上海市大学生创新创业训练计划项目(202011458004)

收稿日期 2021/4/7

修改稿日期 2022/5/7

网络出版日期

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备注上官福军(1995-),男,浙江龙港人,硕士研究生导师:尚海龙副教授

引用该论文: SHANGGUAN Fujun,SHANG Hailong,MA Bingyang,LI Wenge,ZHAO Yuantao,LIU Fukang,YU Dayi. Nanoindentation Mechanical Properties and Strengthening Mechanism of Magnetron Sputtered Al-Cu Alloy Films[J]. Materials for mechancial engineering, 2022, 46(7): 1~5
上官福军,尚海龙,马冰洋,李文戈,赵远涛,刘福康,于大一. 磁控溅射制备Al-Cu合金薄膜的纳米压痕力学性能与强化机制[J]. 机械工程材料, 2022, 46(7): 1~5


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